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Measurement of the Particle Current Changes Associated with the Flatness of Deflector Mesh Surface in Particle Beam Mass Spectrometer System

  • Kim, Dongbin (Vacuum Center, Korea Research Institute of Standards and Science) ;
  • Kim, TaeWan (Vacuum Center, Korea Research Institute of Standards and Science) ;
  • Jin, Yinhua (SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University) ;
  • Mun, Jihun (Vacuum Center, Korea Research Institute of Standards and Science) ;
  • Lim, In-Tae (Vacuum Center, Korea Research Institute of Standards and Science) ;
  • Kim, Ju-Hwang (Center for Advanced Instrumentation, Division of Industrial Metrology, Korea Research Institute of Standards and Science) ;
  • Kim, Taesung (School of Mechanical Engineering, Sungkyunkwan University) ;
  • Kang, Sang-Woo (Vacuum Center, Korea Research Institute of Standards and Science)
  • Received : 2016.03.19
  • Accepted : 2016.03.31
  • Published : 2016.03.30

Abstract

The surface flatness of metal meshes in a deflector of particle beam mass spectrometer (PBMS) required ideally flat, and this can specify the particle trajectories which goes through the detector. In this research, charged particle current was measured using the different surface roughness deflectors. NaCl particles were generated monodispersed in its size by using differential mobility analyzer and the whole processes were followed the way calibrating PBMS. The results indicate that the mesh surface morphology in the deflector can affect to the particle size and the concentration errors, and sensitivity of PBMS.

Acknowledgement

Supported by : Ministry of Science, ICT and Future Planning

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