Characteristics of Sputtering Carbon Films for the Improvement of Physical Properties in Carbon Fiber

탄소섬유 물리적 특성 향상을 위한 스퍼터링 탄소박막의 특성에 대한 연구

  • Received : 2015.10.12
  • Accepted : 2015.10.22
  • Published : 2015.11.01


We investigated the characterizations of carbon films fabricated by dual magnetron sputtering under various RF powers for the improvement of physical properties in carbon fiber (CF). All sputtered carbon films exhibited amorphous structure, regardless of RF powers, resulting in uniform and smooth surfaces. The hardness and elastic modulus are increased with the increase of RF power, and the adhesion and friction properties of carbon films were improved with the increase of RF power. In the results, The increase of RF power in the sputtering method improved tribological properties of the carbon films, and these attributes can be expected to improve the physical properties of the carbon fiber reinforcement plastics.


Carbon;Dual magnetron sputtering;Hardness;Surface roughness;Carbon fiber


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Supported by : 한국철도기술연구원