Development of particle focusing device to monitor various low pressure processes

다양한 조건의 저압 공정 모니터링을 위한 입자 집속 장치 개발

  • Kim, Myungjoon (Environmental System Research Division, Korea Institute of Machinery and Materials) ;
  • Kim, Dongbin (School of Mechanical Engineering, Sungkyunkwan University) ;
  • Kang, Sang-Woo (Vacuum Center, Korea Research Institute of Standards and Science) ;
  • Kim, Taesung (School of Mechanical Engineering, Sungkyunkwan University)
  • 김명준 (한국기계연구원 환경시스템연구본부) ;
  • 김동빈 (성균관대학교 기계공학부) ;
  • 강상우 (한국표준과학연구원 진공기술센터) ;
  • 김태성 (성균관대학교 기계공학부)
  • Received : 2017.03.15
  • Accepted : 2017.04.17
  • Published : 2017.06.30


As semiconductor process was highly integrated, particle contamination became a major issue. Because particle contamination is related with process yields directly, particles with a diameter larger than half pitch of gate should be controlled. PBMS (Particle beam mass spectrometry) is one of powerful nano particle measurement device. It can measure 5~500 nm particles at ~ 100 mtorr condition in real time by in-situ method. However its usage is restricted to research filed only, due to its big device volume and high price. Therefore aperture changeable aerodynamic lenses (ACALs) which can control particle focusing characteristics by changing its aperture diameter was proposed in this study. Unlike conventional aerodynamic lenses which changes particle focusing efficiency when operating condition is changed, ACALs can maintain particle focusing efficiency. Therefore, it can be used for a multi-monitoring system that connects one PBMS and several process chambers, which greatly improves the commercialization possibility of the PBMS. ACALs was designed based on Stokes number and evaluated by numerical method. Numerical analysis results showed aperture diameter changeable aerodynamic lenses can focus 5 to 100 nm standard particles at 0.1 to 10 torr upstream pressure.


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