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The Study on the Precursor Adsorption using in-situ Nanoparticle-assisted Attenuated Total Reflectance Infrared Spectroscopy

  • Shin, Jae-Soo ;
  • Park, Myung-Su ;
  • Jung, Won-Jun ;
  • Park, Hee-Jung ;
  • Yun, Ju-Young ;
  • Kim, TaeWan ;
  • Kang, Sang-Woo
  • Received : 2015.07.23
  • Accepted : 2015.07.29
  • Published : 2015.07.30

Abstract

The adsorption behavior of tris (dimethylamino)-cyclopentadienyl-zirconium (Cp-Zr) precursor using an in-situ attenuated total reflectance-Fourier transform infrared spectroscopy (ATR-FT-IR) was studied. In attempt to improve the detection intensity of an adsorbed precursor, nanoparticles were uniformly distributed on the Ge ATR crystal surface employing the spray method. The absorption characteristics studies were carried out over the Ge crystal temperature in the range of $30{\sim}50^{\circ}C$. Upon increasing the temperature, a reduction of absorption was observed. Based on the peak intensities of ATR-FT-IR spectroscopy, higher-$ZrO_2$ absorption efficiency occurs when the nano-particles are utilized compared to pure Ge crystal.

Keywords

ATR;Crystal;Nanoparticle;FT-IR

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Cited by

  1. Improving precursor adsorption characteristics in ATR-FTIR spectroscopy with a ZrO2 nanoparticle coating vol.19, pp.2, 2017, https://doi.org/10.1007/s11051-017-3767-0

Acknowledgement

Grant : 차세대 초박막 공정용 측정기술 개발