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Journal of the Korean Institute of Electrical and Electronic Material Engineers
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  • Development of Microstructure Pad and Its Performances in STI CMP
  • Jeong, Suk-Hoon ; Jung, Jae-Woo ; Park, Ki-Hyun ; Seo, Heon-Deok ; Park, Jae-Hong ; Park, Boum-Young ; Joo, Suk-Bae ; Choi, Jae-Young ; Jeong, Hae-Do ;
  • Journal of the Korean Institute of Electrical and Electronic Material Engineers, volume 21, issue 3, 2008, Pages 203~207
  • DOI : 10.4313/JKEM.2008.21.3.203
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  • Study on P-type in-situ doped Polysilicon Films
  • Oh, Jung-Sup ; Lee, Sang-Eun ; Noh, Jin-Tae ; Lee, Sang-Woo ; Bae, Kyoung-Sung ; Roh, Yong-Han ;
  • Journal of the Korean Institute of Electrical and Electronic Material Engineers, volume 21, issue 3, 2008, Pages 208~212
  • DOI : 10.4313/JKEM.2008.21.3.208
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