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Journal of the Korean Vacuum Society
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Journal Basic Information
pISSN :
1225-8822 
eISSN :
 
Journal DOI :
10.5757/JKVS 
Frequency :
Others 
Editor in Chief :
move
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  • Optical Emission Spectra of Oxygen Plasma Produced by Radio-Frequency Plasma
  • Kim, Do-Yeob ; Kim, Min-Su ; Kim, Tae-Hoon ; Kim, Ghun-Sik ; Choi, Hyun-Young ; Cho, Min-Young ; Jeon, Su-Min ; Park, Sung-Dong ; Kim, Jin-Ha ; Kim, Eun-Do ; Hwang, Do-Weon ; Lee, Jae-Young ;
  • Journal of the Korean Vacuum Society, volume 18, issue 2, 2009, Pages 102~107
  • DOI : 10.5757/JKVS.2009.18.2.102
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