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Journal of the Korean institute of surface engineering
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Journal Basic Information
pISSN :
1225-8024 
eISSN :
 
Journal DOI :
10.5695/JKISE 
Frequency :
Others 
Editor in Chief :
move
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  • ICP ETCHING OF TUNGSTEN FOR X-RAY MASKS
  • Jeong, C. ; Song, K. ; Park, C. ; Jeon, Y. ; Lee, D. ; Ahn, J. ;
  • Journal of the Korean institute of surface engineering, volume 29, issue 6, 1996, Pages 869~875
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