• Title, Summary, Keyword: Atomic Force Microscope

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Investigation of the Frictional Behavior with respect to Surface Geometry and Surface Material at Nanoscale (나노스케일에서의 표면형상 및 재료변화에 대한 마찰거동 고찰)

  • 성인하;김대은
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • pp.36-41
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    • 2001
  • In this work, the changes in the friction force(lateral force) with respect to nanoscale geometric variation were investigated using an Atomic Force Microscope and a Lateral Force Microscope. It could be concluded that the changes in the friction force correspond well to the slope change rather than the surface slope itself, and that the influence of slope change on the frictional behavior is dependent on the magnitude of the slope and the torsional stiffness of the cantilever. Also, the nominal friction force is found to be more significantly affected by the material and the physical-chemical state of the surface rather than by nanoscale geometric steps. However, the change in nanoscale geometric details of the surface cause instantaneous change and slight variation in the friction signal.

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A large surface-shape measurement method by using Atomic Force Microscope (원자간력 현미경을 이용한 대면적 표면 형상 측정 방법)

  • Shin Y.H.;Ko M.J.;Hong S.W.;Kwon H.K.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • pp.1543-1546
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    • 2005
  • This paper presents a method to measure a large surface shape using atomic force microscopy, which has been used mostly for measuring over very tiny surfaces. Experiments are performed to measure a step height and a slope of a test sample. The proposed method is rigorously compared with the coordinate measuring machine. The repetition accuracy and the effects of the set point are also studied. The experimental results show that the proposed method is reliable and should be effective to measure both the nano-accuracy surface profile as well as the micro-accuracy global shape of a macro/micro parts using atomic force microscope.

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Development of a Measurement System for the Surface Shape of Micro-parts by Using Atomic Force Microscope (원자간력 현미경을 이용한 초소형 마이크로 부품 표면 형상 측정 시스템 개발)

  • Hong Seong-Wook;Ko Myung-Jun;Shin Young-Hyun;Lee Deug-Woo
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.14 no.6
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    • pp.22-30
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    • 2005
  • This paper proposes a measurement method for the surface shape of micro-parts by using an atomic force microscope(AFM). To this end, two techniques are presented: First, the measurement range is expanded by using an image matching method based on correlation coefficients. To account for the inaccuracy of the coarse stage implemented in AFM, the image matching technique is applied to two neighboring images intentionally overlapped with each other. Second, a method to measure the shape of relatively large specimen is proposed that utilizes the inherent trigger mechanism due to the atomic force. The proposed methods are proved effective through a series of experiments.

A Study on the Performance of Atomic Force Probe for Coordinate Measuring Machines (3차원 측정기를 위한 원자간력 프로브 성능 연구)

  • Jung, P.G.;Bae, G.H.;Hong, S.W.
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.17 no.4
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    • pp.75-80
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    • 2008
  • This paper presents an atomic force probe for triggering coordinate measuring machines(CMMs). A rigorous comparison is made between touch trigger probe and atomic force probe for CMMs. Typical CMMs(touch trigger probe based CMMs) often lead to some errors associated with object curvature and difference in triggering sensitivity. Their applicability is limited only to hard objects. The aim of this work is to develop a trigger sensor for CMMs using atomic force. In order to show the applicability of atomic force as a trigger sensor, a cylindrical shape is measured with a CMM and an atomic force microscope. Three different touch probe heads with different ball sizes are tested. The experiments show that smaller ball provides better results for curved objects. The experimental results also show that the performance of atomic force as a trigger sensor is about that of the smallest ball probe. In addition, experiments are also performed to measure soft objects. Finally, this paper suggests and verifies a trigger sensor using atomic force for CMMs.

Design and Fabrication of a Vacuum Chamber for a Commercial Atomic Force Microscope

  • Park, Sang-Joon;Jeong, Yeon-Uk;Park, Soyeun;Lee, Yong Joong
    • Applied Science and Convergence Technology
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    • v.23 no.2
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    • pp.97-102
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    • 2014
  • A vacuum chamber for a commercial atomic force microscope (AFM) is designed and fabricated. Only minimal modifications were made to an existing microscope in an effort to work in a vacuum environment, while most of the available AFM functionalities were kept intact. The optical alignment needed for proper AFM operations including a SLD (superluminescent diode) and a photodiode can be made externally without breaking the vacuum. A vacuum level of $5{\times}10^{-3}$ torr was achieved with a mechanical pump. An enhancement of the quality factor was observed along with a shift in the resonance frequency of a non-contact-mode cantilever in a vacuum. Topographical data of a calibration sample were also obtained in air and in a low vacuum using the non-contact mode and the results were compared.