Transmission Electron Microscopy Specimen Preparation of Delicate Materials Using Tripod Polisher

Cha, Hyun-Woo;Kang, Min-Chul;Shin, Keesam;Yang, Cheol-Woong

  • Received : 2016.05.30
  • Accepted : 2016.06.23
  • Published : 2016.06.30


Transmission electron microscopy (TEM) is a powerful tool for analyzing a broad range of materials and provides localized information about the microstructure. However, the analysis results are strongly influenced by the quality of the thin foil specimen. Sample preparation for TEM analysis requires considerable skill, especially when the area of interest is small or the material of interest is difficult to thin because of its high hardness and its mechanical instability when thinned. This article selectively reviews recent advances in TEM sample preparation techniques using a tripod polisher. In particular, it introduces two typical types (fl at type and wedge type) of TEM sample preparation and the benefits and drawbacks of each method; finally, a method of making better samples for TEM analysis is suggested.


Tripod polisher;Flat-type polishing;Wedge-type polishing;Hard materials;Sample preparation


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Supported by : NRF, National Research Council of Science and Technology (NST)