Kinematic Analysis of a 6-DOF Ultra-Precision Positioning Stage Based on Flexure Hinge

플렉셔 힌지 기반 6-자유도 초정밀 위치 결정 스테이지의 기구학 해석

  • Received : 2015.12.26
  • Accepted : 2016.04.26
  • Published : 2016.07.01


This paper describes kinematic analysis of a 6-degrees-of-freedom (DOF) ultra-precision positioning stage based on a flexure hinge. The stage is designed for processes which require ultra-precision and high load capacities, e.g. wafer-level precision bonding/assembly. During the initial design process, inverse and forward kinematic analyses were performed to actuate the precision positioning stage and to calculate workspace. A two-step procedure was used for inverse kinematic analysis. The first step involved calculating the amount of actuation of the horizontal actuation units. The second step involved calculating the amount of actuation of the vertical actuation unit, given the the results of the first step, by including a lever hinge mechanism adopted for motion amplification. Forward kinematic analysis was performed by defining six distance relationships between hinge positions for in-plane and out-of-plane motion. Finally, the result of a circular path actuation test with respect to the x-y, y-z, and x-z planes is presented.


Flexure hinge;Parallel mechanism;Inverse kinematics;Forward kinematics;Positioning stage


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Supported by : 동양미래대학교