- Volume 50 Issue 1
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Adsorption Property of Silicone Rubber Sticking Chuck for OLED Glass Substrate
- Kim, Jin-Hee (Department of Polymer Engineering, University of Suwon) ;
- Chung, Kyung-Ho (Department of Polymer Engineering, University of Suwon)
- Received : 2015.02.12
- Accepted : 2015.03.02
- Published : 2015.03.31
Manufacturing process of OLED contains adsorption-desorption process of glass substrate. There are several adsorption methods of glass substrate such as atmospheric pressure, vacuum and electrostatic adsorption. However, these methods are very complex to connect system. Therefore, the adsorption method using silicone rubber based sticking chuck was proposed in this study. Three types of silicone rubbers having 0, 19.3 and 32.2 wt% of fluorine were used and their mechanical properties, surface energies and adsorption properties were examined. According to the results
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