A Three-Dimensional Calculation of the Reactor Impedance for Planar-Type Cylindrical Inductively Coupled Plasma Sources

  • Kwon, Deuk-Chul ;
  • Yoon, Nam-Sik
  • Received : 2015.11.04
  • Accepted : 2015.11.16
  • Published : 2015.11.30


The reactor impedance is calculated for a planar-type cylindrical inductively coupled plasma source by expanding the electromagnetic fields into their Fourier-Bessel series forms including the three-dimensional shape of the antenna. The mode excitation method is utilized to determine the electromagnetic fields based on a Poynting theorem-like relationship. From the obtained electromagnetic fields, a tractable form of the reactor impedance is obtained as a function of various plasma and geometrical parameters and applied to carry out a parametric study.


Electromagnetic fields;ICP;Reactor impedance


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