Optimization of Printing Process for the Development of Metal-oxide Resistivity Sensor

전기저항형 금속산화물 센서의 인쇄공정 최적화에 관한 연구

  • Received : 2016.03.09
  • Accepted : 2016.04.28
  • Published : 2016.06.01


In this paper, we have studied about the optimum fabrication condition of the printed Indium Tin Oxide (ITO) layers for the electrical resistance-type sensor application. We have investigated on the substrates surface treatments, mixing ratio of organic binder/ITO powder, and viscosity of the printing paste to determine the optimum condition of the screen printed ITO layer. Also, we found that the printing condition is closely related with the sensor performance. To know the feasibility of printed ITO layer as an electrical resistance-type sensor, we have fabricated the ITO sensors with a printed and sputtered ITO layers. The printed ITO films revealed $10^2$ times higher sensitivity than the sputtered ITO layer. Also, the sputtered ITO layer exhibited an operating temperature of $127^{\circ}C$ at the operating voltage of 5 V. While, in case of the printed ITO layer showed the operating temperature of $27.6^{\circ}C$ in high operating voltage of 30 V. We found that the printed ITO layer is suitable for the various sensor applications.


Indium Tin Oxide;Gas sensor;Fire sensor


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Grant : 해양환경변화대응기술

Supported by : 한국해양과학기술원 부설 선박해양플랜트연구소