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Hardness and Oxidation Resistance of Ti0.33Al0.67N/CrN Nano-multilayered Superlattice Coatings

  • Ahn, Seung-Su (Production Engineering Research Center, KORLOY) ;
  • Oh, Kyung-Sik (School of Advanced Materials Engineering, Industrial Technology Center for Environment-friendly Materials, Andong National University) ;
  • Chung, Tai-Joo (School of Advanced Materials Engineering, Industrial Technology Center for Environment-friendly Materials, Andong National University) ;
  • Park, Jong-Keuk (Center for Electronic Materials, Korea Institute of Science and Technology)
  • Received : 2018.09.06
  • Accepted : 2018.12.19
  • Published : 2019.01.31

Abstract

$Ti_{0.33}Al_{0.67}N/CrN$ nano-multilayers, which are known to have excellent wear resistance, were prepared using an unbalanced magnetron sputter to have various periods of 2-5 nm. $Ti_{0.33}Al_{0.67}N$ had a hexagonal structure in a single layer, but converted to a cubic structure by forming a multilayer with CrN, which has a cubic structure. Thus, $Ti_{0.33}Al_{0.67}N$ formed a superlattice in the multilayer. The $Ti_{0.33}Al_{0.67}/CrN$ multilayer with a period of 2.5 nm greatly exceeded the hardness of the $Ti_{0.33}Al_{0.67}N$ and the CrN single layer, reaching 39 GPa. According to the low angle X-ray diffraction results, the $Ti_{0.33}Al_{0.67}N/CrN$ multilayer maintained its as-coated structure to a temperature as high as $700^{\circ}C$ and exhibited hardness of 30 GPa. The thickness of the oxide layer of the $Ti_{0.33}Al_{0.67}N/CrN$ multilayered coating was less than one-tenth of those of the single layers. Thus, $Ti_{0.33}Al_{0.67}N/CrN$ multilayered coating had hardness and oxidation resistance far superior to those of its constituent single layers.

Keywords

$Ti_{0.33}Al_{0.67}N$;CrN;Multilayer;Hardness;Oxidation resistance

Acknowledgement

Supported by : Andong National University

References

  1. J. S. Koehler, "Attempt to Design a Strong Solid," Phys. Rev. B, 2 [2] 547-50 (1970). https://doi.org/10.1103/PhysRevB.2.547
  2. W. Herr, B. Matthes, E. Broszeit, M. Meyer, and R. Suchentrunk, "Influence of Substrate Material and Deposition Parameters on the Structure, Residual Stresses, Hardness and Adhesion of Sputtered CrxNy Hard Coatings," Surf. Coat. Technol., 60 [1-3] 428-33 (1993). https://doi.org/10.1016/0257-8972(93)90126-9
  3. J. W. Cahn, "Hardening by Spinodal Decomposition," Acta Metall., 11 [12] 1275-82 (1963). https://doi.org/10.1016/0001-6160(63)90022-1
  4. M. Kato, T. Mori, and L. H. Schwartz, "Hardening by Spinodal Modulated Structure," Acta Metall., 28 [3] 285-90 (1980). https://doi.org/10.1016/0001-6160(80)90163-7
  5. A. K. Head, "The Interaction of Dislocation and Boundaries," Philos. Mag., 44 [348] 92-4 (1953). https://doi.org/10.1080/14786440108520278
  6. J.-K. Park and Y.-J. Baik, "The Crystalline Structure, Hardness and Thermal Stability of AlN/CrN Superlattice Coating Prepared by D.C. Magnetron Sputtering," Surf. Coat. Technol., 200 [5-6] 1519-23 (2005). https://doi.org/10.1016/j.surfcoat.2005.08.099
  7. H. G Prengel, A. T. Santhanam, R. M. Penich, P. C. Jindal, and K. H. Wendt, "Advanced PVD-TiAlN Coatings on Carbide and Cermet Cutting Tools," Surf. Coat. Technol., 94-95 [10] 597-602 (1997). https://doi.org/10.1016/S0257-8972(97)00503-3
  8. A. Raveh, M. Weiss, M. Pinkas, D. Z. Rosen, and G. Kimmel, "Graded Al-AlN, TiN, and TiAlN Multilayers Deposited by Radio-Frequency Reactive Magnetron Sputtering," Surf. Coat. Technol., 114 [2-3] 269-77 (1999). https://doi.org/10.1016/S0257-8972(99)00054-7
  9. W. D. Munz, "Titanium Aluminum Nitride Films: A New Alternative to TiN Coatings," J. Vac. Sci. Technol., A, 4 [6] 2717-25 (1986). https://doi.org/10.1116/1.573713
  10. O. Knotek and T. Leyendecker, "On the Structure of (TiAl)N-PVD Coatings," J. Solid State Chem., 70 [2] 318-22 (1987). https://doi.org/10.1016/0022-4596(87)90071-5
  11. K. Holmberg, H. Ronkainen, and A. Mattews, "Tribology on Thin Coatings," Ceram. Int., 26 [7] 787-95 (2000). https://doi.org/10.1016/S0272-8842(00)00015-8
  12. P. J. Kelly and R. D. Arnell, "Characterization Studies of the Structure of Al, Zr, and W Coatings Deposited by Closed-Field Unbalanced Magnetron Sputtering," Surf. Coat. Technol., 97 [1-3] 595-602 (1997). https://doi.org/10.1016/S0257-8972(97)00328-9
  13. E. Fullerton, I. K. Schuller, H. Vanderstraeten, and Y. Bruynseraede, "Structural Refinement of Superlattice from X-Ray Diffraction," Phys. Rev. B, 45 [16] 9292-310 (1992). https://doi.org/10.1103/PhysRevB.45.9292
  14. A. Bendavid, P. J. Martin, X. Wang, M. Wittling, and T. J. Kinder, "Deposition and Modification of Titanium Nitride by Ion Assisted Arc Deposition," J. Vac. Sci. Technol. A, 13 [3] 1658-64 (1995). https://doi.org/10.1116/1.579747
  15. X. Feng, Y. Huang, and A. J. Rosakis, "On the Stoney Formular for a Thin Film/Substrate System with Non-Uniform Substrate Thickness," Trans. ASME, 74 [6] 1276-81 (2007). https://doi.org/10.1115/1.2745392