• Title, Summary, Keyword: Argon laser

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Study on Argon Metastable Density in ICP by Using Laser Induced Fluoresce

  • Seo, Byeong-Hun;Yu, Sin-Jae;Kim, Jeong-Hyeong;Seong, Dae-Jin;Jang, Hong-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • pp.219.2-219.2
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    • 2014
  • Characteristics of Argon metastable density with electron density have been studied by using Laser induced fluorescence (LIF) in ICP. Two different evolutions of measured metastable densities with electron density depending on a measurement position are addressed. The experimental result is explained by using a zero dimensional global model and is due to electron kinetic properties in the positions that can be seen from electron energy probability functions measured by Langmuir probe. The underlying physics on metastable density with electron density and an experimental method of LIF are presented in detail.

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Study on Argon Metastable and 4p State Neutral Atoms in Magnetized ICP and Helicon Plasmas Measured by Laser Induced Fluorescence and Plasma Emission

  • Seo, Byeong-Hun;Yu, Sin-Jae;Kim, Jeong-Hyeong;Seong, Dae-Jin;Jang, Hong-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • pp.579-579
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    • 2013
  • We study on Argon metastable and 4p state neutral atom density in magnetized ICP Helicon plasmas by Laser Induced Fluorescence and plasma emission. The results show that metastable density is too low at the center of chamber due to significant neutral depletion. Otherwise, 4p state is high at the center of chamber because electron density is very high. Power and pressure dependence of metastable and 4p state neutral atom have been spatially measured in the radial direction of cylindrical chamber.

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Medical Laser (의료용 Laser)

  • 김덕원
    • Korean Journal of Optics and Photonics
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    • v.1 no.1
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    • pp.107-113
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    • 1990
  • Characteristics and applications of three major types of lasers are discussed. They are chemical-metabolic, thermal destructive, and nonthermal mechanical lasers. The thermal destructive lasers ($CO_2$, Argon, and Nd:YAG) are especially explained in detail with regard to energy density, wavelength, fluence, stage of thermal destruction, and advantages of laser surgery. Excimer and Q-swiched lasers are discussed as nonthermal mechanical ones. Delivery system, optical fiber and articulated arm, is also discussed. Finally, recent advancements of medical laser are included in the conclusion.

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A STUDY ON THE CARIES ACTIVITY TEST WITH VISIBLE LIGHT INDUCED BY LASER (가시 레이저 광을 이용한 치아우식활성검사에 관한 연구)

  • Lee, Sang-Ho;Lee, Nang-Young
    • THE JOURNAL OF THE KOREAN ACADEMY OF PEDTATRIC DENTISTRY
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    • v.27 no.1
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    • pp.161-168
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    • 2000
  • The purpose of this study was to develop a practical caries activity test using laser fluorescence. The subjects of study were 30 children of $7\sim10$ years old. Fluorescence from initial carious lesion of teeth illuminated by an argon laser(488nm) was observed through barrier alter. For evaluation of accuracy and propriety of this method fer caries activity test, teeth with initial caries lesion on buccal or labial surface of children was examined with visual inspection and laser fluorescence. Visual examination for the dDfFtT and the $Cariescreen^{(R)}$ test were also done. The results from the present study can be summarized as follows: 1. Laser fluorescence test could differentiate initial caries lesions more easily than visiual inspection. 3. There was highest correlation(= 0.73) between laser fluorescent test and $Cariescreen^{(R)}$ test and. And also apparent correlation(= 0.66) exists between laser fluorescent test and caries experience measured by dDfFtT.

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Analysis of Collisional Sheath in an Argon dc Discharge (아르곤 직류방전의 충돌쉬스 구조해석)

  • Choi, Young-Wook;Lee, Hae-June
    • Proceedings of the KIEE Conference
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    • pp.1647-1649
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    • 2003
  • The electric fields of the sheath region in an argon do discharge were measured using a laser optogalvanic spectroscopy in a pressure range from 0.88 to 10 Torr, where collisions are significant in the sheath region. The sheath width is estimated as the position where the electric field becomes zero, and the pressure dependence of the measured sheath width was obtained to be $(pressure)^{-1/3}$. The measured electric fields agree well with one-dimensional simulation results but are slightly different from collisional sheath theory in the mobility limited region.

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Characteristics of Poly-Si TFTs Fabricated on Flexible Substrates using Sputter Deposited a-Si Films

  • Kim, Y.H.;Moon, D.G.;Kim, W.K.;Han, J.I.
    • 한국정보디스플레이학회:학술대회논문집
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    • pp.297-300
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    • 2005
  • The characteristics of polycrystalline silicon thin-film transistors (poly-Si TFTs) fabricated using sputter deposited amorphous silicon (a-Si) precursor films are investigated. The a-Si films were deposited on flexible polymer substrates using argon-helium mixture gases to minimize the argon incorporation into the film. The precursor films were then laser annealed by using a XeCl excimer laser and a four-mask-processed poly-Si TFT was fabricated with fully self-aligned top gate structure. The fabricated pMOS TFT showed field-effect mobility of $32.4cm^2/V{\cdot}s$ and on/off ratio of $10^6$.

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Atomic Emission Characteristics of Laser-Induced Plasma for INVAR in an Argon and a Vacuum Atmospher (진공 및 Argon 분위기에서 INVAR 합금에 대한 Laser-Induced Plasma의 원자 분광 특성)

  • 오기장;전형하;박형국;김달우;오철한
    • Proceedings of the Optical Society of Korea Conference
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    • pp.214-215
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    • 2000
  • 레이저로 발생시킨 플라즈마의 분광학적인 분석은 유용한 분석기술로 평가되고 있다. 이러한 플라즈마를 발생시키는데 있어서 Q-switched 레이저를 많이 사용되고 되고 있으나, Q-switch된 레이저로 발생시킨 플라즈마 복사광의 특성은 주변 분위기에 의해 매우 큰 영향을 받는다. 특히 대기압인 공기분위기에서 레이저로 발생된 플라즈마의 분광특성은 강하고 연속적인 background가 포함되고, 자체적으로 흡수되고, 넓게 퍼진 분광선들이 생성된다. 이는 레이저 발생 플라즈마를 통해 성분을 분석할 경우에 적합하지 않다. (중략)

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Formation of copper films from copper formate by laser-induced pyrolytic decomposition (Copper formate의 레이저 유도 열 분해에 의한 Cu 박막의 제조)

  • Kim, Jae-Kwon;Park, Se-Ki;Lee, Cheon
    • Proceedings of the KIEE Conference
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    • pp.1444-1446
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    • 1998
  • Direct writing of copper lines has been achieved by pyrolytic decomposition of copper formate films using a focused argon ion laser beam($\lambda$ =514.5nm) on a glass. The thickness and linewidth of the deposited copper films were considered as a function of laser power and scan speed. As the result from AES, there are no other elements except for copper after decomposition in the atmospheric ambient.

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A Study on the Argon Laser Assisted Thermochemical Micro Etching (레이저를 이용한 미세에칭에 관한 연구)

  • 박준민;정해도
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • pp.844-847
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    • 2001
  • The application of laser direct etching has been discussed, and believed that the process is a very powerful method for micro machining. This study is focused on the micro patterning technology using laser direct etching process with no chemical damage of the material surface. A new introduced concept of energy synergy effect for surface micro machining is the combination of chemically ion reaction and laser thermal process. The etchant can't etch the material in room temperature, and used Ar laser has not power enough to machine. But, the machining is occurred in local area of the material by the combined energy. Using this process, the material is especially prevented from chemical damage for electric property. We have tested this new concept, and achieved a line with $1{mu}m$ width. The Ar laser with 488nm wavelength was used. The material was Si(100) wafer, and etchant is KOH solution. The application and flexibility of this process is in great hopes for MEMS structures and fabrication of the micro electric device parts.

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Fabrication of micro carbon structures using laser-induced chemical vapor deposition and Raman spectroscopic analysis (레이저 국소증착에 의한 탄소 미세 구조물 제조 및 분광분석)

  • ;;J. Senthil Selvan
    • Journal of Korean Society of Laser Processing
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    • v.5 no.2
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    • pp.17-22
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    • 2002
  • Characteristics of micro carbon structures fabricated with laser-induced chemical vapor deposition (LCVD) are investigated. An argon ion laser (λ=514.5nm) and ethylene gas were utilized as the energy source and precursor, respectively. The laser beam was focused onto a graphite substrate to produce carbon deposit through thermal decomposition of the precursor. Average growth rate of a carbon rod increased for increasing laser power and pressure. Micro carbon rods with good surface quality were obtained at near the threshold condition. Micro carbon rods with aspect ratio of about 100 and micro tubular structures were fabricated to demonstrate the possible application of this method to the fabrication of three-dimensional microstructures. Laser Raman spectroscopic analysis of the micro carbon structures revealed that the carbon rods are consisting of amorphous carbon.

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