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REFERENCE LINKING PLATFORM OF KOREA S&T JOURNALS
> Journal Vol & Issue
Journal of the Korean institute of surface engineering
Journal Basic Information
Journal DOI :
The Korean Institute of Surface Engineering
Editor in Chief :
Volume & Issues
Volume 26, Issue 6 - Dec 1993
Volume 26, Issue 5 - Oct 1993
Volume 26, Issue 4 - Aug 1993
Volume 26, Issue 3 - Jun 1993
Volume 26, Issue 2 - Apr 1993
Volume 26, Issue 1 - Feb 1993
Selecting the target year
Black oxide coating on Invar steel
Journal of the Korean institute of surface engineering, volume 26, issue 3, 1993, Pages 109~114
Black magnetite film could be formed on Invar steel for shadows mask by iron electroplating in thickness of 0.46~0.63
on Invar steel and subsequent oxidation of iron by immersion in strongly alkaline soution for 30~60 minutes. blackness degreed of magnetite oxide film on Invar was C20BL90 in comparision of color chart of Dainippon Ink & Chemicals Inc. Co. and adhesion test showed excellent adhesion of oxide film on substrate. Magnetite oxide film grew up on iron in hot strongly alkaline solution according to 'Sato-Cohen' oxide film growth model.
A study on the Improvement of Surface Topography in CVD Aluminum Thin Films
Journal of the Korean institute of surface engineering, volume 26, issue 3, 1993, Pages 115~120
Aluminum thin films were deposited on the silicon substrate by the pyrolysis of TrilsoButylAluminum (TIBA) in a cold wall LPCVD reactor. The effect of substrate on the surface topograply and the decomposition reaction was investigated. The activation energy for the decomposition of TIBA was turned out to be 1 eV from the Arrhenious plot. The surface topography of the CVD aluminum could be improved by the application of thin metal film, which was in-situ deposited on the silicon prior to CVD process.
A Study on the Development of an Expert System for Bright Nickel Plating Processes
Journal of the Korean institute of surface engineering, volume 26, issue 3, 1993, Pages 121~126
In this study, a user-friendly expert system is developed for bright nickel plating processes which have a number of influence factors related to the plating quality. Because the mutual relations between these factors in the processes are not quantitatively identified, the expert system deals mainly with the troubleshooting process problems by using the production rule which is able to utilize effectively the qualitatives knowledge and the accumulated experience. Especially, to provide the system user with more timely and convenient informations about the cause of problem symptom and the corresponding countermeasure, it is introduced the interactive user interface using the Korean language. Also the knowledge base and inference engine of the expert system are completely separated, so that the substance of knowledge base can be easily updated and extended.
A Comparison of Electrical Properties by Recrystallization of Dopant-Implanted Amorphous Silicon Films
Journal of the Korean institute of surface engineering, volume 26, issue 3, 1993, Pages 127~134
P+ and BF2+ were implanted to LPCVD amorphous silicon films deposited on thermally-oxidized silicon wafers and the low temperature annealing process followed with various conditions to activate implanted ions and to recrystallize the films. We tried to find the optimum processing condition by comparing the recrystallization behaviors and the electrical properties. TEM analysis showed that the final grain size of BF2+-implanted films was similar to that of unimplanted films, whereas the grains of P+-implanted films. For both P+ - and BF2+ -implanted films, sheet resistances were decreased with elevating annealing temperature and the minimum value was about 110~120
Voltammetric Study on the Underpotential Deposition of Zinc
Lee, Joong-Bae ; Paul F. Duby ;
Journal of the Korean institute of surface engineering, volume 26, issue 3, 1993, Pages 135~142
Composition and microstructure of Silver-Tin alloy deposits from prophosphate bath
Journal of the Korean institute of surface engineering, volume 26, issue 3, 1993, Pages 143~148
Composition and microstructures of Silver-Tin alloy deposits from a pyrophosphate bath were studied under the D.C. electrolysis conditions. Cathode current efficiency and throwing power of alloy deposits de-creased with increasing current density. Tin content of Ag-Sn alloy deposits decreased noticeably with the cur-rent density and with decreasing pH. The preferred orientation of the deposits tended to change in sequence of (110)longrightarrow(111)longrightarrow(100) texture with increasing the cathode overpotential. The surface structure of alloy deposits showed the smooth surface structure with fine crystallites.
Pretreatment for Cu electroplating and Etching Property of Cu-Cr Film
Journal of the Korean institute of surface engineering, volume 26, issue 3, 1993, Pages 149~157
In the study of TAB(Tape Automated Bonding)technologies, Cu-Cr sputtered seed layer has been used to improve the adhesion between Polyimide and Cu film and electrical properties. But the Cu electrodeposit on Cu-Cr film had poor adhesion or powder-like form due to the surface Cr oxides on the Cu-Cr film. By means of activating the Cu-Cr film with the oxalic acid and phosphoric acid, the Cu film with the improved adhesion could be coated on the Cu-Cr sputtered film in CuSO4 solution. The etching rate was compared with increasing the Cr content of the sputtered Cu-Cr film, and anodic polarization curve in FeCl3 solution was investigated. With increasing the Cr content, the etching rate was reduced. The clean etching cross section could be obtained with increasing the concentration of FeCl3 solution. But above the 13 w/o Cr content, Cu-Cr sputtered film could not bed etched cleanly only with FeCl3 solution and additives were needed.