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A Study on the Characteristics and Cleanliness of Fluidic Strip Process of Environment-Friendly Aqueous Stripper

친환경 수계 박리액의 유동박리 공정 특성 및 청정성 연구

  • Lee, Ki-Seong (Graduate School of NID Fusing Technology, Seoul National University of Science & Technology) ;
  • Lee, Jaeone (Department of Materials Science and Engineering of Aviation, Jungwon University) ;
  • Kim, Young Sung (Graduate School of NID Fusing Technology, Seoul National University of Science & Technology)
  • 이기성 (서울과학기술대학교 나노IT융합대학원) ;
  • 이재원 (중원대학교 항공재료 공학과) ;
  • 김용성 (서울과학기술대학교 나노IT융합대학원)
  • Received : 2018.06.18
  • Accepted : 2018.07.07
  • Published : 2018.09.28

Abstract

In this research, we investigated the cleanliness by optimizing the water content of the aqueous stripper in fluidic strip process. The stripping properties of the photoresist with optimized aqueous stripper were compared with the commercial organic stripper. The stripping performance was evaluated by electrical and optical characteristics on the surface of the transparent electrode that compare with stripped the transparent electrode surface and the rare surface before patterning by the photoresist. As a result of the photoresist stripping process of the organic stripper and the aqueous stripper optimized for water content, the aqueous stripper exhibited better electrical and optical characteristics than the organic stripper. In the case of the fluidic strip process with organic stripper, the photoresist dissolves in the stripper solution during stripping which can cause re-adsorption by contamination. Whereas that the aqueous stripper under development seems to decrease the photoresist dissolution in the stripper solution. Because the cyclodextrin contained in the stripper captures organic photoresist into hall of cyclodextrin which stripped through swelling and tearing. The photoresist residue captured by the cyclodextrin can be filtered. After the fluidic stripping process by different chemical stripping mechanism, the cleanliness of the organic stripper and aqueous stripper was compared and analyzed.

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