- Volume 26 Issue 2
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Hydrophobic and Mechanical Characteristics of Hydrogenated Amorphous Carbon Films Synthesized by Linear Ar/CH4 Microwave Plasma
- Han, Moon-Ki (Department of Electrical and Computer Engineering, Pusan National University) ;
- Kim, Taehwan (Department of Electrical and Computer Engineering, Pusan National University) ;
- Cha, Ju-Hong (Department of Electrical and Computer Engineering, Pusan National University) ;
- Kim, Dong-Hyun (Department of Electrical and Computer Engineering, Pusan National University) ;
- Lee, Hae June (Department of Electrical and Computer Engineering, Pusan National University) ;
- Lee, Ho-Jun (Department of Electrical and Computer Engineering, Pusan National University)
- Received : 2016.02.13
- Accepted : 2016.03.11
- Published : 2017.03.30
A 2.45 GHz microwave plasma with linear antenna has been prepared for hydrophobic and wear-resistible surface coating of carbon steel. Wear-resistible properties are required for the surface protection of cutting tools and achieved by depositing a hydrogenated amorphous carbon film on steel surface through linear microwave plasma source that has
Supported by : National Research Foundation of Korea (NRF)
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