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Transactions on Electrical and Electronic Materials
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Journal Basic Information
pISSN :
1229-7607 
eISSN :
2092-7592 
Journal DOI :
10.4313/TEEM 
Frequency :
Others 
Editor in Chief :
move
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  • Consumable Approaches of Polysilicon MEMS CMP
  • Park, Sung-Min ; Jeong, Suk-Hoon ; Jeong, Moon-Ki ; Park, Boum-Young ; Jeong, Hae-Do ; Kim, Hyoung-Jae ;
  • Transactions on Electrical and Electronic Materials, volume 7, issue 4, 2006, Pages 157~162
  • DOI : 10.4313/TEEM.2006.7.4.157
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