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Electrical properties of piezoelectric PZT thick film by aerosol deposition method

에어로졸 증착법에 의한 압전 PZT 후막의 전기적 특성

  • Received : 2015.10.23
  • Accepted : 2015.11.06
  • Published : 2015.12.31

Abstract

Lead zirconate titanate (PZT) thick films with thickness of $10{\sim}20{\mu}m$ were fabricated on silicon substrate by aerosol deposition method. As-deposited films on silicon were annealed at the temperatures of $700^{\circ}C$. The electrical properties of films deposited by PZT powders were characterized using impedance analyzer and Sawyer-Tower circuit. The PZT powder was prepared by both conventional solid reaction process and sol-gel process. The remanent polarization, coercive field, and dielectric constant of the $10{\mu}m$ thick film with solid reaction process were $20{\mu}C/cm^2$, 30 kV/cm and 1320, respectively. On the other hand, the PZT films by sol-gel process showed a poor dielectric constant of 635. The reason was probably due to the presence of pores produced from organic residue during annealing.

Keywords

PZT powder;Sol-gel process;Aerosol deposition method;Dielectric constant;Piezoelectric coefficient;Hysteresis loop;Remnant polarization;Coercive field

References

  1. R.A. Dorey and R.W. Whatmore, "Electroceramic thick film fabrication for MEMS:, J. Electroceram. 12 (2004) 19. https://doi.org/10.1023/B:JECR.0000033999.74149.a3
  2. G.H. Haertling, "Ferroeletric ceramics: History and technology", J. Amer. Cera. Soc. 84 (1999) 797.
  3. J.H. Kim, J.H. Hwang, T.Y. Lim and S.H. Kim, "Fabrication and properties of superhydrophobic $SiO_2$ thin film by sol-gel method", J. Korean Cryst. Growth Cryst. Technol. 19 (2009) 277.
  4. N. Setter, "Electroceramics: Looking ahead", J. Euro. Ceram. Soc. 21 (2001) 1279. https://doi.org/10.1016/S0955-2219(01)00217-5
  5. J. Akedo and M. Lebedev, "Microstructure and electrical properties of lead zirconate titanate thick films deposited by aerosol deposition method", Japan J. Appl. Phys. 38 (1999) 5397. https://doi.org/10.1143/JJAP.38.5397
  6. J.J. Choi, J.H. Jang, B.D. Hahn, D.S. Park, W.H. Yoon, J.H. Ryu and C. Park, "Preparation of highly dense PZN-PZT thick films by the aerosol deposition method using excess PbO powder", J. Amer. Cera. Soc. 90 (2007) 3389. https://doi.org/10.1111/j.1551-2916.2007.01901.x
  7. A.G. Evans and J.W. Hutchinson, "The thermomechanical integrity of thin films and multilayers", Acta Metall. et Mater. 43 (1995) 2507. https://doi.org/10.1016/0956-7151(94)00444-M
  8. K.H. Kim, K.S. Bang and C. Park "Fabrication of piezoelectric PZT film by aerosol deposition method", J. Ocean Eng. Tech. 27 (2013) 95. https://doi.org/10.5574/KSOE.2013.27.6.095
  9. Y. Park, J.K. Lee, I. Chung and J.Y. Lee, "Delamination behavior of Pt in a $SiO_2/Pb(ZrxTi1-x)O_3/Pt$ ferroelectric thin-film capacitor", J. Appl. Phys. 89 (2001) 2327. https://doi.org/10.1063/1.1326463
  10. J.H. Park, K.S. Bang and C. Park, "Fabrication of piezoelectric PZT thick film by sol-gel process", J. Ocean. Eng. Tech. 29 (2014) 94.
  11. Q. Zhang, S. Corkovic, C. Shaw, Z. Huang and R.W. Whatmore, "Effect of porosity on the ferroelectrical properties of sol-gel prepared lead zirconate thin films", Thin Solid Films 488 (2005) 258. https://doi.org/10.1016/j.tsf.2005.04.034
  12. A.L. Khilkin, V.K. Yarmarkin, A. Wu, M. Avdeev, P.M. Vilarinbo and J. Baptista, "PZT-based piezoelectric composites via modified sol-gel route", J. Euro. Ceram. Soc. 21 (2001) 1535. https://doi.org/10.1016/S0955-2219(01)00058-9
  13. R.A. Dorey and R.W. Whatmore, "Electrical properties of high density PZT and PMN-PT/PZT thick films produced using ComFi technology", J. Euro. Ceram. Soc. 24 (2004) 1091. https://doi.org/10.1016/S0955-2219(03)00542-9
  14. R.A. Dorey, R.W. Whatmore, S.P. Beeby, R.N. Torah and N.M. White, "Screen printed PZT composite thick films", Inter. Ferroelec. 63 (2004) 89. https://doi.org/10.1080/10584580490458766

Acknowledgement

Supported by : 부경대학교