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REFERENCE LINKING PLATFORM OF KOREA S&T JOURNALS
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Journal of the Korean Vacuum Society
Journal Basic Information
Journal DOI :
The Korean Vacuum Society
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Volume & Issues
Volume 13, Issue 4 - Dec 2004
Volume 13, Issue 3 - Sep 2004
Volume 13, Issue 2 - Jun 2004
Volume 13, Issue 1 - Mar 2004
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The relations between second-stage temperatures and gases partial pressures at the stainless steel high vacuum chamber by cryogenic pumping
Hong S. S. ; Lim J. Y. ; Shin Y. H. ; Chung K. H. ; Arakawa Ichiro ;
Journal of the Korean Vacuum Society, volume 13, issue 4, 2004, Pages 139~144
Recently, the importance of clean vacuum and partial pressure measurement of gas species has been increased in the vaccum process. In this study, the partial pressures of
, He, C, N,
were measured by residual gas analyzer according to temperature of cryogenic pump which is used to clean vacuum generation and compared. The experimental results showed that the cryopanel temperature was reached to 12K after 72 minutes of pumping and after 25hours, the partial pressures in percent were 24.9 %, 6.6%, 5.5 %, 2.2 %, 3.8%, 30.7%, 6.5%, 6.1 %, 5.5%, 8.2% for
, He, C, N,
respectively. The dominant gases were
, and the partial pressures were relatively high compare to other gases.
Epitaxial growth of oxide films using miscut substrates
Bu Sang Don ;
Journal of the Korean Vacuum Society, volume 13, issue 4, 2004, Pages 145~149
We have grown piezoelectric oxide films by RF magnetron sputtering using miscut substrates. Films were Brown on(001)
substrates with miscut angles from 0 to 8 degrees toward the (100) direction. Films on high miscut substrates (>
) showed almost the pure perovskite phase in x-ray diffraction and were nearly stoichiometric. In contrast, films on exact (001)
contained a high volume fraction of pyrochlore phases. A film on an
miscut substrate exhibits a polarization hysteresis loop with a remnent polarization of 20
at room temperature.
Effect of Microstructure of hBN Thin Films on the Nucleation of cBN Phase Deposited by RF UBM Sputtering System
Lee Eun-Ok ; Park Jong-Keuk ; Lim Dae-Soon ; Baik Young-Joon ;
Journal of the Korean Vacuum Society, volume 13, issue 4, 2004, Pages 150~156
Boron nitride thin films were deposited on Si(100) substrate by RF (Radio-frequency) UBM (Unbalanced Magnetron) sputtering system. The effect of working pressure and substrate bias voltage on microstructure and compressive stress of boron nitride thin films has been investigated. In high working pressure, the alignment of hBN laminates increased with substrate bias voltage, in low working pressure, however, it was high in low substrate bias voltage. Compressive stress evolution and surface morphology of deposited BN films are closely related with the alignment of hBN laminates. The cBN phase without high compressive stress could be nucleated on hBN thin film by controlling the alignment of hBN laminates.
Humidity Dependence of the Residual Stress of Diamond-like Carbon Film
Lee Young-Jin ; Kim Tae-Young ; Lee Kwang-Ryeol ; Yang In-Sang ;
Journal of the Korean Vacuum Society, volume 13, issue 4, 2004, Pages 157~163
Dependence of residual compressive stress of diamond-like carbon (DLC) films on relative humidity was investigated. Polymeric, graphitic and diamond-like carbon films were prepared by r.f.-PACVD using methane or benzene with the negative self bias voltage of the substrate ranging from -100 to -800 V. In-situ measurements of the residual stress were carried out in an environment chamber where the relative humidity was varied from 10％ to 90％. In dense DLC film of high residual compressive stress and hardness, we could not observe any change in the residual compressive stress with relative humidity. However, in the cases of graphitic and polymeric DLC films, abrupt change in the residual stress occurred by changing the relative humidity. The quantity of the stress change was inversely proportional to the film thickness, which means that the stress change with humidity is not due to the penetration of the water molecule into the film structure, but due to surface interaction between water molecules and film surface.
Laboratory on network
Nam Yuri ; Kim J. -S. ;
Journal of the Korean Vacuum Society, volume 13, issue 4, 2004, Pages 164~174
Computer control of experiments is very powerful because computer can outperform human being for most routine and repeated procedures. We successfully made the whole process of sputtering and annealing fully automated and controllable through network. The present work shows a possibility of building unmanned laboratory.
Stability and Adhesion of Diamond-like Carbon Film under Micro-tensile Test Condition
Choi Heon Woong ; Lee Kwang-Ryeol ; Wang Rizhi ; Oh Kyu Hwan ;
Journal of the Korean Vacuum Society, volume 13, issue 4, 2004, Pages 175~181
We investigated the stability of the DLC film coated on 304 stainless steel substrate by Radio frequency assisted chemical vapor deposition method. Fracture and spallation behaviour of the coating was observed during micro-tensile test of the fil
strate composite. As the tensile deformation progressed, the cracks of the film were observed in the perpendicular direction to the tensile axis. Further deformation resulted in the plastic deformation with
slip bands on the substrate surface. Spallation of the film occurred with the plastic deformation, which was initiated at the cracks of the film and was aligned along the slip directions. We found that both the cracking and the spallation behaviors are strongly dependent on the pre-treatment condition, such as Ar plasma pre-treatment. The spallation of the film was considerably suppressed in an optimized condition of the substrate cleaning by Ar glow discharge. We observed the improved stability with increasing duration of Ar plasma pre-treatment.nt.
Beam stability improvement of liquid metal ion source
Hyun J. W. ; Yim Youn Chan ; Kim Seuong Soo ; Oh Hyun Joo ; Park Cheol Woo ; Lee Jong Hang ; Choi Eun Ha ; Seo Yunho ; Kang Seung Oun ;
Journal of the Korean Vacuum Society, volume 13, issue 4, 2004, Pages 182~188
Previous studies on the liquid Gallium ion sources used an electro-chemically etched tungsten wire with a coil-type heater. Such a structure requires excessive power consumption in the course of heating the liquid metal. In this work, a new structure is proposed that replaces the coil-type heater. It uses a Gallium reservoir made of six pre-etched 250
tungsten wires that surround the needle electrode. Gallium trading at the reservoir is observed to be much more stable, resulting in an improved beam stability.