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Journal of the Korean Institute of Electrical and Electronic Material Engineers
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  • The Characteristic Variation of Mask with Plasma Treatment
  • Kim, Jwa-Yeon ; Choi, Sang-Su ; Kang, Byung-Sun ; Min, Dong-Soo ; An, Young-Jin ;
  • Journal of the Korean Institute of Electrical and Electronic Material Engineers, volume 21, issue 2, 2008, Pages 111~117
  • DOI : 10.4313/JKEM.2008.21.2.111
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