• Title/Summary/Keyword: Micro Fabrication

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The Study of Micro Fabrication using Picosecond Laser Ablation (피코초 레이저 어블레이션을 이용한 미세 가공 연구)

  • Noh, Ji-Whan;Sohn, Hyon-Kee;Suh, Jeong;Lee, Jae-Hoon
    • Journal of the Korean Society for Precision Engineering
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    • v.27 no.2
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    • pp.25-28
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    • 2010
  • The micro fabrication on the mold material using picosecond laser ablation processing has been studied. We used the two kind of system with picosecond laser. First one is two mirror type scanner and telecentric f-theta lens. Second one is X-Y stage and objective lens. By using these system, the $100{\mu}m$ size chess patterning and $2{\mu}m$ size patterning was fabricated. Especially $2{\mu}m$ size patterning on the mold material can be used as the decorative rainbow color logo for industrial field. In this paper, it is proved the picosecond laser is effective tool for the laser ablation processing.

Web Service based Micro Fabrication System (웹 서비스 기반 마이크로 가공 시스템)

  • 김형중;안성훈
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • pp.170-173
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    • 2004
  • In this paper a web-based micro fabrication system is discussed. A commercial CAD and a web browser were used as its user interfaces. For the user interfaces, the concepts of Design for Manufacturing (DFM) were implemented providing the fabrication knowledge of micro machining to the designers. Simple databases were constructed to store the fabrication knowledge of materials, tools, and micro machining know-how. The part geometry was uploaded to the web server of this system as an STL (Stereo Lithography) format with process parameters for 3-axis micro milling. A Slice-based process planner automatically provides NC codes for controlling micro stages. A couple of micro parts were fabricated using the system with micro endmills. This design and manufacturing system enables network users to obtain micro-scale prototypes in a rapid manner.

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Web-based Design and Manufacturing System for Micro Fabrication (마이크로 가공을 위한 웹 기반 설계 가공 시스템)

  • Ahn, Sung-Hoon;Kim, Hyung-Jung
    • Proceedings of the KSME Conference
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    • pp.904-909
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    • 2004
  • In this paper a web-based micro fabrication system is discussed. A commercial CAD and a web browser were used as its user interfaces. In these user interfaces the concepts of Design for Manufacturing (DFM) was implemented providing the fabrication knowledge of micro machining to the designers. Simple databases were constructed to store the fabrication knowledge of materials, tools, and micro machining know-how. The part geometry was uploaded to the web server of this system as an STL (Stereo Lithography) format with process parameters for 3-axis micro milling. A Slice-based process planner automatically provides NC codes for controlling micro stages. A couple of micro parts were fabricated using the system with micro endmills. This design and manufacturing system enables network users to obtain micro-scale prototypes in a rapid manner.

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Fabrication ofMicro/Nano-patterns using MC-SPL (Mechano-Chemical Scanning Probe Lithography) Process (미세탐침기반 기계-화학적 리소그래피공정에 의한 마이크로/나노패턴 제작)

  • 성인하;김대은
    • Journal of the Korean Society for Precision Engineering
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    • v.19 no.11
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    • pp.228-233
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    • 2002
  • In this work, a new non-photolithographic micro-fabrication technique is presented. The motivation of this work is to overcome the demerits of the most commonly used photolithographic techniques. The micro-fabrication technique presented in this work is a two-step process which consists of mechanical scribing followed by chemical etching. This method has many advantages over other micro-fabrication techniques since it is simple, cost-effective, rapid, and flexible. Also, the technique can be used to obtain a metal structure which has sub-micrometer width patterns. In this paper, the concept of this method and its application to microsystem technology are described.

Non-lithographic Micro-structure Fabrication Technology and Its Application (Non-lithography 방법에 의한 마이크로 구조물 제작 및 응용)

  • 성인하;김진산;김대은
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • pp.956-959
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    • 2002
  • In this work, a new non-lithographic micro-fabrication technique is presented. The motivation of this work is to overcome the demerits of the most commonly used photo-lithographic techniques. The micro-fabrication technique presented in this work is a two-step process which consists of mechanical scribing followed by chemical etching. This method has many advantages over other micro-fabrication techniques since it is simple, cost-effective, rapid, and flexible. Also, the technique can be used to obtain a metal structure which has sub-micrometer width patterns. In this paper, the concept of this method and its application to microsystem technology are described.

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Development of Machining Technology for Micro Dies and Molds (미세금형제작을 위한 가공기술개발)

  • 이응숙;신영재;강재훈;제태진;이재경;이현용;이상조;최헌종;주종남
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • pp.1047-1050
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    • 2000
  • As the progress of new industrial products or parts technology, the precise and fine machining technologies are needed more and more. Micro fabrication technology of these products are usally consisted of mechanical machining or MEMS technology. Direct machining by mechanical method is not applicable to mass production. MEMS technology also has several problems such as low mechanical strength, bad surface roughness and difficulty of 3 dimensional machining. In this study, we introduce several micro fabrication technology to make micro molds and dies and our project to develop these machining technology.

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Fabrication of Micro/Nano-patterns using MC-SPL(Mechano-Chemical Scanning Probe Lithography) Process

  • Sung, In-Ha;Kim, Dae-Eun
    • International Journal of Precision Engineering and Manufacturing
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    • v.4 no.5
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    • pp.22-26
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    • 2003
  • In this work, a new non-photolithographic micro-fabrication technique is presented. The motivation of this work is to overcome the demerits of the most commonly used photolithographic techniques. The micro-fabrication technique presented in this work is a two-step process which consists of mechanical scribing followed by chemical etching. This method has many advantages over other micro-fabrication techniques since it is simple, cost-effective, rapid, and flexible. Also, the technique can be used to obtain a metal structure which has sub-micrometer width patterns. In this paper, the concept of this method and its application to microsystem technology are described.

A Study on Effect of Spray Characteristics on Etching Characteristics in Micro Fabrication System (미세 가공 시스템에서 분무특성이 에칭특성에 미치는 영향에 관한 연구)

  • Jung, Ji-Won;Kim, Duck-Jool
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.28 no.1
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    • pp.109-117
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    • 2004
  • The objective of this study is to investigate the effect of the spray characteristics on the etching characteristics for the optimization of etching process in the micro fabrication industry. The etching characteristics such as etching rate and etching factor were investigated under different etching conditions. To compare with the etching characteristic, the spray characteristics such as droplet size and velocity were measured by PDA system. The etching rate was increased in case of high spray pressure and in the region of spray center. The etching factor was increased with decrease in the distance from nozzle tip and increase in the etchant temperature. It was found that the spray characteristics were correlated with the etching characteristics.

Experimental Study on Spray Etching Process In Micro Fabrication of Lead Frame

  • Jung, Ji-Won;Choi, Gyung-Min;Kim, Duck-Jool
    • Journal of Mechanical Science and Technology
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    • v.18 no.12
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    • pp.2294-2302
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    • 2004
  • The objective of this study is to obtain detailed information for the micro fabrication of lead frames by applying spray technology to wet etching process. Wet etching experiments were performed with different etching parameters such as injection pressure, distance from nozzle tip to etched substrate, nozzle pitch and etchant temperature. The characteristics of single and twin spray were measured to investigate the correlation between the spray characteristics and the etching characteristics. Drop size and velocity were measured by Phase-Doppler Anemometer (PDA). Four liquids of different viscosity were used to reveal the effects of viscosity on the spray characteristics. The results indicated that the shorter the distance from nozzle tip and the nozzle pitch, the larger etching factor became. The average etching factor had good positive correlation with average axial velocity and impact force. It was found that the etching characteristics depended strongly on the spray characteristics.