Preparation of TiO2 Nanotube Arrays from Thin Film Grown by RF Sputtering

  • Kim, Chang Woo (Department of Graphic Arts Information Engineering, College of Engineering, Pukyong National University)
  • Received : 2018.09.10
  • Accepted : 2018.09.17
  • Published : 2018.09.30


Transparent $TiO_2$ nanotube arrays are successfully prepared by a two-step approach involving electrochemical anodization and RF magnetron sputtering. First, a Ti film is deposited on an FTO substrate by RF magnetron sputtering at room temperature. The morphologies of the Ti film are controlled by the working distance, Ar flow, and DC power. Second, an anodization treatment is electrochemically performed for the formation of nanotube arrays from the deposited Ti film, followed by post-annealing treatment in air for the formation of $TiO_2$ crystallization. The back side of the crystallized $TiO_2$ nanotube arrays is illuminated with solar light to characterize the photoelectrochemical reaction, and their photoelectrochemical properties are investigated. This work provides information on application of a thin film deposited by RF sputtering in the field of photoelectrochemical water splitting.


Supported by : Pukyong National University


  1. H. Seo and J. Kim, Appl. Sci. Converg. Technol. 27, 61 (2018).
  2. T. Sheng, Y. Xu, Y. Jiang, L. Huang, N. Tian, Z. Zhou, I. Broadwell, and S. Sun, Acc. Chem. Res. 49, 2569 (2016).
  3. S. Bai, L. Wang, Z. Li, and Y. Xiong, Adv. Sci. 4, 1600216 (2017).
  4. B. Jeon and Y. K. Kim, Appl. Sci. Converg. Technol. 24, 96 (2015).
  5. H. H. Seo, J. H. Boo, H. W. Jang, M. J. Kim, and J. Boo, Appl. Sci. Converg. Technol. 25, 162 (2016).
  6. M. Law, L. E. Greene, J. C. Johnson, R. Saykally, and P. Yang, Nat. Mater. 4, 455 (2005).
  7. K. Zhu, N. R. Neale, A. Miedaner, and A. J. Frank, Nano Lett. 7, 69 (2007).
  8. G. K. Mor, K. Shankar, M. Paulose, O. K. Varghese, and C. A. Grimes, Nano Lett. 6, 215 (2006).
  9. M. Ge, Q. Li, C. Cao, J. Huang, S. Li, S. Zhang, Z. Chen, K. Zhang, S. S. Al-Deyab, and Y. Lai, Adv. Sci. 4, 1600152 (2017).
  10. H. S. Kim, Appl. Sci. Converg. Technol. 27, 1 (2018).