2축 정전부양형 MEMS 자이로스코프의 향상된 제작 공정 개발

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석세영;임근배
Seok, Seyeong;Lim, Geunbae

  • 투고 : 2015.07.31
  • 심사 : 2015.08.04
  • 발행 : 2015.07.31

초록

This paper describes optimizing fabrication methods for 2-axis electrically levitated MEMS gyroscope. Electrostatically levitated gyroscope has very high potential of performance due to the fact that its proof mass is not mechanically bound to any other structures, but its complex structure and difficulty of fabrication holds back the research that only a few researches have been reported. In this work, fabrication method for glass-silicon-glass 3-floor structure for 2-axis electrically levitated MEMS gyroscope is presented, including simplified multi-level glass etch method utilizing photoresist attack, preventing metal diffusion by adding middle layer of metal electrode, overcoming Deep RIE limitation by separate fabrication of silicon structures and keeping the electrode safe from dicing debris.

키워드

Fabrication;MEMS;Gyroscope

참고문헌

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과제정보

연구 과제 주관 기관 : 한국연구재단