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A Study on Energy Reduction in an Outdoor Air Conditioning System for Semiconductor Manufacturing Cleanrooms Using Water Spray Humidification

반도체 클린룸용 외기공조시스템의 수분무 가습을 이용한 에너지절감에 관한 연구

  • 송원일 (한국생산기술연구원 나노오염제어연구실) ;
  • 김기철 (한국생산기술연구원 나노오염제어연구실) ;
  • 유경훈 (한국생산기술연구원 나노오염제어연구실) ;
  • 신대건 ((주)대한피엔씨) ;
  • 태경응 (은성화학(주)) ;
  • 김용식 (삼우시스템(주)) ;
  • 박덕준 ((주)신성이엔지)
  • Received : 2017.03.28
  • Accepted : 2017.05.02
  • Published : 2017.06.30

Abstract

In recent large-scale semiconductor manufacturing cleanrooms, the energy consumption in outdoor air conditioning (OAC) systems to heat, humidify, cool and dehumidify outdoor air(OA) represents about 40~50 % of the total cleanroom power consumption required to maintain cleanroom environment. Therefore, the assessment of energy consumption in outdoor air conditioning systems is essential for reducing the outdoor air conditioning load for a cleanroom. In the present study, an experiment with an outdoor air flow rate of $1,000m^3/h$ was conducted to compare the energy consumption in steam humidification, simple air washer, exhaust air heat recovery type air washer and dry cooling coil(DCC) return water heat recovery type air washer OAC systems. Besides, a numerical analysis was carried out to evaluate the annual energy consumption of the aforementioned four OAC systems. It was shown that the simple air washer, exhaust air heat recovery type air washer and DCC return water heat recovery type air washer OAC systems using water spray humidification were more energy-efficient than the steam humidification OAC system. Furthermore the DCC return water heat recovery type air washer OAC system was the most energy-efficient.

Acknowledgement

Grant : 첨단전자산업을 위한 절전형 열원기술 개발, 공업용 클린룸을 위한 실내 수분무가습 시스템 개발, 기축건물 바닥 설치형 열회수 환기장치 개발

Supported by : 중소기업기술정보진흥원, 한국에너지기술평가원, 한국생산기술연구원

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