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REFERENCE LINKING PLATFORM OF KOREA S&T JOURNALS
> Journal Vol & Issue
Journal of Sensor Science and Technology
Journal Basic Information
Journal DOI :
The Korean Sensors Society
Editor in Chief :
Volume & Issues
Volume 9, Issue 6 - Nov 2000
Volume 9, Issue 5 - Sep 2000
Volume 9, Issue 4 - Jul 2000
Volume 9, Issue 3 - May 2000
Volume 9, Issue 2 - Mar 2000
Volume 9, Issue 1 - Jan 2000
Selecting the target year
Fabrication of MgO(100)/
/Si Substrate for Pyroelectric IR Sensor
Kim, Sung-Woo ; Sung, Se-Kyoung ; Ryu, Jee-Youl ; Choi, Woo-Chang ; Choi, Hyek-Hwan ; Lee, Myoung-Kyo ; Kwon, Tae-Ha ;
Journal of Sensor Science and Technology , volume 9, issue 2, 2000, Pages 90~95
The substrate for pyroelectric IR sensor which has orientation similar to MgO single crystal was fabricated by depositing the MgO thin film on
/Si. The MgO thin film was deposited by RF magnetron sputtering. The c-axis orientation of PLT thin film deposited on Pt/MgO(100)/
/Si substrate was investigated. The MgO thin film deposited at
at a gas pressure of 30 mTorr with RF power of 160 W exhibited a good a-axis orientation. The PLT thin films deposited on these substrates also exhibited c-axis orientation similar to the PLT thin films deposited on MgO single crystal substrate.
Development of Fiber Optic Total Reflected Extrinsic Fabry-Perot Interferometric Sensor for Structural Strain Measurement
Kwon, In-Bum ; Choi, Man-Yong ; Moon, Hahn-Gue ; Kim, Min-Soo ;
Journal of Sensor Science and Technology , volume 9, issue 2, 2000, Pages 96~105
Fiber optic TR-EFPI(total reflected extrtinsic Fabry-Perot interferometric) sensor was developed to measure the strain of structures, such as building, bridge, aircraft, etc. It has been difficult to distinguish the increase and decrease of the strain from the conventional fiber optic EFPI sensor because their signals only have a sinusoidal wave pattern related to the change of strain. Also, the absolute strain could not be measured by the simple fiber optic EFPI sensor. In this study, in order to measure the magnitude of strain with the direction of strain, the fiber optic sensor was simply constructed with the total reflected EFPI sensor probe. This probe was manufactured with a single mode fiber and a mirror coated fiber in a silica glass capillary tube. The output signal of this fiber optic TR-EFPT sensor can give the information about the magnitude and the direction of strain. The loading-unloading test was performed by the universal testing machine with alluminum beam specimen to compare the strain from fiber optic TR-EFPI sensor with the value from electrical strain gauge. In the result of this experiment. the strain from fiber optic TR-EFPI sensor had a good agreement with the values from the electrical strain gauge.
The Fabrication of FET-Type Reference Electrode Using Ion-Blocking Membrane of Polymer Double Layer
Lee, Young-Chul ; Kim, Young-Jin ; Jeong, Hun ; Kwon, Dae-Hyuk ; Sohn, Byung-Ki ;
Journal of Sensor Science and Technology , volume 9, issue 2, 2000, Pages 106~112
A FET-type reference electrode(REFET) is an effective method to eliminate typical problems with ISFET(ion sensitive field-effect transistor) such as drift, temperature, light-dependence and miniaturization of reference electrode. However, it is difficult to make the highly reliable REFET with excellent long-term stability and reproducibility. In this paper, an ion-blocking membrane was applied to the REFET for the PET-type electrolyte sensors(pH, pNa-ISFET). The fabricated REFET indicated the stable sensitivity (55.4 mV/pH, 53.5 mV/decade) and good linearity in the pH and pNa measurement. In the measurement, ISFET/Pt/REFET configuration showed excellent stability and reproducibility.
sensor for detecting hydrogen in DI water using Pd membrane
Cho, Yong-Soo ; Son, Seung-Hyun ; Choi, Sie-Young ;
Journal of Sensor Science and Technology , volume 9, issue 2, 2000, Pages 113~119
In this work, Pd/Pt gate MISFET sensor using Pd membrane was fabricated to detect the hydrogen in DI water. A differential pair-type was used to minimize the intrinsic voltage drift of the MISFET. To avoid hydrogen induced drift of the sensor, the silicon dioxide/silicon nitride double layer was used as the gate insulator of the FET's. In order to eliminate the blister formation on the surface of the hydrogen sensing gate metal, Pd/Pt double metal layer was deposited on the gate insulator. For this type of application sensors need to be isolated from the DI water, and a Pd membrane was used to separate the sensor from the DI water. The output voltage change due to the variation of hydrogen concentration is linear from 100ppm to 500 ppm.
Development of a Portable ELF Electric Field Meter
Kil, Gyung-Suk ; Song, Jae-Yong ; Kim, Il-Kwon ;
Journal of Sensor Science and Technology , volume 9, issue 2, 2000, Pages 120~126
This paper dealt with the developed portable electric field meter which consisted of planar-type sensor, analog amplifier with gain controller, A/D convertor, and display unit. The principle of the planar-type sensor for detecting time-varying electric field of extremely low frequency (ELF) bandwidth was described, and a calibration system using cylindrical guard electrodes and parallel-plate electrodes was proposed. From the calibration experiment, the frequency bandwidth and the sensitivity of the developed electric field meter was
, and 4.45[mV/V/m], respectively. Also it can measure the electric field strength up to 10[kV/m], and the measured result was displayed on the liquid crystal display in digit. The electric field meter can be widely applied to measure electric field strength radiated from power lines, computers, and home appliances such as hair dryer, heater, etc.
Monitoring of Recycling Treatment System for Piggery Slurry Using Neural Networks
Sohn, Jun-Il ; Lee, Min-Ho ; Choi, Jung-Hea ; Koh, Sung-Cheol ;
Journal of Sensor Science and Technology , volume 9, issue 2, 2000, Pages 127~133
We propose a novel monitoring system for a recycling piggery slurry treatment system through neural networks. Here we tried to model treatment process for each tank(influent, fermentation, aeration, first sedimentation and fourth sedimentation tanks) in the system based on population densities of heterotrophic and lactic acid bacteria. Principle component analysis(PCA) was first applied to identify a relation between input(microbial densities and parameters for the treatment) and output, and then multilayer neural networks were employed to model the treatment process for each tank. PCA filtration of input data as microbial densities was found to facilitate the modeling procedure for the system monitoring even with a relatively lower number of input. Neural networks independently trained for each treatment tank and their subsequent combinatorial data analysis allowed a successful prediction of the treatment system for at least two days.
A study on pre-bonding of Si wafer direct bonding at HF pre-treatment
Chung, Gwiy-Sang ; Kang, Kyung-Doo ;
Journal of Sensor Science and Technology , volume 9, issue 2, 2000, Pages 134~140
Si wafer direct bonding(SDB) technology is very attractive for both Si-on-insulator(SOI) electronic devices and MEMS applications. This paper presents on pre-bonding according to HF pre-treatment conditions in Si wafer direct bonding. The characteristics of bonded sample were measured under different bonding conditions of HF concentration and applied pressure. The bonding strength was evaluated by tensile strength method. A bond characteristic on the interface was analyzed by using FT-IR, and surface roughness according to HF concentration was analyzed by AFM. Si-F bonds on Si surface after HF pre-treatment are replaced by Si-OH during a DI water rinse. Consequently, hydrophobic wafer was bonded by hydrogen bonding of Si-OH
OH-Si. The pre-bonding strength depends on the HF pre-treatment condition before pre-bonding. (Min :
A study on the slag-thickness measuring system for steel making foundaries by using a resistivity detector.
Kim, Chan-Wook ; Im, Jong-In ;
Journal of Sensor Science and Technology , volume 9, issue 2, 2000, Pages 141~145
In order to measure the thickness of the slag layer on the molten metal in the melting vessels for steel making foundaries, we manufactured the slag-thickness measuring system consisting of the probe and its driving system, which is based on the principle of detecting the change in the electrical resistivity. Experimental results show that there is a very wide difference of the electrical resistivity by the order of about
between the molten metal and the hot slag and, hence, the air/slag and slag/molten metal interface can be exactly detected with the use of the probe which can be moved toward the melt. Therefore, it can be concluded that the proposed scheme of the slag measurement system in this study is Proven to be excellent in its efficiency and accuracy.
The Structural and Electrical Properties of Li doped ZnO Thin Films
You, Gyeon-Gue ; Kwon, Dae-Hyuk ; Jun, Choon-Bae ; Kim, Jeong-Gyoo ; Park, Ki-Cheol ;
Journal of Sensor Science and Technology , volume 9, issue 2, 2000, Pages 146~152
Lithium doped zinc oxide(ZnO:Li) films are prepared by rf magnetron sputtering on Corning 7059 glass substrate using specifically designed ZnO targets containing different amount of
powder as the Li doping source. The structural properties of the Li doped ZnO films are investigated by XRD, SEM and AFM. The electrical properties of the ZnO:Li films are measured for various deposition conditions, such as the substrate temperature,
/Ar gas ratio and rf power. The effects of the
content in target and the deposition conditions on the structural and electrical properties were studied. When ZnO:Li films were sputtered at the substrate temperature of
/Ar gas ratio of 100% and rf power of 100W with a target containing less than 1wt% content of
, showed good surface morphology, strong c-axis orientation and high resistivity of more than