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Journal of the Korean Society for Precision Engineering
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Journal Basic Information
pISSN :
1225-9071 
eISSN :
2287-8769 
Journal DOI :
10.7736/KSPE 
Frequency :
Others 
Editor in Chief :
move
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  • DRIE Technology for TSV Fabrication
  • Baek, Kyu-Ha ; Kim, Dong-Pyo ; Park, Kun-Sik ; Kang, Jin-Young ; Lee, Ki-Jun ; Do, Lee-Mee ;
  • Journal of the Korean Society for Precision Engineering, volume 26, issue 12, 2009, Pages 32~40
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