• Title, Summary, Keyword: Atomic Force Microscope

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Nondestructive measurement of sheet resistance of indium tin oxide(ITO) thin films by using a near-field scanning microwave microscope (근접장 마이크로파 현미경을 이용한 ITO 박막 면저항의 비파괴 관측 특성 연구)

  • Yun, Soon-Il;Na, Sung-Wuk;You, Hyun-Jun;Lee, Yeong-Joo;Kim, Hyun-Jung;Lee, Kie-Jin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • pp.1042-1045
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    • 2004
  • ITO thin films ($\sim150nm$) are deposited on glass substrates by different deposition condition. The sheet resistance of ITO thin films measured by using a four probe station. The microstructure of these films is determined using a X-ray diffractometer (XRD) and a scanning electron microscope (SEM) and a atomic force microscope (AEM). The sheet resistance of ITO thin films compared $s_11$ values by using a near field scanning microwave microscope.

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Development of a measurement system for the surface of micro-parts (초소형 마이크로 부품 표면 측정 시스템 개발)

  • Hong Seong-Wook;Ko Myung-Jun;Shin Young-Hyun;Lee Deug-Woo
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • pp.413-418
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    • 2005
  • This paper proposes a measurement method for the surface of micro-parts by using AFM(Atomic Force Microscope). To this end, two techniques are presented to extend the capacity of AFM. First, the measurement range is extended by using an image matching method based on correlation coefficients. To account for the inaccuracy of the coarse stage implemented in AFM's, the image matching technique is applied to two neighboring images intentionally overlapped with each other. Second, a method to measure the shape of relatively large specimen is presented by using the inherent trigger mechanism due to the atomic force. The proposed method is proved effective through a series of experiments.

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Development of a Sample Scanner for Atomic Force Microscope (원자 현미경용 샘플 스캐너의 개발)

  • Lee, Dong-Yeon;Lee, Moo-Yeon;Gweon, Dae-Gab
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • pp.879-882
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    • 2005
  • This paper shows a method for design of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors. In the design of flexure guides, the Castigliano's theorem was used to find the stiffness of the guide. The motion amplifying mechanism was used in the piezoelectric actuator to achieve a large travel range. We found theoretically the travel range of the total system and verified using the commercial FEM(Finite element method) program. The maximum travel range of the planar scanner is above than 140 $\mu$m. The 3 axis positioning capability was verified by the mode analysis using the FEM program. Moreover, we presented the actual AFM(Atomic Force Microscope) imaging results with up to 2Hz imaging scan rate. Experimental results show that the properties of the proposed planar scanner is well enough to be used in SPM applications like AFM.

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Theoretical Study of Scanning Probe Microscope Images of VTe2

  • Park, Sung-Soo;Lee, Jee-Young;Lee, Wang-Ro;Lee, Kee-Hag
    • Bulletin of the Korean Chemical Society
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    • v.28 no.1
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    • pp.81-84
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    • 2007
  • Ab initio periodic Hartree-Fock calculations with the full potential and minimum basis set are applied to interpretation of scanning tunneling microscope (STM) and atomic force microscope (AFM) images on 1TVTe2. Our results show that the simulated STM image shows asymmetry while the simulated AFM image shows the circular electron densities at the bright spots without asymmetry of electron density to agree with the experimental AFM image. The bright spots of both the STM and AFM images of VTe2 are associated with the surface Te atoms, while the patterns of bright spots of STM and AFM images are different.

A Study on the Surface Damage between Head/Disk Interfaces by Using AFM (AFM을 이용한 Head/Disk의 표면 파손에 관한 고찰)

  • 이성창;정구현;김대은
    • Journal of the Korean Society for Precision Engineering
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    • v.15 no.9
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    • pp.167-174
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    • 1998
  • In this work the surface damage of head and disk of a hard disk drive was analysed using an Atomic Force Microscope. The initial damage of the disk occurred by generation of extremely small wear particles. Also it was shown that wear particles tend to pile up near the front side of the slider. The surface damage mechanism of drag test and contact-start-stop test was found to be quite similar.

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Investigation of Organic Fouling with AFM(Atomic Force Microscope) in Reverse Osmosis Membrane and Forward Osmosis Membrane (FO와 RO막에서 AFM(Atomic Force Microscope)을 이용한 유기 막 오염 연구)

  • Kuk, Ji-Hoon;Lee, Sang-Youp;Hong, Seung-Kwan
    • 한국방재학회:학술대회논문집
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    • pp.102.1-102.1
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    • 2010
  • 대체수자원 중 막여과 기술에 대한 관심이 지속적으로 높아지고 있다. 하지만, 이러한 막여과 기술에는 fouling이 발생시 효율저감, flux저감, 소모에너지 증대 등 문제점이 발생한다. 이러한 fouling저감을 위해 막 표면특성분석을 통한 기초연구가 필요하다고 보고 이 연구를 진행하였다. AFM을 이용하여 CML입자와 막의 상호작용을 통해 초기 막오염 경향을 예측할 수 있다.

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Reduction of Leakage current Generated by Degradation in Organic Thin Film Transistors using Pattern on Pentacene Surface by Atomic Force Microscope

  • Hwang, Hyun-Doo;Kim, Hyun-Suck;Kim, Chang-Ho;Kim, Jae-Hoon
    • 한국정보디스플레이학회:학술대회논문집
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    • pp.560-562
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    • 2009
  • In this paper, we proposed a simple method of decreasing the off current generated by degradation for improve the electrical characteristics such as mobility and on/off current ratio by making the line patterns on the pentacene surface between the electrodes using atomic force microscope (AFM) lithography.

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Analysis and Control f Contact Mode AFM (접촉모드 AFM의 시스템 분석 및 제어)

  • 정회원;심종엽;권대갑
    • Journal of the Korean Society for Precision Engineering
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    • v.15 no.3
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    • pp.99-106
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    • 1998
  • Recently, scientists introduced a new type of microscope capable of investigating nonconducting surfaces in an atomic scale, which is called AFM (Atomic Force Microscope). It was an innovative attempt to overcome the limitation of STM (Scanning Tunnelling Microscope) which has been able to obtain the image of conducting surfaces. Surfaces of samples are imaged with atomic resolution. The AFM is an imaging tool or a profiler with unprecedented 3-D resolution for various surface types. The AFM technology, however, leaves a lot of room for improvement due to its delicate and fragile probing mechanism. One of the room for improvements is gap control between probe tip and sample surface. Distance between probe tip and sample surface must be kept in below one Angtrom in order to measure the sample surface in Angstrom resolution. In this paper, AFM system modeling, experimental system identification and control scheme based on system identification are performed and finally sample surface is measured by home-built AFM with such a control scheme.

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