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Journal of the Korean Society for Precision Engineering
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Journal Basic Information
pISSN :
1225-9071 
eISSN :
2287-8769 
Journal DOI :
10.7736/KSPE 
Frequency :
Others 
Editor in Chief :
move
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  • A Study on Novel Conditioning for CMP
  • Lee, Sung-Hoon ; Kim, Hyoung-Jae ; Ahn, Dae-Gyun ; Jeong, Hae-Do ;
  • Journal of the Korean Society for Precision Engineering, volume 16, issue 5, 1999, Pages 40~47
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