Annealing Effects of Seed Layers on the Properties of ZnO Nanorods

ZnO 나노로드 특성에 미치는 시드 막 열처리 영향

  • Ma, Tae-Young (Dept. of Electrical Engineering & ERI, Gyeongsang National University) ;
  • Park, Ki-Cheol (Dept. of Semiconductor Engineering & ERI, Gyeongsang National University)
  • Received : 2018.02.19
  • Accepted : 2018.05.24
  • Published : 2018.06.01


We investigated annealing effects of seed layers on the properties of ZnO nanorods grown on the seed layers. ZnO nanorods were grown by a hydrothermal method. ~100 nm-thick ZnO films were sputtered on oxidized Si wafers and quartz as seed layers. The ZnO films were annealed at $400^{\circ}C$, $600^{\circ}C$, and $800^{\circ}C$, respectively. ZnO nanorods were grown at $90^{\circ}C$ for 3 hours in the mixed solution of zinc nitrate hexahydrate and hexamethylenetetramine. X-ray diffraction was carried out to estimate the crystallinity and strain of ZnO films and nanorods. A field emission scanning electron microscope was employed to observe the morphology of the films and nanorods. PL(photoluminescence) measurements were conducted with 266 nm light. It was found that the annealing of seed layers increase the growth rate of nanorods, and change compressive strain of nanorods to tensile strain. The intensity of PL in the UV region reduced by using the annealed seed layers.


Supported by : 경상대학교


  1. Hyoung Min Kim etc., "Effects of doping concentration on the properties of Ga-doped ZnO thin films prepared by RF magnetron sputtering", J. KIEEME, vol. 25, no. 12, pp. 984-989, December 2012.
  2. S.I. Boyadjiev etc., "Preparation and characterization of ALD deposited ZnO thin films studied for gas sensors", Applied Surface Science, vol. 387, no. 30, pp. 1230-1235, November 2016.
  3. Jae-hoon Choi, Xueqiu You, Chul Kim, Jungil Park and James Jungho Pak, "Power generating characteristics of zinc oxide nanorods grown on a flexible substrate by a hydrothermal method, JEET, vol. 5, pp. 640-645, December 2010.
  4. Tae Young Ma, "Variation of structural and optical properties of ZnO nanorods with growing time", J. Korean Inst. Electr. Electron. Mater. Eng., vol. 29, no. 12, pp. 841-846, December 2016.
  5. Tae Young Ma, Ki Cheol Park, "Effects of boron concentration in ZnO:Al seed film on the growth and properties of ZnO nanorods", Trans. KIEE. vol. 66, no. 10, pp. 1488-1493, October 2017.
  6. M. Husham, M.N. Hamodon, S. Paiman, A.A. Abuelsamen, O.F. Farhat, and A.A. Al-Dulaimi, "Synthesis of ZnO nanorods by microwave-assisted chemical-bath deposition for highly sensitive self powered UV detection application", Sensors and Actuators A: Physical, vol. 263, pp. 166-173, 2017.
  7. Rizwan Khan etc., "Enhanced photoluminescence of ZnO nanorods via coupling with localized surface plasmon of Au nanoparticles", Journal of Alloys and Compounds, vol. 682, pp. 643-646, October 2016.
  8. Ercan Karakose and Hakan Colak, "Effects of substrate temperature on the structural properties of ZnO nanorods", Energy, vol. 141, pp. 50-55, September 2017.
  9. N.H. Alvi etc., "Influence of different growth environments on the luminescence properties of ZnO nanorods grown by the vapor-liquid-solid (VLS) method", Materials Letters, vol. 106, pp. 158-163, September 2013.
  10. P.S. Shewale, Y.S. Yu, "The effects of pulse repetition rate on the structural, surface morphological and UV photodetection properties of pulsed laser deposited Mg-doped ZnO nanorods", Ceramics International, vol. 42, Issue 6, pp. 7125-7134, May 2016.
  11. Mohd Firdaus Malek etc., "Influence of various sol concentration on stress/strain and properties of ZnO thin films synthesised by sol-gel technique", Thin Solid Films, vol. 527, pp. 102-109, January 2013.
  12. M.A. Majeed Khan, Sushil Kumar, M. Naziruddin Khan, Maqusood Ahamed, A.S. Al Dwayyan, "Microstructure and blueshift in optical band gap of nanocrystalline AlxZn1-xO thin films", J. of Luminescence, vol. 155, pp. 275-281, November 2014.
  13. Jong-Pil Kim etc., "Optical and electrical properties of ZnO films, codoped with Al and Ga deposited at room temperature by an RF sputtering method", Thin Solid Films, vol. 518, pp. 6179-6183, September 2010.
  14. F.K. Shan, Y.S. Yu, "Band gap energy of pure and Al-doped ZnO thin films", Journal of the European Ceramic Society, vol. 24, pp. 1869-1872, 2004.
  15. Avishek Das etc., "Tuning of transport properties of the double-step chemical bath deposition grown zinc oxide (ZnO) nanowires by controlled annealing: An approach to generate p-type ZnO nanowires", vol. 649, pp. 129-135, March 2018.
  16. Mu Hee Choi, Tae Young Ma, "Erbium concentration effects on the structural and photoluminescence properties of ZnO:Er films", Materials Letters, vol. 62, pp. 1835-1838, October 2008.