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Transactions of the Korean Society of Mechanical Engineers B
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Journal Basic Information
pISSN :
1226-4881 
eISSN :
2288-5324 
Journal DOI :
10.3795/KSME-B 
Frequency :
Others 
Editor in Chief :
move
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  • Thermal analysis of the wafers in LPCVD process
  • Kim, Il-Gyeong ; Jeong, Min-Cheol ; Yu, Seung-Il ; Chae, Seung-Gi ; Kim, U-Seung ; Nam, Gi-Heum ;
  • Transactions of the Korean Society of Mechanical Engineers B, volume 22, issue 5, 1998, Pages 651~660
  • DOI : 10.22634/KSME-B.1998.22.5.651
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