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REFERENCE LINKING PLATFORM OF KOREA S&T JOURNALS
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Journal of the Korean Society for Precision Engineering
Journal Basic Information
Journal DOI :
Korean Society of Precision Engineering
Editor in Chief :
Volume & Issues
Volume 19, Issue 12 - Dec 2002
Volume 19, Issue 11 - Nov 2002
Volume 19, Issue 10 - Oct 2002
Volume 19, Issue 9 - Sep 2002
Volume 19, Issue 8 - Aug 2002
Volume 19, Issue 7 - Jul 2002
Volume 19, Issue 6 - Jun 2002
Volume 19, Issue 5 - May 2002
Volume 19, Issue 4 - Apr 2002
Volume 19, Issue 3 - Mar 2002
Volume 19, Issue 2 - Feb 2002
Volume 19, Issue 1 - Jan 2002
Selecting the target year
Information of Contamination in Semiconductor Cleanroom
Kim, Gwang-Yeong ; Lee, Eung-Seon ;
Journal of the Korean Society for Precision Engineering, volume 19, issue 8, 2002, Pages 7~15
Contamination Control by UV in Giga-Grade Semiconductor Processes
Yu, Gyeong-Hun ; Kim, Yong-Jin ;
Journal of the Korean Society for Precision Engineering, volume 19, issue 8, 2002, Pages 16~25
Nano-Contamination in Infromation Storage Device
Lee, Dae-Young ; Hwang, Jungho ; Choa, Sung-Hoon ;
Journal of the Korean Society for Precision Engineering, volume 19, issue 8, 2002, Pages 26~33
Atmospheric Pressure Plasma Applications to Treat Off-Gases from Semiconductor Manufacturing
Song, Young-Hoon ; Kim, Yong-Jin ;
Journal of the Korean Society for Precision Engineering, volume 19, issue 8, 2002, Pages 34~37
Design and Application of the Semi-Continuous Sliding Mode Control(Control of Electromagnetic Suspension Systems)
Lee, Kyu-Joon ; Kim, Sang-Hwan ; Kim, Jong-Shik ;
Journal of the Korean Society for Precision Engineering, volume 19, issue 8, 2002, Pages 38~46
A new semi-continuous sliding mode control is proposed for electromagnetic suspension systems. The control input is derived from the reaching law and the Lyapunov stability criteria, which is composed of continuous terms and low switching term. It has a low switching gain and chattering fee characteristics. It is shown by the computer simulation that the proposed control has good tracking performance and robustness compared with the classical sliding mode control.
A Study on Design of Barrel Cam Using Relative Velocity
Shin, Joong-Ho ; Kim, Sung-Won ; Kang, Dong-Woo ; Yoon, Ho-Eop ;
Journal of the Korean Society for Precision Engineering, volume 19, issue 8, 2002, Pages 47~54
A barrel cam is used as a very important part of an index drive unit. The index drive unit must have an intermittent-rotational motion. The barrel typed cam and roller gear mechanism has the advantages of high reliability to perform a prescribed motion of a follower. This paper proposes a new method for the shape design of the barrel cam and also a CAD program is developed by using the proposed method. As defined in this paper, the relative velocity method for the shape design calculates the relative velocity of the follower versus cam at a center of roller, and then determines a contact point by using the geometric relationships and the kinematic constraints, where the direction of the relative velocity must be parallel to a common tangential line at the contact point of two independent bodies, i.e. the cam and the follower Then, the shape of the cam is defined by the coordinate transformation of the trace of the contact points. This paper presents two examples for the shape design of the barrel cam in order to prove the accuracy of the proposed methods.
A Study on Exit Burr Formation in Face Milling
Han, Sang-Woo ; Ko, Sung-Lim ;
Journal of the Korean Society for Precision Engineering, volume 19, issue 8, 2002, Pages 55~62
A burr has been defined as undesirable projection of material formed as the result of plastic flow from a cutting or shearing operation. It is unavoidable in all kinds of machining operation. As a result, burr makes troubles on manufacturing process due to deburring cost, quality of products and productivity. In face milling operation, burrs are formed along five edges on the workpiece. In this study, the primary interest is about exit burr The influence of the cutting parameters on the formation of exit burrs in face milling will be described experimentally. Using the results of experimental study, burr types are classified according to appearance and formation mechanism in exit burr. The burr formation mechanism in each type of burr is suggested. Data bases are developed to predict burr formation result.
Effects of Cutter Runout on End Milling Forces I-Up Eng Milling-
Lee, Yeong-Mun ; Yang, Seung-Han ; Song, Tae-Seong ; Gwon, O-Jin ; Baek, Seung-Gi ;
Journal of the Korean Society for Precision Engineering, volume 19, issue 8, 2002, Pages 63~70
In end milling process, the undeformed chip section area and cutting forces vary periodically with phase change of the tool. However the real undeformed chip section area deviates from the geometrically ideal one owing to cutter runout and tool shape error. In this study, a method of estimating the real undeformed chip section area which reflects cutter runout and tool shape error was presented in up end milling process using measured cutting forces. The average specific cutting resistance, Ka is defined as the main cutting force component divided by the modified chip section area. Ka value becomes smaller as the helix angle increases from
. But it becomes larger as the helix angle increases from
to 50 . On one hand, the Ka value shows a tendency to decrease with increase of the modified chip section area and this tendency becomes distinct with smaller helix angle.
Low Cycle Fatigue Behavior of 12Cr Steel for Thermal Power Plant Steam Turbine
Kang, Myeong-Soo ;
Journal of the Korean Society for Precision Engineering, volume 19, issue 8, 2002, Pages 71~76
In this study low cycle fatigue (LCF) behavior of 12Cr steel at high temperature are described. Secondly, comparisons between predicted lives and experimental lives are made for the several sample life prediction models. Two minute hold period in either tension or compression reduce the number of cycles to failure by about a factor of two. Twenty minute hold periods in compression lead to shorter lives than 2 minute hold periods in compression. Experiments showed that life predictions from classical phenomenological models have limitations. More LCF experiments should be pursued to gain understanding of the physical damage mechanisms and to allow the development of physically-based models which can enhance the accuracy of the predictions of components. From a design point-of-view, life prediction has been judged acceptable for these particular loading conditions but extrapolations to thermo-mechanical fatigue loading, for example, require more sophisticated models including physical damage mechanisms.
A Study on the Mechanism of Micro-ECM by Use of Point Electrode Method
Kim, Bong-Gyu ; Jeon, Jong-Up ; Park, Kyu-Yeol ;
Journal of the Korean Society for Precision Engineering, volume 19, issue 8, 2002, Pages 77~83
This research aimed at from the establishment of theory on micro electrochemical machining mechanism to the implementation of a practical fabrication system of micro parts. In detail, the mechanism of micro-ECM was investigated with potentiodynamic method and the optimal condition for micro-ECM was selected by voltage-current-time curve with potentiostatic method. From the experimental result, the micro part which has extremely fine surface could be fabricated by use of micro-ECM with point electrode method.
Study on the fatigue Limit at Random Contact Loading
Ok, Young-Gu ; An, Deuk-Man ; Cho, Yong-Ju ; Lee, Hyun-Woo ;
Journal of the Korean Society for Precision Engineering, volume 19, issue 8, 2002, Pages 84~91
This paper analyzes the subsurface stress at the spherical contact using Hamilton equation, and with that data, calculates the fatigue limit under the variations of friction coefficient using fatigue theory. After rough surface being made, this paper figures out the random load generated by contacting to the rough surface, analyzes the stress of its subsurface, and calculates the fatigue limit of the rough surface using fatigue theory. The three parts of the fatigue theory are applied, which are critical plane theory, stress invariant theory and mesoscopic theory.
Numerical Analysis for Optimization of Film Uniformity and Deposition Grow Rate in the Vertical Cylindric Reactor
Kim, Jong-Hui ; Kim, Hong-Je ; O, Seong-Mo ; Lee, Geon-Hwi ; Lee, Bong-Gu ;
Journal of the Korean Society for Precision Engineering, volume 19, issue 8, 2002, Pages 92~99
This work investigated the optimal condition for an uniform deposition growth rate in the vertical cylindric CVD chamber. Heat transfer, surface chemical reaction and mass diffusion in the flow field of CVD chamber h,id been computed using Fluent v5.3 code. A SIMPLE based finite Volume Method (FVM) was adopted to solve the fully elliptic equations for momentum, temperature and concentration of a chemical species. The numerical analysis results show good agreements with the measurements obtained by N. Yoshikawa. The results obtained by the numerical analysis showed that the film growth rate in the center of a susceptor is increasing, as the inner flow approaches to the forced convection. To the contrast, as it approaches to the natural convection, that in the outside of a susceptor is increasing. As the Reynolds number increases, the uniformity may not hold due to the larger temperature gradient at a susceptor surface. Therefore, when the temperature gradient on the surface of a susceptor is zero, the film growth rate becomes uniform on most surface.
An Integrated CAD System for Design of Extruder Screw
Yoon, Jun-Young ; Hwang, Yong-Keun ; Park, Joo-Sam ; Ko, Tae-Jo ; Park, Jung-Whan ;
Journal of the Korean Society for Precision Engineering, volume 19, issue 8, 2002, Pages 100~107
The extruder screw is a part for extruding material in a injection molding machine. The screw's geometrical shape can mathematically be described by a sweep surface which is constructed by sweeping a section curve composed of a few circular arcs, along a helical guide curve. In the paper we developed a dedicated CAD system which basically is parametric in a sense that the system initially takes several design parameters to construct the geometric elements including the final sweep surface of the screw as well as section & guiding curves, along with feasibility check of the input parameter values, without further user interaction. The system has been developed as a built-in module onto a commercial CAD system, which can further incorporate additional NC-out functions with ease.
Reverse Engineering for Sculptured Surfaces by Using NURBS Approximation
Cho, Jae-Hyung ; Cho, Myung-Woo ;
Journal of the Korean Society for Precision Engineering, volume 19, issue 8, 2002, Pages 108~115
In measuring step for reverse engineering of sculptured surfaces, computer vision system is used to simplify the complicated surface by boundary edge detection method that minimizes the measuring error. The measured data by Coordinate measuring machine is clouded data points of surfaces which is segmented surface using image process. In this research, the measured data is approximated as NURBS surfaces by new suggested algorithm. The position and number of control points, selection of parametric values and compensation of weight factors are proposed. Finally, surface model is simulated and improved resulting performance is obtained.
A Study on the Design of Gating System for Semi-Solid Diecasting Process
Kwon, Taek-Hwan ; Moon, Chan-Kyoung ; Kim, Young-Ho ; Choi, Jae-Chan ;
Journal of the Korean Society for Precision Engineering, volume 19, issue 8, 2002, Pages 116~125
Semi-Solid Diecasters usually carry out the Semi-Solid diecasting experiments before producing new casts. At the Semi-Solid diecasting stages, the runner-gate part has been always repeatedly corrected, which leads to a tedious processing time and increased processing cost. A large amount of experience is essential in manual assessment and if the design is defective, much time and a great deal of efforts will be wasted in the modification of the die. In this study, design system has been developed based on design database. In addition, gate experiment for gating system design has been carried out to append the database. It is possible for engineers to make efficient gating system design of Semi-Solid diecasting and it will result in the reduction of expenses and time to be required. The detailed contents of the research are described in the followings.
A Study on the Critical Depth of Cut in Ultra-precision Machining
Kim, Kug-Weon ;
Journal of the Korean Society for Precision Engineering, volume 19, issue 8, 2002, Pages 126~133
The cutting thickness of ultra-precision machining is generally very small, only a few micrometer or even down to the order of a few nanometer. In such case, a basic understanding of the mechanism on the micro-machining process is is necessary to produce a high quality surface. When machining at very small depths of cut, metal flow near a rounded tool edge become important. In this paper a finite element analysis is presented to calculate the stagnation point on the tool edge or critical depth of cut below which no cutting occurs. From the simulation, the effects of the cutting speed on the critical depths of cut were calculated and discussed. Also the transition of the stagnation point according to the increase of the depths of cut was observed.
Study on Chemical Mechanical Polishing for Reduction of Micro-Scratch
Kim, Seong-Jun ; An, Yu-Min ; Baek, Chang-Uk ; Kim, Yong-Gwon ;
Journal of the Korean Society for Precision Engineering, volume 19, issue 8, 2002, Pages 134~140
Chemical mechanical polishing of aluminum and photoresist using colloidal silica-based slurry was experimented. The effects of slurry pH, silica concentration, and oxidizer (
) concentration on surface roughness and removal rate were studied. The optimum slurry conditions for reduction of micro-scratch were investigated. The optimum chemical mechanical polishing with the colloidal silica-based slurry was compared with conventional chemical mechanical polishing with alumina-based slurry. Chemical mechanical polishing of the aluminum with the colloidal silica-based slurry showed improved result but chemical mechanical polishing of the photoresist did not. The improved result was comparative with that of chemical mechanical polishing with filtered alumina-based slurry which one of desirable methods to reduce the micro-scratch.
A Study on the Optimal Grinding Condition of Ceramics using the Design of Experiments
Jeong, Eul-Seop ; Kim, Seong-Cheong ; So, Ui-Yeol ; Lee, Geun-Sang ;
Journal of the Korean Society for Precision Engineering, volume 19, issue 8, 2002, Pages 141~146
This paper has studied to obtain the grinding characteristics and optimal grinding conditions of ceramic materials in the grinding with diamond wheel by design of experiments. The load on wheel by varying the feed rate was related with the surface roughness due to the minute destruction phenomenon of grains for the
. The depth of cut is related with the surface roughness because the grinding is carried out by grain shedding process due to the brittle fracture phenomenon for the
. The major factors affecting the surface roughness and the optimum grinding conditions were obtained with minimum experiments using design of experiments.
A Path Navigation Algorithm for an Autonomous Robot Vehicle by Sensor Scanning
Park, Dong-Jin ; An, Jeong-U ; Han, Chang-Su ;
Journal of the Korean Society for Precision Engineering, volume 19, issue 8, 2002, Pages 147~154
In this paper, a path navigation algorithm through use of a sensor platform is proposed. The sensor platform is composed of two electric motors which make panning and tilting motions. An algorithm for computing a real path and an obstacle length is developed by using a scanning method that controls rotation of the sensors on the platform. An Autonomous Robot Vehicle(ARV) can perceive the given path by adapting this algorithm. A sensor scanning method is applied to the sensor platform for using small numbers of sensor. The path navigation algorithm is composed of two parts. One is to perceive a path pattern, the other is used to avoid an obstacle. An optimal controller is designed for tracking the reference path which is generated by perceiving the path pattern. The ARV is operated using the optimal controller and the path navigation algorithm. Based on the results of actual experiments, this algorithm for an ARV proved sufficient for path navigation by small number of sensors and for a low cost controller by using the sensor platform with a scanning method.
Implementation of Brushless Linear Motor Drive using DSP
Kim, Sang-U ; Park, Jeong-Il ; Lee, Gi-Dong ; Lee, Seok-Gyu ; Jeong, Jae-Han ;
Journal of the Korean Society for Precision Engineering, volume 19, issue 8, 2002, Pages 155~160
In this paper, a controller design for brushless linear motor is implemented. The designed controller is mainly composed of current, speed and position controller, which are carried out by the high-speed digital signal processor (DSP). In addition the PWM inverter is controlled by space voltage PWM method. This system is implemented by using 32-bit DSP (TMS320C31), a high-integrated logic device (EPM7192), and IPM (Intelligent Power Module) for compact and powerful system design. The experimental results show the effective performance of controller for the brushless linear motor.
Large Thrust Linear Motor for Low-duty-cycle Operation
Bang, Yeong-Bong ; Lee, Gyeong-Min ;
Journal of the Korean Society for Precision Engineering, volume 19, issue 8, 2002, Pages 161~171
This paper presents a linear motor, which generates large thrust with a low operating rate. In industrial fields there is a need for actuators that work with a low duty cycle but generate large thrusts. An example of such a case is provided by the actuators for ejector mechanisms in electric injection molding machines. The ordinary LSM (linear synchronous motor) is unsuitable for this large-thrust and low-operating-rate usage, because of its large size and high cost. This paper contains experimental results on linear motors that can generate large thrusts for a short time, and which can be cheaply produced. The described linear motor could be contained space of
and generate a maximum thrust of about 20000 N at a current of 250 A.
Reverse Engineering of Unknown Free-formed Surface using Multi-sensor
Yoon, Gil-Sang ; Cho, Myeong-Woo ;
Journal of the Korean Society for Precision Engineering, volume 19, issue 8, 2002, Pages 172~179
In this paper, an efficient reverse engineering method for free-formed surfaces is proposed based on the integration of a repetitive digitizing method and vision system. In recent reverse engineering process, the equi-interval digitization method is being used since the surface information is not known. If more accurate results are required, the number of measuring point should be increased appropriately. Thus, such measuring process tends to result in too dense data including useless information, and cause excessive measuring time. This problem can be improved by applying repetitive digitizing method and image process technique, which is proposed in this paper. The proposed methods are validated through appropriate simulation and experiments.
Reliability Evaluation System of Hot Plate for Photoresist Baking
Song, Jun-Yeop ; Song, Chang-Gyu ; No, Seung-Guk ; Park, Hwa-Yeong ;
Journal of the Korean Society for Precision Engineering, volume 19, issue 8, 2002, Pages 180~186
Hot Plate is the major unit that it used to remove damp of wafer surface, to strength adhesion of photoresist (PR) and to bake coated PR in FAB process of semiconductor. The badness of Hot Plate (HP) has directly influence upon the performance of wafer, it is necessary to guarantee the performance of HP. In this study, a reliability evaluation system has been designed and developed, which is to measure and to estimate thermal uniformity and flatness of HP in range of temperature 0~
. This system has included the techniques which measures and analyzes thermal uniformity using infrared thermal vision, and which compensates measuring error of flatness using laser displacement sensor For measuring flatness, a measurement stage of 3 axes are developed which adapts the precision encoder. The allowable error of this system in respect of thermal uniformity is less
and in respect of flatness is less
1mm . It is expected that the developed system can measure from
(wafer 12＂) and also can be used in performance test of the Cool Plate and industrial heater, etc.
Finite Element Analysis of Deformation Behavior due to Material Properties during Equal Channel Angular Pressing
Bae, Gang-Ho ; Kwon, Gi-Hwan ; Chae, Soo-Won ; Kwon, Sook-In ; Kim, Myung-Ho ; Hwang, Sun-Keun ;
Journal of the Korean Society for Precision Engineering, volume 19, issue 8, 2002, Pages 187~193
Much research efforts have been made on the equal channel angular pressing (ECAP) which produces ultra-fine grains. Among many process parameters such as channel angles, frictions, die deformations and materials employed, the effects of material properties on the deformation behavior have been investigated. The finite element method has been used to investigate this issue.
Automatic Design Supporting System for Automobile Stamping Tool
Jeong, Hyo-Sang ; Lee, Seong-Su ;
Journal of the Korean Society for Precision Engineering, volume 19, issue 8, 2002, Pages 194~202
Die design of bonnet drawing is composed of upper die, lower die and blank holder. It has been performed by checked and re-design method, which cause economic and financial loss. Nowadays, CAD/CAM system is excellent, but application is low. Therefore, in specific item, drawing die of bonnet outer draw by 3-D lay-out. In this study purpose, Bonnet drawing die is designed rapidly, correctly. It's method that shape modify to resemble. This purpose lead to 3-D Lay-Out. It is to react the standard die. In rule relation, input data change all of the shape.
A Study on the Braking Characteristics of Control Methods for ABS mounted Vehicle
Choi, Jong-Hwan ; Kim, Wung-Su ; Yang, Soon-Yong ; Park, Sung-Tae ; Lee, Jin-Kul ;
Journal of the Korean Society for Precision Engineering, volume 19, issue 8, 2002, Pages 203~211
ABS (Anti-lock Braking System) is a safety device for preventing wheel locking in a sudden braking. It consists of hydraulic modulator, ECU(Electronic Control Unit) and angular velocity sensors. Its control methods are classified into three types; deceleration control, slip ratio control and deceleration/acceleration control. In this paper, ABS mounted vehicle is mathematically modeled and the proposed model is verified by actual cars experiments, and the braking characteristics of the control methods with pulse width modulation are compared and analyzed through computer simulations.
A Study on the Forming Process Development of a Long-neck Flange Using a Long Pipe
Choe, Gan-Dae ; Gang, U-Jin ; Bae, Won-Byeong ; Jo, Jong-Rae ;
Journal of the Korean Society for Precision Engineering, volume 19, issue 8, 2002, Pages 212~219
The pipe with a long-neck flange is widely used in power plants, chemical plants, and shipbuilding companies. Now the pipe with a long-neck flange is manufactured by welding a thick flange to a pipe. But this long-neck flange pipe has some defects in the welding region such as unfitting and local thermal fatigue, which weaken the strength around the neck of the flange. Moreover, after welding the flange, the contacting surfaces of the flange have to be machined flat. So, that is uneconomical. Therefore, to solve the above problems of the long-neck flange pipe, a new process, which has no defects around the flange neck, is required. In this study, three forming processes are suggested to get an enhanced long-neck flange. First suggested process consists of conical forming and flange forming. Second and third suggested processes consist of the bulging of a long pipe locally heated by induction coils and the flange forming. The differences between second and third suggestions are the thickness and local heating area of the pipe. That is, the thickness of the initial pipe of third suggestion is larger than that of the final product, and the local heating area is smaller than that of second suggestion. These three suggestions for forming a long-neck flange are simulated by FE analyses with a commercial code DEFORM 2D. Especially, the theoretical result of FE analysis on the first suggestion for forming a long-neck flange is verified by the experiment with aluminum 6063 pipes. From the theoretical and experimental results, it is concluded that three suggested processes are very useful in order to manufacture the pipe with a long-neck flange without any defects.