Electric fire breaks out by various causes such as electric short, overload(over current), leakage current, poor contact, static electricity, insulation deterioration, partial disconnection and etc. In this paper, we studied analysis technique for scientific and systematic judgment for distinction of electricity fire existence and nonexistence, and described about electricity fire cause analysis process for collecting physical evidences. We handled external form analysis, Substance extension analysis, X-ray transmission analysis, cross-section analysis, thermal analysis, chemical structure analysis, surface structure analysis, component analysis, electrical properties analysis, and circuit analysis by analysis technique for electricity fire cause judgment. We expect that analysis technic elevation and correct cause of fire analysis of scene of a fire investigators and analysts through this paper which see help.