레이저 마스킹과 직류전원을 이용한 선택적 전해도금의 재현성 개선

DOI QR코드

DOI QR Code

신홍식
Shin, Hong Shik

  • 투고 : 2015.12.01
  • 심사 : 2016.01.08
  • 발행 : 2016.02.15

초록

A method is proposed for the improvement of deposition reproducibility in the selective electrodeposition process using laser masking and DC voltage. Selective electrodeposition using laser masking and DC voltage can achieve a deposited layer with micro patterns. However, selective electrodeposition using laser masking and DC voltage have a critical problem: the lack of reproducibility in selective deposition. The reproducibility of selective electrodeposition can be improved by a new process that consists of laser masking, two-step electro-deposition, laser scribing, and ultrasonic cleaning. The experiments in this study show that the reproducibility of selective deposition can be successfully improved by the combination of two-step electrodeposition and laser scribing.

키워드

Laser masking;Laser scribing;Electrodeposition characteristics;Copper layer;DC voltage

참고문헌

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