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Study on Characteristics of Micro Patterned Copper Electrodeposition according to Parameters in Laser Beam Machining

레이저빔 가공 인자에 따른 구리도금 미세 패터닝 특성 연구

  • Shin, Hong Shik (Department of Energy System Engineering, Korea National University of Transportation)
  • 신홍식 (한국교통대학교 에너지시스템공학과)
  • Received : 2015.11.02
  • Accepted : 2015.11.18
  • Published : 2015.11.30

Abstract

This paper proposes a fabrication process of deposited layer with micro patterns that uses a combination of a pulsed laser beam machining and an electrodeposition. This process consists of the electrodeposition and the laser beam machining. The deposited layer on metal can be selectively eliminated by laser ablation. As a result, the deposited layer with micro patterns can be fabricated without a mask. The characteristics of the deposited layer on stainless steel were investigated according to the average power and marking speed in the pulsed laser beam machining. The optimal laser beam conditions for precise micro patterning of the deposited layer were determined. Finally, the deposited copper layer with micro text was successfully fabricated by the pulsed laser beam machining.

Acknowledgement

Supported by : 한국교통대학교