• Title, Summary, Keyword: Atomic Force Microscope

Search Result 672, Processing Time 0.039 seconds

Principle and Applications of Multifrequency Atomic Force Microscopy (다중주파수 AFM 원리 및 연구 동향)

  • Lee, Soo Il;Kim, Il Kwang
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
    • /
    • /
    • pp.88-89
    • /
    • 2014
  • In dynamic force microscopy, the cantilever oscillates at a resonant frequency, and the tip deflection is measured at this frequency. The cantilever deflection is, however, highly nonlinear, and the surface properties can be embedded in the deflection at the frequencies other than the original resonant frequency of the cantilever. Multifrequency atomic force microscopy includes the excitation and detection of the deflection in two or more frequencies which are higher harmonics or eigenmodes. This can overcome the limitations of conventional atomic force microscope. We reviewed the multifrequency atomic force microscopy and its applications in many fields.

  • PDF

Optimization of Nano-machining parameters using Acoustic Emission and Taguchi Method (음향방출과 다구찌 방법을 이용한 나노머시닝 가공조건의 최적화)

  • 손정무;이성환;최장은
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
    • /
    • /
    • pp.50-55
    • /
    • 2003
  • Atomic force microscope(AFM) techniques are increasingly used for tribological studies of engineering surfaces at scales ranging from atomic and molecular to microscale. AFM with suitable tips is being used for nanofabrication nanomachining purposes. In this paper, machining characteristics of silicon have been investigated by nano indentation and nano scratch. Mechanisms of material removal on the microscale are studied and the Taguchi method is introduced to acquire optimum parameters for nanomachining. This work shows effectiveness of the Taguchi method in nanomachining. Also, Acoustic Emission(AE) is introduced for the monitoring of nanomachining.

  • PDF

Optimization of Nano Machining Parameters Using Acoustic Emission and the Taguchi Method (음향방출과 다구찌 방법을 이용한 나노머시닝 가공조건의 최적화)

  • 이성환;손정무
    • Journal of the Korean Society for Precision Engineering
    • /
    • v.21 no.3
    • /
    • pp.163-170
    • /
    • 2004
  • Atomic force microscope (AFM) techniques are increasingly used fur tribological studies of engineering surfaces at scales ranging from atomic and molecular to micro-scale. Recently, AFM with suitable tips is being used for nano fabrication/nano machining purposes. In this paper, machining characteristics of silicon were investigated by nano indentation and nano scratch. Nano-scale material removal mechanisms are studied and the Taguchi method was introduced to acquire optimum parameters for nano machining. Also, Acoustic Emission (AR) is used for the monitoring of nano machining.

Modification and Repair of a Carbon Nanotube-based Device Using an Atomic Force Microscope (원자힘현미경을 이용한 탄소나노튜브소자의 턴형 및 수리)

  • Park, Ji-Yong;Kim, Yong-Sun;Oh, Young-Mu
    • Journal of the Korean Vacuum Society
    • /
    • v.16 no.1
    • /
    • pp.33-39
    • /
    • 2007
  • Electrical and mechanical modifications of devices based on carbon nanotubes(CNTs) using an atomic force microscope(AFM) in the forms of cutting and reconnection of CNTs are demonstrated. In addition to the modifications, electrostatic force microscopy is used to visualize the cutting and reconnection of CNTs. In this way, AFM is shown to be a useful tool in local modifications and manipulations of CNT-based devices.

A Flexure Guided Planar Scanner for Scanning Probe Microscope ; Part 2. Evaluation of Static and Dynamic Properties (주사 현미경용 평면 스캐너 Part 2 : 정 · 동 특성 평가)

  • Lee, Moo-Yeon;Gweon, Dae-Gab;Lee, Dong-Yeon
    • Transactions of the Korean Society for Noise and Vibration Engineering
    • /
    • v.15 no.11
    • /
    • pp.1295-1302
    • /
    • 2005
  • This paper shows experimental evaluation results of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors as like explained in detail in Ref. (5). First, the fabrication methods were explained. Second, as the static Properties of the Planar scanner. we evaluated the maximum travel range & crosstalk. Also, we presented the correcting method for crosstalk using electric circuits finally. as the dynamic properties of the planar scanner, we evaluated the first resonant frequency. Also, we presented the actual AFM(atomic force microscope) imaging results with up to 2Hz imaging scan rate. Experimental results show that properties of the proposed planar scanner are well enough to be used in SPM applications like AFM.

Determination of the Allowable Vibration Level of the Atomic Force Microscope Equipment (원자 현미경 장비의 바닥 진동(정상 상태) 허용 기준 결정)

  • Lee, Dong-Yeon
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
    • /
    • /
    • pp.161-164
    • /
    • 2000
  • Currently, Atomic Force Microscope(AFM) has been widely used to measure the surface topography of a sample by detecting interaction force between atoms on the sample and extremely sharp probe tip. The vertical resolution of AFM is mainly determined by external vibration noise. The resolution of AFM shows different values for the different environment, thus it is necessary to determine relationship between the criteria and the resolution of AFM regardless of environment. In this paper, we discuss the allowable level of floor vibration for AFM equipment at given resolution. The vibration criteria can be used as reference data to design mechanical structure and to analyze the structural dynamics of AFM equipment.

  • PDF

Analysis of Nano-contact Between Nano-asperities Using Atomic Force Microscopy (나노스케일 표면돌기 간의 미세접촉에 대한 해석)

  • Ahn, Hyo-Sok;Jang, Dong-Young
    • Journal of The Korean Society of Manufacturing Technology Engineers
    • /
    • v.18 no.4
    • /
    • pp.369-374
    • /
    • 2009
  • In micro/nano-scale contacts in MEMS and NEMS, capillary and van der Waals forces generated around contacting micro-asperities significantly influence the performance of concerning device as they are closely related to adhesion and stiction of interacting surfaces. In this regard, it is of prime importance to accurately estimate the magnitude of surface forces so that an optimal solution for reducing friction and adhesion of micro/nano-surfaces may be obtained We introduced an effective method to calculate these surface forces based on topography information obtained from an atomic force microscope. This method was used to calculate surface forces generated in the contact interface formed between diamond-like carbon coating and $Si_3N_4$ ball. This method is shown to effectively demonstrate the influence of capillary force in the contact area, especially in humid atmosphere.

  • PDF

Elastic Imaging of Material Surface by Ultrasonic Atomic Force Microscopy (초음파 원자 현미경을 이용한 재료 표면의 탄성 이미지화)

  • Kim, C.S.;Park, Tae-Sung;Park, It-Keun;Lee, Seung-Seok;Lee, C.J.
    • Journal of the Korean Society for Nondestructive Testing
    • /
    • v.29 no.4
    • /
    • pp.293-298
    • /
    • 2009
  • The ultrasonic atomic force microscope(UAFM) has been developed in order to enhance the characterization technology for nano-scale surface combining ultrasonic property to atomic force microscope. This UAFM technique enables elasticity imaging due to the physical properties on the heterogeneous surface in addition to the novel topography of surface height in the nano-surface layer. In this study, the prototype UAFM system was constructed and applied to several materials, silicon deposited wafer, spherodized cold heading steel, and carbon fiber reinforced plastic specimen. Clear elastic contrast was successfully obtained using this developed prototype UAFM.

An Experimental Study on the Nano-adhesion of Octadecyltrichlorosilane SAM on the Si Surface (OTS SAM의 미소 응착 특성에 관한 실험적 연구)

  • 윤의성;박지현;양승호;한흥구;공호성
    • Tribology and Lubricants
    • /
    • v.17 no.4
    • /
    • pp.276-282
    • /
    • 2001
  • Nano adhesion between SPM (scanning probe microscope) tips and 075 (octadecyltrichlorosilane) SAM (self-assembled monolayer) was experimentally studied. Tests were performed to measure the nano adhesion and friction in both AFM(atomic force microscope) and LFM(lateral force microscope) modes in various conditions of relative humidity. OTS SAM was formed on Si-wafer (100) surfaces, and Si$_3$N$_4$ tips of different radius of curvature were used. When the surface was hydrophobic, the adhesion and friction forces were found lower than those of bare Si-wafer. Results also showed that micro-adhesion force increased as the relative humidity and the tip radius of curvature increased. The main parameter for affecting the micro-adhesion was found absorbed humidity on the contact surface. These results were discussed with the JKR model and a capillary force caused by absorbed water.