• Title, Summary, Keyword: ICP-OES

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Determination of Cadmium, Chromium and Lead in Polymers by ICP-OES Using a High Pressure Asher (HPA)

  • Cho, Hong-Je;Myung, Seung-Woon
    • Bulletin of the Korean Chemical Society
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    • v.32 no.2
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    • pp.489-497
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    • 2011
  • The proposed method for an effective assay of Cd, Cr and Pb in several polymer samples has been validated. The determination was carried out using ICP-OES after a high pressure asher (HPA) digestion at pressure and temperatures up to 13 MPa and $320^{\circ}C$, respectively. Polymer based materials were totally oxidized with nitric acid in a HPA chamber and determined by ICP-OES. Validation parameters such as linearity, matrix effect, limit of dectection (LOD), limit of quantitation (LOQ), accuracy and precision (repeatibility, intermediate precision and reproducibility) were assessed. The LOD and LOQ in the sample were ranged from 0.98 to 1.18 mg $kg^{-1}$ and 2.93 to 3.55 mg $kg^{-1}$, respectively, relying on the analyte. The proposed method had a good accuracy and precision for repeatability, intermediate precision with respect to days and analysts and reproducibility expressed as inter-laboratory study. The developed method was simple to use, suitable and applicable to various kinds of polymers.

Diagnosis of $BCl_3$ and $BCl_3$/Ar Plasmas with an Optical Emission Spectroscopy during High Density Planar Inductively Coupled Dry Etching (평판형 고밀도 유도결합 건식 식각시 Optical Emission Spectroscopy를 이용한 $BCl_3$$BCl_3$/Ar 플라즈마의 분석)

  • Cho, Guan-Sik;Wantae Lim;Inkyoo Baek;Seungryul Yoo;Park, Hojin;Lee, Jewon;Kuksan Cho;S. J. Pearton
    • Proceedings of the Materials Research Society of Korea Conference
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    • pp.88-88
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    • 2003
  • Optical Emission Spectroscopy(OES) is a very important technology for real-time monitoring of plasma in a reactor during dry etching process. OES technology is non-invasive to the plasma process. It can be used to collect information on excitation and recombination between electrons and ions in the plasma. It also helps easily diagnose plasma intensity and monitor end-point during plasma etch processing. We studied high density planar inductively coupled BCl$_3$ and BCl$_3$/Ar plasma with an OES as a function of processing pressure, RIE chuck power, ICP source power and gas composition. The scan range of wavelength used was from 400 nm to 1000 nm. It was found that OES peak Intensity was a strong function of ICP source power and processing pressure, while it was almost independent on RIE chuck power in BCl$_3$-based planar ICP processes. It was also worthwhile to note that increase of processing pressure reduced negatively self-induced dc bias. The case was reverse for RIE chuck power. ICP power and gas composition hardly had influence on do bias. We will report OES results of high density planar inductively coupled BCl$_3$ and BCl$_3$/Ar Plasma in detail in this presentation.

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Properties of the Pt Thin Etching in $BCI_3/CI_2$gas by Inductive Coupled Plasma (ICP에 의한 $BCI_3/CI_2$플라즈마 내에서 Pt 박막의 식각 특성)

  • 김창일;권광후
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.11 no.10
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    • pp.804-808
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    • 1998
  • The inductively coupled plasma(ICP) etching of platinum with BCl$_3$/Cl$_2$ gas chemistry has been studied. X-ray photoelectron spectroscopy (XPS) was used to investigate the chemical binding states of the etched surface. The plasma characteristics was extracted from optical emission spectroscopy (OES) and a single Langmuir probe. In this case of Pt etching using BCl$_3$/Cl$_2$ gas chemistries, the result of OES and Langmuir probe showed the increase of Cl radicals and ion current densities in the plasmas with increasing Cl$_2$ gas ratio. At the same time, XPS results indicated that the intensities of Pt 4f decreased with increasing Cl$_2$ gas ratio. The decrease of Pt 4f intensities implies the increase of residue layer thickness on the etched Pt surface.

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Analytical Method of Silicon Dioxide in Health Functional Food Products using ICP-OES

  • Ka, Mi-Hyun;Lee, Kwang-Geun;Lim, Heung-Youl;Lee, Gunyoung;Yun, Sang Soon;Lim, Ho Soo;Kim, Yong-Suk
    • Journal of Food Hygiene and Safety
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    • v.32 no.5
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    • pp.343-347
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    • 2017
  • The analytical method of silicon dioxide ($SiO_2$) in health functional food products was developed employing inductively coupled plasma optical emission spectrometry (ICP-OES) method assisted by acid (hydrofluoric acid and boric acid) digestion in open system without alkali fusion. The limit of detection (LOD) and limit of quantification (LOQ) of this method were found to be 0.07 and 0.20 mg/L, respectively. Linearity ($r^2$) and linear range were 0.99 and 0.20~20.0 mg/L, respectively. The accuracy and precision of $SiO_2$ (0.4, 1.0, and 2.0%, w/w) in spiked glucosamine exhibited to be the range of 90.22~94.14% and 0.72~1.67%, respectively. The contents of $SiO_2$ in 11 health functional food products were detected in range of 0.02~1.80% (w/w). Every sample showed below content of the permitted use level (2%, w/w) of $SiO_2$. Therefore ICP-OES method with acid can analyze the content of $SiO_2$ in health functional food products easily and rapidly. Consequently, the application of specification analysis of $SiO_2$ in health functional food products could be a significant work.

The Patterning of Polyimide Thin Films for the Additive $CF_4$ gas ($CF_4$ 첨가에 따른 po1yimide 박막의 패터닝 연구)

  • 강필승;김창일;김상기
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • pp.209-212
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    • 2001
  • Polyimide(PI) films have been considered as the interlayer dielectric materials due to low dielectric constant, low water absorption, high gap-fill and planarization capability. The PI film was etched with using inductively coupled plasma (ICP). The etching characteristics such as etch rate and selectivity were evaluated to gas mixing ratio. High etch rate was 8300$\AA$/min and vertical profile was approximately acquired 90$^{\circ}$ at CF$_4$/(CF$_4$+O$_2$) of 0.2. The selectivies of polyimide to PR and SiO$_2$ were 1.2, 5.9, respectively. The etching profiles of PI films with an aluminum pattern were measured by a scanning electron microscope (SEM). The chemical states on the PI film surface were investigated by x-ray photoelectron spectroscopy (XPS). Radical densities of oxygen and fluorine in different gas mixing ratio of 07CF4 were investigated by optical emission spectrometer (OES).

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Characteristics and Analysis of Natural Pine-Needles Extract (천연 솔잎추출물의 특성 및 분석)

  • Sung, Ki-Chun
    • Journal of the Korean Applied Science and Technology
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    • v.21 no.4
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    • pp.320-326
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    • 2004
  • We have extracted the natural pine-needles to use ethanol in solvent, and could obtain the refined oil component from pine-needles extract. We have tested the antimicrobial effect from microbe experiment and analyzed with ICP/OES, GC/MS. we could obtain the next conclusion from the result of this experiment. In the first result of this experiment we could know that in case of increasing concentration of pine-needles, the number of microbe decreased more and more. Also we could know that the refined oil component of pine-needles appeared the sterilization effect of S-aureus and E-coli after 96hrs and 120hrs. So we could know that the refined oil component of appeared effect to microbe. In the second result of this experiment we could know that inorganic materials of Ca, Mg, V, Mn etcs from pine-needles detected to ICP/OES analysis and the aromatic compounds from refined oil component of pine-needles was certificated to GC/MS analysis.

Characterization of Fly Ash by Field-Flow Fractionation Combined with SPLITT Fractionation and Compositional Analysis by ICP-OES

  • Kang, Dong Young;Eum, Chul Hun;Lee, Seungho
    • Bulletin of the Korean Chemical Society
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    • v.35 no.1
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    • pp.69-75
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    • 2014
  • Accurate analysis of fly ash particles is not trivial because of complex nature in physical and chemical properties. SPLITT fractionation (SF) was employed to fractionate the fly ash particles into subpopulations in large quantities. Then the SF-fractions were analyzed by the steric mode of sedimentation field-flow fractionation (Sd/StFFF) for size analysis. The SF-fractions were also analyzed by ICP-OES. The results showed that the fly ash is mainly composed of Fe, Ca, Mg and Mn. No particular trends were observed between the particle size and the concentrations of Fe, Ca, Mg, while Mn, Cu and Zn were in higher concentrations in smaller particles. Sample preparation procedures were established, where the fly ash particles were sieved to remove large contaminants, and then washed with acetone to remove organics on the surface of particles. The sample preparation and analysis methods developed in this study could be applied to other environmental particles.

Effect of Pretreatment on the Dissolution of Aluminum Alloy during Hydration Process (수화과정에서 전처리가 알루미늄 합금의 용출에 미치는 효과)

  • Lee, Byoung-Gu;Lee, Hoyeon;Tak, Yongsug
    • Corrosion Science and Technology
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    • v.12 no.5
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    • pp.215-219
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    • 2013
  • Aluminum alloy(3003) can be dissolved during hydration process with hot tap water. In order to increase the stability of aluminum alloy, it was pretreated with anodization and phosphoric acid before hydration process. The effect of pretreatment on the surface property changes was analyzed with X-ray Photoelectron Spectroscopy (XPS) and Inductively Coupled Plasma-Optical Emission Spectrometer (ICP-OES) and their results supported that the increase of hydroxyl group (-OH) on the surface formed during anodization and phosphorous acid treatment prevented the dissolution of aluminum alloy during hydration process at high temperature.

Sonication in the Analysis of Hexavalent Chromium in Welding Fume (초음파 전처리에 의한 용접 흄 중 6가 크롬의 분석)

  • Yoon, Chung-Sik;Paik, Nam-Won;Kim, Jeong-Han;Park, Dong-Uk;Choi, Sang-Jun;Kim, Shin-Bum;Chae, Hyun-Byung
    • Analytical Science and Technology
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    • v.12 no.5
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    • pp.447-459
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    • 1999
  • A study was conducted to compare three analytical methods for determination of hexavalent chromium in the welding fume. Precision and accuracy arc documented for colorimetric, ion chromatographic, and inductively coupled plasma-optical emission spectroscopic method. Evidence is presented that welding fume can affect the oxidation of trivalent chromium. A simple sonication extraction method, proposed in this study, instead of hot alkaline extraction has the advantage of minimizing the potential for chromium oxidation.

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Evaluation of Accuracy and Precision of Analysis of Metals with Polyvinyl Chloride Membrane Filters (PVC 여과지를 이용한 금속 분석방법에 대한 정확도와 정밀도 평가)

  • Byun, Seong-Uk;Choi, Sangjun
    • Journal of Korean Society of Occupational and Environmental Hygiene
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    • v.26 no.1
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    • pp.48-57
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    • 2016
  • Objectives: This study was conducted to evaluate the accuracy and precision of airborne metal analysis using polyvinyl chloride(PVC) membrane filter by pretreatment methods. Methods: A total of 75 spiked PVC samples for Cr, Fe and Mn ranged from 6 ug/sample to 40 ug/sample were used to evaluate recovery rates for three pretreatment methods: acid extraction, hot plate ashing and microwave digestion. For Mn, an additional 75 spiked mixed cellulose ester(MCE) membrane filters were analysed to compare the recovery rates of PVC samples. All samples were analysed with an inductively coupled plasma optical emission spectrometer(ICP-OES) and manganese samples were additionally analyzed by atomic absorption spectrometer(AAS). Results: The overall mean recovery rates of PVC samples for Cr, Fe and Mn were 90% or higher regardless of pretreatment methods, but there were statistically significant differences in recovery rates for Cr(p<0.05) and Mn(p<0.01) samples by pretreatment methods. The biases and the coefficient variations of PVC samples for three metals pretreated with three kinds of pretreatment methods ranged from 1.7% to 4.7% and from 1.6% to 6.5%, respectively. The manganese PVC samples pretreated by microwave digestion and analyzed with ICP-OES had the lowest bias at 1.9% and also showed lower bias than the bias for MCE samples, 2.7%. Conclusions: In order to accurately analyze the metals sampled with PVC membrane filters, microwave digestion and ICP-OES can be recommended.