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Design and Analysis of MEMS Vibrating Ring Gyroscope Considering High-g shock reliability

고내충격용 MEMS 진동형 링 자이로스코프 설계 및 분석

Yoon, Sung-Jin;Park, U-Sung
윤성진;박우성

  • Received : 2015.09.02
  • Accepted : 2015.10.08
  • Published : 2015.10.01

Abstract

This paper describes a study for anti high-shock design of MEMS vibrating ring gyroscope. Structure models was made by MEMS technology processing. MEMS Vibrating Ring Gyroscope mechanical structure were not only anti-high shock simulated with the LS Dyna Ver 971 software but also with mathematical analysis and the finite element method in order to confirm the shock reliability. Shock test result of a MEMS vibrating gyroscope being developed to have gun-hardened survivability while maintaining tactical grade navigation performance for application to various guided projectiles.

Keywords

MEMS;Gyroscope;High-g;Shock reliability