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Journal of the Korean Institute of Electrical and Electronic Material Engineers
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  • Particle Removal on Buffing Process After Copper CMP
  • Shin, Woon-Ki ; Park, Sun-Joon ; Lee, Hyun-Seop ; Jeong, Moon-Ki ; Lee, Young-Kyun ; Lee, Ho-Jun ; Kim, Young-Min ; Cho, Han-Chul ; Joo, Suk-Bae ; Jeong, Hae-Do ;
  • Journal of the Korean Institute of Electrical and Electronic Material Engineers, volume 24, issue 1, 2011, Pages 17~21
  • DOI : 10.4313/JKEM.2011.24.1.17
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