미세입자의 정밀제어를 위한 표면탄성파 장치의 특성연구 및 설계

Kim, Dongjoon;Eom, Jinwoo;Ko, Byung-Han;Park, No-Cheol;Park, Young-Pil

  • 투고 : 2015.07.09
  • 심사 : 2015.10.12
  • 발행 : 2015.10.20


Surface acoustic wave(SAW) device is used for transporting and patterning micro-scale particles such as cells. In this research, velocity of particles was investigated moved by SAW device with two types of interdigital electrode transducers(IDTs) under various conditions. SAW devices which have single IDTs and double IDTs were designed and fabricated. On the previous studies, resultant velocities of particles were predicted considering output power and power ratio between IDTs-shape. For more accurate prediction, power loss in SAW device and a power difference between two types of IDTs-shape were considered. Maximum error between the test results and predicted values was 5 % so the power loss must be considered in the velocity prediction of the particles.


표면탄성파;미세입자 속도;삽입손실


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