Characterization of F- and Al-codoped ZnO Transparent Conducting Thin Film prepared by Sol-Gel Spin Coating Method

Nam, Gil Mo;Kwon, Myoung Seok

  • 투고 : 2016.02.03
  • 심사 : 2016.03.29
  • 발행 : 2016.05.31


ZnO thin film co-doped with F and Al was prepared on a glass substrate via simple non-alkoxide sol-gel spin coating. For a fixed F concentration, the addition of Al co-dopant was shown to reduce the resistivity mainly due to an increase in electrical carrier density compared with ZnO doped with F only, especially after the second post-heat-treatment in a reducing environment. There was no effective positive contribution to the reduction in resistivity due to the mobility enhancement by the addition of Al co-dopant. Optical transmittance of the ZnO thin film co-doped with F and Al in the visible light domain was shown to be higher than that of the ZnO thin film doped with F only.


Sol-gel;ZnO;Co-doping;Transparent conducting film;Spin-coating


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연구 과제 주관 기관 : University of Seoul