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REFERENCE LINKING PLATFORM OF KOREA S&T JOURNALS
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Journal of the Korean Vacuum Society
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Journal DOI :
The Korean Vacuum Society
Editor in Chief :
Volume & Issues
Volume 7, Issue 4 - Nov 1998
Volume 7, Issue 3 - Aug 1998
Volume 7, Issue s1 - Jul 1998
Volume 7, Issue 2 - May 1998
Volume 7, Issue 1 - Feb 1998
Selecting the target year
Magnetic, Magneto-Optical, and Transport Properties of Ordered and Disordered 3d-Transition Metal Aluminide Films
Lee, Y.P ; Kim, K.W ; Rhee J.Y ; Kudryavtsev Y.V ;
Journal of the Korean Vacuum Society, volume 7, issue s1, 1998, Pages 1~6
The influence of the order-disorder structural transition on the magnetic and mageto-optical, and transport properties of Fe-Al and Co-Al alloy films has been investigated. The disordered states in the alloy films were prepared by vapor quenching deposition on glass substrates cooled by liquid nitrogen. The experimental study of the magento-optical properties of the ordered and disordered Fe-Al and Co-Al alloy films has been carried out in 1.05-5.0 eV energy range at room temperature. The transport properties have been measured in 2-300K temperature range with and without magnetic field of 0.5T. The influence of the order-disorder structural transition on the magnetic and magneto-optical properties was discussed by using the effective medium approximation and the structural defect approach. That on the temperature dependence of the resistivity was analyzed in a framework of the partial localization of the electronic states and the variable range hopping conductivity.
An a-D film for flat panel displays prepared by FAD
Liu, Xianghuai ; Mao, Dongsheng ;
Journal of the Korean Vacuum Society, volume 7, issue s1, 1998, Pages 7~14
Details are given of an study of the characteristics of field-induced electron emission from hydrogen-free high
content(>90%) amorphous diamond (a-D) film deposited on heavily doped (
) n-type monocrystalline Si(111) substrate. It is demonstrated that a-D film has excellent electron field emission properties. Emission current can reach 0.9
A at applied field as low as 1 V/
, and emission current density can be obtained about several mA/
. The emission current is stable when the beginning current is at 50
A within 72 hours. Uniform fluorescence display of electron emission from whole face of the a-D film under the electric field of 10~20 V/
was also observed. It can be considered that the contribution of excellent electron emission property results from its smooth, uniform, amorphous surface and high
content of the a-D films.
single quantum well grown by MBE
Kang, T.W. ; Kim, C.O. ; Chung, G.S ; Eom, K.S. ; Kim, H.J. ; Won, S.H. ; Park, S.H. ; Yoon, G.S. ; Lee, C. M. ; Park, C.S. ; Chi, C.S. ; Lee, H.Y. ; Yoon, J.S. ;
Journal of the Korean Vacuum Society, volume 7, issue s1, 1998, Pages 15~19
Structural and optical properties of
as well as
/GaN single quantum we11 (SQW) grown on sapphire (0001) substrate with an based GaN using rf-plasma assisted MBE have been investigated. The quality of the InXGal.,N fdm was improved as the growth temperature increased. In PL measurements at low temperatures, the band edge emission peaks of
was shifted to red region as an indium cell and substrate temperature increased. For
/GaN SQW, the optical emission energy has blue shift about 15meV in PL peak, due to the confined energy level in the well region. And, the FWHM of the
/GaN SQW was larger than that of the bulk Ino,la.9N films. The broadening of FWHM can be explained either as non-uniformity of Indium composition or the potential fluctuation in the well region. Photoconductivity (PC) decay measurement reveals that the optical transition lifetimes of the SQW measured gradually increased with temperatures.
SENSITIZED PHOTOINITIATING SYSTEM USED IN PHOTOPOLYMER FILMS
Liu, A.D ; Trifunac, A.D ; Krongauz, V.V. ;
Journal of the Korean Vacuum Society, volume 7, issue s1, 1998, Pages 20~24
Photploymer films are widely used in printing and electronic industries, and their usage is expanding to encompass holography, data storage and data processing, optical waveguides and compact disks, etc. One of widely used photoplymerization initiator, 20chloro-hexaarylbiimidazole (o-Cl-HABI), is studied by laser flash photolysis in dichloromethane solution in the absence and presence of the visible light photosensitizing dye, 2, 5-bis[(2, 3, 6, 7 -tetrahydro- 1H, 5H -benzo [i, j,] quinolizin -1-yl) methylene]-cyclopenta-none, (JAW). In the presence of JAW, an increase in triarylimidazolyl radicals L.formation is observed in relative to the absence of JAW. The mechanism of this photosensitizing dissociation is concluded as the dissociation of the o-Cl-HABI radical anion formed by the electron transfer from excited singlet state of JAW to o-Cl-HABI. The observed formation of L.radicals exhibits a linear dependence on o-Cl-HABI concentration. The rate constant of electron transfer obtained from this dependence is equal to (1.0
. No reaction between the excited triplet state of JAW and o-Cl-HABI is found.
Quantum Confimement Effect in
Thin Films Embedded with Semiconductor Microcrystallites
Wu-Xuemei ; Chen-Jing ; Ahuge-Lanjian ;
Journal of the Korean Vacuum Society, volume 7, issue s1, 1998, Pages 25~29
thin films embedded with Ge microcrystallites (Ge-
) were prepared by use of r.f. co-sputtering technique from a Ge,
composite target. The size of Ge crystallites can been modulated by the experiment parameters. The optical absorption and non-linear optical properties of Ge-
films were measured. The blue shift of the optical absorption edge, the saturated absorption and two-photon absorption under the condition of resonant absorption have been observed, and are discussed according to the quantum confinement effect.
Characterion of Calcium Phosphate Films Grown on Surgicl Ti-6AI-4V By Ion Beam Assisted Deposition
Lee-I.S ; Song-J.S ; Chol-J.M ;
Journal of the Korean Vacuum Society, volume 7, issue s1, 1998, Pages 30~36
The plasma-spray technique is currently the most frequently used method to produce calcium phosphate coatings. Hydroxyapatite(HAp), one form of calcium phosphate, is preferred by its ability to form a direct bond with living bone, resulting in improvements of implant fixation and faster bone healing. Recently, concerns have been raised regarding the viable use and long-term stability of plasma-spray HAp coatings due to its nature of comparatively thick, porous, and poor bonding strength to metal implants. Thin layers (maximum of few microns) of calcium phosphate were formed by an e-beam evaporation with and without ion bombardments. The Ca/P ration of film was controlled by either using the evaporants having the different ration of Ca/P with addition of CaO, or adjusting the ion beam assist current. The Ca/P ration had great effects on the structure formation after heat treatment and the dissolution bahavior. The calcium phosphate films produced by IBAD exhibited high adhesion strength.
Observations on the structural changes of embryos of Paeonia rockii L. by low-energy ion irradiation
Zhang, D.M. ; Cui, F.Z. ; Lin, Y.B. ;
Journal of the Korean Vacuum Society, volume 7, issue s1, 1998, Pages 37~43
The mechanism of interaction between low energy ions and biological organisms has been paid much attention recently. In order to clarify the microstructural response to low energy ion irradiation embryonic cells of Paeonia rockii L. implanted by
ions with the energy of 80KeV were investigated by Optical Microscopy (OM), Scanning electron Microscopy(SEM) and Transmission Electron Microscopy(TEM). At the dose of 1
, apparent cellular damage was observed in the outer several layers of the radicle. The shape of the cells was obviously deformed from regular polygon to irregular. The cell walls became obscure. SEM micrographs showed that the surface of the radicle was etched severely. It was observed by TEM that nucleus of the implanted cell was elongated and tended to fracture. Nuclear envelope lost its integrity. The implanted
ions were detected by Energy Dispersive Spectroscopy (EDS). These observations showed that low energy ions could damage to the plant organisms with the thickness of about 30~50
. The possible reasons for radiation damage in the biological organisms were discussed.
Morphology Changes of E. coli in Ag-HAp Observed by TEM
Kim, T.N. ; Feng, Q.L. ; Kim, Y.J. ; Yim, H.J. ; Lim, D.Y. ; Hwang, D.S. ; Kim, J.W. ; Cui, F.Z. ;
Journal of the Korean Vacuum Society, volume 7, issue s1, 1998, Pages 44~49
The antimicrobial effects of HAp and Ag-HAp was observed using periprosthetic infection bacteria such as Pseudomonas Aeruginosa, Staphylococcus Epidermidis, Escherichia coli (DH5
). Ag-HAp showed good antimicrobial effects. TEM study of E. coli with and without Ag treatment in HAp was experimented in order to find the mechanism of Ag in antimicrobial effects. It was observed that the shape of Ag-treated E. coli was changed, the cells walls became inhomogeneous. The vaculoes at cytoplasm formed into E. coli and finally it was discovered by EDAX that there were many dark granules which contain the Ag element inside the cells.
Influence of Silver Ions in HA Film on Morphology of Macrophages
Feng, Q.L. ; Kim, T.N. ; Kim, J.W. ;
Journal of the Korean Vacuum Society, volume 7, issue s1, 1998, Pages 50~56
Ion beam assisted deposition (IBAD) was successfully used to produce a dense and ultra-adherent Hydroxyapatite (HA) film on titanium alloy and alumina. Recently it is also proved that the HA coatings on alumina substrate treated with 20 ppm
had the structure of
, which exhibited excellent antimicrobial effects. The present paper aims to morphlogically characterize the adhesion of macrophages on newly developed Ag-HA coated alumina and Ti6A14V substrates and to evaluate the biocompatibility of the coatings in vitro. It can be found that the cell number on alumina of the concentration of
in the treatment, the cell number on Ag-HA coatings decreased. Up to 20 ppm
by Ag-treatment, the morphological development of the cells on Ag-HA coating was similar to that of the cells on HA coating, suggesting the biotolerance of the Ag-HA coatings.
Temperature dependence of Heteroeptaxial
films grown on Si by ionized cluster beam deposition
Cho M. H ; Ko D. H ; Whangbo S. W ; Kim, H. B ; Jeong K. H ; Whang C. N ; Park, S. C ;
Journal of the Korean Vacuum Society, volume 7, issue s1, 1998, Pages 57~77
films were grown on a Si(111) substrate by ionized cluster beam deposition(ICBD) in ultra high vacuum, and its qualities such as crystllitnity, film stress, and morphological characteristics were investigated using the various measurement methods. The crystallinity was investigated by x-ray diffraction (XRD) and reflection high energy electron diffraction (RHEED). Interface crystallinity was also examined by Rutherford backscattering spectroscopy(RBS) channeling, transmission electron microscopy(TEM). The stress of the films was measured by RBS channeling and XRD. Surface and interface morphological characteristics were investigated by atomic force microscopy (AFM) and x-ray scattering method. Comparing the interface with the surface characteristics, we can conclude that many defects at the interface region were generated by interface reaction between the yttrium metal and SiO2 layer and by ion beam characteristic such as shallow implantation, so that they influenced the film qualities. The film quality was dominantly depended on the characteristic temperature range. In the temperature range from
, the crystallinity was mainly improved and the surface roughness was drastically decreased. On the other hand, in the temperature range from
, the compressive stress and film density were dominantly increased, and the island size was more decreased. Also the surface morphological shape was transformed from elliptical shape to triangular. The film stress existed dominantly at the interface region due to the defects generation.
Radiation Damage Effects in
Implanted Sapphire After Annealing
Journal of the Korean Vacuum Society, volume 7, issue s1, 1998, Pages 78~84
Niobium ions of 380 keV energy have been implanted at 300k in sapphire with a dose of
and subsequently thermal annealed up to
at reducing atmosphere. The behavior of the radiation damage produced by ion implantation followed by annealing is investigated using optical absorption technique and X-ray photoelectron spectroscopy(XPS). It is found that different defects annealed are dependent on the annealing temperature owing to different mechanisms which are proposed on the basis of the optical absorption measurement, and the implanted niobium in sapphire is in different local environments with different charge states after annealing, which are analyzed by XPS measurements.
Low temperature growth of GaN on sapphire using remote plasma enhanced-ultrahigh vacuum chemical vapor deposition
Park, J.S. ; Kim, M.H. ; Lee, S.N. ; Kim, K.K. ; Yi, M.S. ; Noh, D.Y. ; Kim, H.G. ; Park, S.J. ;
Journal of the Korean Vacuum Society, volume 7, issue s1, 1998, Pages 85~99
A ultrahigh vacuum chemical vapor deposition(UHVCVD)/metalorganic chemical vapor deposition(MOMBE) system equipped with a radio frequency(RF)-plasma cell was employed to grow GaN layer on the sapphire at a low temperature. The x-ray photoelectron spectroscopy analysis of nitrogen composition on the nitridated sapphite surface indicated that a nitridation process is mostly affected by the RF power at low temperature. Atomic force microscope images of nitridated surface the protrusion density on the nitridated sapphire is dependent on the nitridation temperature. The crystallinity of GaN grown at
was found to be much improved when the sapphire was nitridated at low temperature prior to the GaN layer growth. Moreover, a strong photoluminescence spectrum of GaN grown by UHVCVD/MOMBE with a rf-nitrogen plasma was observed for the first time at room temperature.
Thin Film by Ion-Beam-Enhanced Deposition
Zhu, Jianzhong ; Ren, Congxin ;
Journal of the Korean Vacuum Society, volume 7, issue s1, 1998, Pages 100~105
This paper describes the preparation of Pt-and
$Nb_2O_5$ thin film by Ion-Beam-Enhanced Deposition. Platinum and titanium doping, and Nb2O5 deposition were carried out in situ. The dependence of oxygen sensing properties on the amounts of Pt and Ti dopant in the
$Nb_2O_5$ film was investigated. There were the highist sensitivity, the lowest temperature coefficient and the shortest responce time at doping of 5 mol%
and 0.3 mol%Pt
A Formation of the
Films on Si(100) ASubstrate by
Density Plasma CVD
Oh, Kyoung-Suk ; Kang, Min-Sung ; Lee, Kwang-Man ; Kim, Duk-Soo ; Kim, Doo-Chul ; Choi, Chi-Kyu ; Yun, Seak-Min ; Chang, Hong-Young ;
Journal of the Korean Vacuum Society, volume 7, issue s1, 1998, Pages 106~117
Fluorocarbonated-SiO2 films were deposited on p-type Si(100) substrate using FSi
mixture gases by a helicon plasms source. High density
/FTES/Ar plasma of ~
is obtained at low pressure (<3mTorr) with RF power above 900 W in the helicon plasma source. Optical emission spectroscopy (OES) is used to study the relation between the relative densities of the radicals and the film properties. The FTES and
gases are greatly dissociated at the helicon mode that is launched at the above threshold plasma density. FTIR and XPS spectra shows that the film has Si-F, and C-F bonds during the formation process of the film which may lower the dielectric constant greatly. The relative dielectric constant, leakage current density, and dielectric breakdown voltage are about 2.8,
, and > 12 MV/cm, respectively.
Formation of Alumian gradient coatings by Ion Beam Assistant Deposition
Journal of the Korean Vacuum Society, volume 7, issue s1, 1998, Pages 118~122
gradient coatings were formed by evaporating pure aluminium(99.9%) in
environment with an IBAD facility, 12keV
was used to irradiate the coatings simultaneously during the deposition. Sample's composition and depth profile were analysed by RBS and AES measurement, and their microhardness and porosity property were also measured in the experiment. Results show that, the oxygen concentration in the deposited coatings has a nearly linear relationship with the inputting gas flow before
partial pressure in the target chamber reaches
mbar under which stoichiometric
could be formed; and sample's microhardness and porosity property is affected significantly by the oxygen concentration in the coatings.
Metal induced crystallization of amorphous silicon using metal solution
Yoon, Soo-Young ; Oh, Jae-Young ; Kim, Chae-Ok ; Jang, Jin ;
Journal of the Korean Vacuum Society, volume 7, issue s1, 1998, Pages 123~133
Amorphous silicon (a-Si) was crystallized by metal induced crystallization using metal solution. The a-Si films spin coated with a 50,000 ppm Ni solution were crystallized at as low as
. Needlelike morphology, developed as a result of the migration of
, precipitates, appears in the MIC poly-Si. The growth of the needlelike crystallites proceeds to a direction parallel to (111). The crystallization temperature can be lowered to
by Au addition. The enhancement of crystallization results from the decrease of interfacial energy at the NiSi2/Si interface by Au addition.
Field Emission Characteristics a-C:F:N Film Deposited by Inductively Coupled Plasma Chemical Vapor Deposition
Jae, Chung-Suk ; Jung, Han-Eun ; Jang Jin ;
Journal of the Korean Vacuum Society, volume 7, issue s1, 1998, Pages 134~139
Amorphous fluorocarbon (a-C:F) is of interest for low dielectric interlayer material, but in this work we applied this material to FED field emitter. N-doped a-C:F films were deposited by inductively coupled plasma chemical vapor deposition (ICPCVD). The Raman spectra were measured to study the film structure and inter-band optical absorption coefficients were measured using Perkin-Elmer UV-VIS-IR spectrophotometer and optical band gap was obtained using Tauc's plot. XPS spectrum and AFM image were investigated to study bond structure and surface morphology. Current-electric field(I-E) characteristic of the film was measured for the characterization of electron emission properties. The optimum doping concentration was found to be [N2]/[CF4]=9% in the gas phase. The turn-on field and the emission current density at
=9% were found to be 7.34V/
Phase identification of
in CN films prepared by rf plasma chemical vapor deposition and dc magnetron sputtering
Fu, Dejun ; Wu, Dawei ; Zhang, Zhihong ; Meng, Xianquan ; He, Mengbing ; Guo, Huaixi ; Peng, Yougui ; Fan, Xiangjun ;
Journal of the Korean Vacuum Society, volume 7, issue s1, 1998, Pages 140~148
films by rf plasma enhanced chemical vapor deposition(PCVD) and alternating
/TiN composite films by dc magnetron sputtering. X-ray diffraction (XRD) and transmission electron diffraction (TED) revealed that the structure of the films is amorphous or polycrystalline, depending on deposition conditions and heat treatment. X-ray photoelectron spectroscopy (XPS) and Fourier transform infrared (FTIR) spectroscopy confirmed the presence of
hybridized C atoms bonded with N atoms in the tetrahedral and hexagonal configurations, respectively. Graphite-free
films were obtained by PCVD under optimal conditions. To prepare well crystallized
films by magnetron sputtering, we introduced negatively biased gratings in the sputtering system. CN films deposited at grating voltages (Vg) lower than 400V are amorphous. Crystallites of cubic and
were formed at increased voltages.
Optical Interferometric Characterization of Nonlinear Optical Polymer Thin Films
Wu, J.W. ;
Journal of the Korean Vacuum Society, volume 7, issue s1, 1998, Pages 149~155
The linear electro-optic (EO) effect is one of the second-order nonlinear optical effects existing in a noncentrosymmetric macroscopic system. In a polymer thin film, the noncentrosymmetry is achieved by electric field poling. The magnitude of the linear EO response is determined through the orientational distribution function of hyperpolarizable molecular dipoles. The relation between the linear EO coefficient and the second-order nonlinear optical susceptibility is explained. Three different methods of measuring the linear EO coefficient of a poled nonliner optical polymer thin film are introduced and discussed. All of them make use of the interferometric technique, the difference being in the optical parameters which are interfering.
Boron-doped Diamond Thin Film for Electrochemical Biosensors
Jianzhong-Zhu ; Lu-Deren ;
Journal of the Korean Vacuum Society, volume 7, issue s1, 1998, Pages 156~158
This paper describes the preparation of boron-doped polycrystalline diamond thin film whose electrical resitivity is lower than
cm. The 1
microelectrodes, its conducting line with 0.2mm wide and 0.5
pads was patterned by reactive ion beam etching. A glucose microsensor based on diamond film microelectrode and pyramidal containment produced on silicon by anisotropic etching was developed. Its advantages are high sensitivity and high stability.
Field Emission Characteristics of Deffctive Diamond Films
Koh, Ken-Ha ; Park, Kyung-Ho ; Lee, Soon-Il ;
Journal of the Korean Vacuum Society, volume 7, issue s1, 1998, Pages 160~166
The field emission characteristics of defective diamond films grown by microwave plasma enhanced chemical vapor deposition (MPECVD) have been studied. X-ray diffraction, the poor crystal quality and/or small grain sizes of the diamond phase and the inclusion of the non-diamond carbon phases in these films have been condirmed by raman spectroscopy, scanning electron microscopy, atomic force microscopy, and the reflectance measurements. The degrees of the film defectiveness and the emission characteristics were dependent on the methane concentration. Current-versus-voltage measurements have demonstrated that the defective diamond films have good electron emission characteristics. characteristics strongly suggests the defect-related electron-emission mechanism. The defective diamond films deposited on Si substrates show the field emission current density of 1
have been measured at electric fields as low as 4.5V/
, respectively. We also observed the similar emission characteristics from the defective diamond film deposited on Cr/Si substrate and could decrease the deposition temperature to
Patterning of CVD Diamond Films For MEMS Application
Wang, Xiaodong ; Yang, Yirong ; Ren, Congxin ; Mao, Minyao ; Wang, Weiyuan ;
Journal of the Korean Vacuum Society, volume 7, issue s1, 1998, Pages 167~170
To apply diamond films in microelectromechanical systems(MEMS), it is necessary to develop the patterning technologies of diamond films in the micrometer scale. In this paper, three different kinds of technologies for patterning CVD diamond films carried out by us were demonstrated: selective growth by improved diamond nucleation in DC bias-enhanced microwave plasma chemical vapor deposition (MPCVD) system, selective growth of seeding using diamond-particle-mixed photoresist, and selective etching of oxygen ion beam using Al as the mask. It was show that high selectivity and precise patterns had been achieved, and all the processes were compatible with IC process.
Statistical Analysis of Microhardness Variations in Plasma Sprayed
Li, Jianfeng ; Huang, jingqi ; Ding, Chuanxian ;
Journal of the Korean Vacuum Society, volume 7, issue s1, 1998, Pages 171~178
The microstructure and properties of plasma-sprayed coatings depend on a great number of spraying parameters, random factors, which lead to vibration in these spraying parameters, may in some degree influence the microstructure and properties of the coatings. Therefore, the property values appear certain distributions, and the description and comparison of the properties of plasma-sprayed coatings should be performed employing statistical analysis. In this paper,
-Nicr coatings of different thickness were sprayed onto stainless steel using atmosphere plasma system and adopting three kinds of gun translation speeds. Then the microhardness measurements were performed on polished surface of the coatings. Forty readings were taken and statistically analyzed by calculating the characteristic values, estimating and comparing the means, and assessing whether they belonged to the Normal or Weibull Distribution. This study has found that statistical analysis could discriminate influence of spraying parameters and coating design on microhardness of the
-Nicr coatings from random vibration, which showed that the microharness of the
-Nicr coatings were related to gun translation speed coating thickness.
Effect of Spraying Distance on Properties of
Zeng-Y ; Zhang-Y.F ; Huang-J.Q ;
Journal of the Korean Vacuum Society, volume 7, issue s1, 1998, Pages 179~182
Boron carbide coating has some very attractive properties for nuclear and semiconductor industry. The potential of atmosheric plasma spray as manufacturing methods for
coating was discussed. In this work, the boron carbide coating with low porosity, high microhardness and good life of thermal shock resistance was deposited by the control of spraying distance. The relationship between the properties of
coatings and their spraying distance was studied.
INVESTIGATION OF ENERGETIC DEPOSITION OF Au/Au (001) THIN FILMS BY COMPUTER SIMULATION
Zhang, Q. Y. ; Pan, Z. Y. ; Zhao, G. O. ;
Journal of the Korean Vacuum Society, volume 7, issue s1, 1998, Pages 183~189
A new computer simulation method for film growth, the kinetic Monte Carlo simulation in combination with the results obtained from molecular dynamics simulation for the transient process induced by deposited atoms, was developed. The behavior of energetic atom in Au/Au(100) thin film deposition was investigated by the method. The atomistic mechanism of energetic atom deposition that led to the smoothness enhancement and the relationship between the role of transient process and film growth mechanism were discussed. We found that energetic atoms cannot affect the film growth mode in layer-by-layer at high temperature. However, at temperature of film growth in 3-dimensional mode and in quasi-two-dimensional mode, energetic atoms can enhance the smoothness of film surface. The enhancement of smoothness is caused by the transient mobility of energetic atoms and the suppression for the formation of 3-dimensional islands.
Optical properties of amorphous
ternary thin films prepared by plasma enhanced chemical vapor deposition
Zhang, Z.H. ; Fan, X.J. ; Guo, H.X. ; Zhang, W. ; Zhang, C.Y. ; Luo, F.Y. ;
Journal of the Korean Vacuum Society, volume 7, issue s1, 1998, Pages 190~196
thin films were obtained by plasma enhanced chemical vapor deposition(PECVD) using
as the reaction sources. The chemical state were characterized by x-ray photoelectron spectroscopy (XPS) and Fourier transform infrared spectroscopy(FTIR). The optical properties of the thin films were investigated by UV-visible spectrophotometer and ellipsometer, and the optical band gaps of thin films were determined from corresponding transmittance spectra following Tauc equation.
Investigation on Preparation of Ge Quantum Dots in
Chen, Jing ; Wu, Xuemei ; Jin, Zongming ; Yao, Weiguo ;
Journal of the Korean Vacuum Society, volume 7, issue s1, 1998, Pages 197~201
Ge quantum dots in
thin films were prepared by r.f. magnetron co-sputtering using a Ge,
composite target. The size of quantum dots was modulated by controlling of substrate temperature during depositing and annealing of samples deposited at certain substrate temperature. A series of work was done on the influence of preparing parameters on the growth of quantum dots, and a discussion on the formation and growth of quantum dots under different preparation parameters is given.