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Transactions on Electrical and Electronic Materials
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Journal Basic Information
pISSN :
1229-7607 
eISSN :
2092-7592 
Journal DOI :
10.4313/TEEM 
Frequency :
Others 
Editor in Chief :
move
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  • Stability of H2O2 as an Oxidizer for Cu CMP
  • Lee, Do-Won ; Kim, Tae-Gun ; Kim, Nam-Hoon ; Kim, Sang-Yong ; Chang, Eui-Goo ;
  • Transactions on Electrical and Electronic Materials, volume 6, issue 1, 2005, Pages 29~32
  • DOI : 10.4313/TEEM.2005.6.1.029
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