Purpose: HCD ion plating apparatus by hollow cathod discharge method was fabricated and TiN films were deposited on stainless steel by this apparatus with increasing in

gas flow and the fine color changes of TiN films were analyzed. Methods: The spectroradiometer and spectrophotometer were used to observe optically the fine color changes of TiN thin films, and XPS was used to analyze the compositions of TiN thin films with increasing in

gas flow. Results: The color coordinate of TiN thin film with

120 sccm gas flow showed (0.382, 0.372) which had the mixed colors of gold and silver, and the color coordinate changed to the increasing value of (x,y) with increasing in

gas flow which indicated the deep gold color. It was found that the slopes of the reflectances at 550nm were increased with increasing in

gas flow. And from the Ti scans using XPS, it was found that the peak heights of 455 eV derived from TiN composition were increased with increasing in

gas flow, while the peak heights of 459 eV from

composition were decreased. Conclusions: The results obtained above were that the color of TiN film with 120 sccm

gas flow had been observed from the mixed color of silver and gold due to TiC,

, TiN on the surface and TiN,

inside film, and the color of TiN films changed a deep gold color with increasing in

gas flow due to increasing TiN composition.