Recent Progress in the Nanoscale Additive Layer Manufacturing Process Using Two-Photon Polymerization for Fabrication of 3D Polymeric, Ceramic, and Metallic Structures

이광자 광중합 공정을 이용한 3차원 미세구조물 제작기술 동향

  • Received : 2016.02.25
  • Accepted : 2016.03.17
  • Published : 2016.04.01


Recently, many studies have been conducted on the nano-scale fabrication technology using twophoton- absorbed polymerization induced by a femtosecond laser. The nano-stereolithography process has many advantages as a technique for direct fabrication of true three-dimensional shapes in the range over several microns with sub-100 nm resolution, which might be difficult to obtain by using general nano/microscale fabrication technologies. Therefore, two-photon induced nano-stereolithography has been recently recognized as a promising candidate technology to fabricate arbitrary 3D structures with sub-100 nm resolution. Many research works for fabricating novel 3D nano/micro devices using the two-photon nano-stereolithography process, which can be utilized in the NT/BT/IT fields, are rapidly advancing.


Nano-Stereolithography;Two-Photon polymerization;Femtosecond laser;3D micro-structure


  1. Son, Y., Yeo, J., Ha, C. W., Lee, J., Hong, S., et al., "Application of the Specific Thermal Properties of Ag Nanoparticles to High-Resolution Metal Patterning," Thermochimica Acta, Vol. 542, pp. 52-56, 2012.
  2. Lim, J. G., Prabhakaran, P., Park, J. S., Son, Y., Kim, T. D., et al., "Synthesis and Photophysical Properties of Two-Photon Absorbing Spirofluorene Derivatives," Journal of Nanoscience and Nanotechnology, Vol. 12, No. 5, pp. 4403-4408, 2012.
  3. Yang, D. Y., Park, S. H., Lim, T. W., Kong, H. J., Yi, S. W., et al., "Ultraprecise Microreproduction of a Three-Dimensional Artistic Sculpture by Multipath Scanning Method in Two-Photon Photopolymerization," Applied Physics Letters, Vol. 90, Paper No. 013113, 2007.
  4. Park, S. H., Lim, T. W., Yang, D. Y., Jeong, J. H., Kim, K. D., et al., "Effective Fabrication of Three-Dimensional Nano/Microstructures in a Single Step Using Multilayered Stamp," Applied Physics Letters, Vol. 88, No. 20, Paper No. 203105, 2006.
  5. Lim, T. W., Park, S. H., Yang, D. Y., Kong, H. J., and Lee, K. S., "Direct Single-Layered Fabrication of 3D Concavo-Convex Patterns in Nano-Stereolithography," Applied Physics A-Materials Science & Processing, Vol. 84, No. 4 , pp. 379-383, 2006.
  6. Park, S. H., Lim, T. W., Yang, D. Y., Yi, S. W., and Kong, H. J., "Direct Fabrication of Micropatterns and Three-Dimensional Structures Using Nanoreplication-Printing (nRP) Process," Sensors and Materials, Vol. 17, No. 2, pp. 65-75, 2005.
  7. Lim, T. W., Son, Y., Jeong, Y. J., Yang, D. Y., Kong, H. J., et al., "Three-Dimensionally Crossing Manifold Micro-Mixer for Fast Mixing in a Short Channel Length," Lab on a Chip, Vol. 11, No. 1, pp. 100-103, 2011.
  8. Passinger, S., Saifullah, M. S. M., Reinhardt, C., Subramanian, K. R. V., Chichkov, B. N., et al., "Direct 3D Patterning of $TiO_2$ Using Femtosecond Laser Pulses," Advanced Materials, Vol. 19, No. 9, pp. 1218-1221, 2007.
  9. Pham, T. A., Kim, D. P., Lim, T. W., Park, S. H., Yang, D. Y., et al., "Three-Dimensional SiCN Ceramic Microstructures via Nano-Stereolithography of Inorganic Polymer Photoresists," Advanced Functional Materials, Vol. 16, No. 9, pp. 1235-1241, 2006.
  10. Park, J. J., Prabhakaran, P., Jang, K. K., Lee, Y. G., Lee, J. H., et al., "Photopatternable Quantum Dots Forming Quasi-Ordered Arrays," Nano Letters, Vol. 10, No. 7, pp. 2310-2317, 2010.
  11. Krini, R., Ha, C. W., Prabhakaran, P., El Mard, H., Yang, D. Y., et al., "Photosensitive Functionalized Surface-Modified Quantum Dots for Polymeric Structures via Two-Photon-Initiated Polymerization Technique," Macromolecular Rapid Communications, Vol. 36, No. 11, pp. 1108-1114, 2015.
  12. Kim, W. J., Kim, S. J., Lee, K. S., Samoc, M., Cartwright, A. N., et al., "Robust Microstructures Using UV Photopatternable Semiconductor Nanocrystals," Nano Letters, Vol. 8, No. 10, pp. 3262-3265, 2008.
  13. Jeong, Y. J., Lim, T. W., Son, Y., Yang, D. Y., Kong, H. J., et al., "Proportional Enlargement of Movement by Using an Optically Driven Multi-Link System with an Elastic Joint," Optics Express, Vol. 18, No. 13, pp. 13745-13753, 2010.
  14. Ha, C. W. and Yang, D. Y., "Rotational Elastic Micro Joint Based on Helix-Augmented Cross-Spring Design for Large Angular Movement," Optics Express, Vol. 22, No. 17, pp. 20789-20797, 2014.
  15. Ha, C. W. and Yang, D. Y., "Elastic Translational Joint for Large Translation of Motion Using Spiral Structures," International Journal of Intelligent Mechatronics and Robotics, Vol. 3, No. 4, 2013.
  16. Kumi, G., Yanez, C. O., Belfield, K. D., and Fourkas, J. T., "High-Speed Multiphoton Absorption Polymerization: Fabrication of Microfluidic Channels with Arbitrary Cross-Sections and High Aspect Ratios," Lab on a Chip, Vol. 10, No. 8, pp. 1057-1060, 2010.


Grant : BK21플러스

Supported by : 부산대학교