• Title, Summary, Keyword: Micro Fabrication

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Web Service based Micro Fabrication System (웹 서비스 기반 마이크로 가공 시스템)

  • 김형중;안성훈
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • pp.170-173
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    • 2004
  • In this paper a web-based micro fabrication system is discussed. A commercial CAD and a web browser were used as its user interfaces. For the user interfaces, the concepts of Design for Manufacturing (DFM) were implemented providing the fabrication knowledge of micro machining to the designers. Simple databases were constructed to store the fabrication knowledge of materials, tools, and micro machining know-how. The part geometry was uploaded to the web server of this system as an STL (Stereo Lithography) format with process parameters for 3-axis micro milling. A Slice-based process planner automatically provides NC codes for controlling micro stages. A couple of micro parts were fabricated using the system with micro endmills. This design and manufacturing system enables network users to obtain micro-scale prototypes in a rapid manner.

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Web-based Design and Manufacturing System for Micro Fabrication (마이크로 가공을 위한 웹 기반 설계 가공 시스템)

  • Ahn, Sung-Hoon;Kim, Hyung-Jung
    • Proceedings of the KSME Conference
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    • pp.904-909
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    • 2004
  • In this paper a web-based micro fabrication system is discussed. A commercial CAD and a web browser were used as its user interfaces. In these user interfaces the concepts of Design for Manufacturing (DFM) was implemented providing the fabrication knowledge of micro machining to the designers. Simple databases were constructed to store the fabrication knowledge of materials, tools, and micro machining know-how. The part geometry was uploaded to the web server of this system as an STL (Stereo Lithography) format with process parameters for 3-axis micro milling. A Slice-based process planner automatically provides NC codes for controlling micro stages. A couple of micro parts were fabricated using the system with micro endmills. This design and manufacturing system enables network users to obtain micro-scale prototypes in a rapid manner.

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The Micro Lens Mold Processing in Mechanical Fabrication Method (기계적인 가공방법에 의한 마이크로 렌즈 금형가공)

  • 정재엽;이동주;제태진;최두선;이응숙;홍성민
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • pp.1885-1888
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    • 2003
  • As high technology industries such as IT and display have developed, demand for application parts of micro lens and lens array has been extremely increasing. According to these trends, many researchers are studying on the fabrication technology for parts of the micro lens by a variety of methods such as MEMS, Lithography, LIGA and so on. In this paper, we have performed researches related to ultra precision micro lens, lens array mold and fabrication of Lenticular lens mold for three-dimensional display by using mechanical micro end-milling and fly-cutting fabrication method. Tools used in this research were a diamond tool of R 150$\mu\textrm{m}$. Cutting conditions set up feed rate, spindle revolution. depth of cut and dwell time as variables. And we analyzed surface quality variation of the processed products according to the cutting conditions, and then carried out experiments to search the optimum conditions. Through this research, we have confirmed that we can fabricate the ultra precision micro lens mold with surface roughness Ra=20nm and the holographic lens mold by using micro end-milling and fly-cutting fabrication method. Furthermore, we demonstrated problems happened in the fabrication of the micro lens and established the foundation of experimental study for formulating its improvement plan.

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Development of Rapid Mask Fabrication Technology for Micro-abrasive Jet Machining (미세입자 분사가공을 위한 쾌속 마스크 제작기술의 개발)

  • Lee, Seung-Pyo;Ko, Tae-Jo;Kang, Hyun-Wook;Cho, Dong-Woo;Lee, In-Hwan
    • Journal of the Korean Society for Precision Engineering
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    • v.25 no.1
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    • pp.138-144
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    • 2008
  • Micro-machining of a brittle material such as glass, silicon, etc., is important in micro fabrication. Particularly, micro-abrasive jet machining (${\mu}-AJM$) has become a useful technique for micro-machining of such materials. The ${\mu}-AJM$ process is mainly based on the erosion of a mask which protects brittle substrate against high velocity of micro-particle. Therefore, fabrication of an adequate mask is very important. Generally, for the fabrication of a mask in the ${\mu}-AJM$ process, a photomask based on the semi-conductor fabrication process was used. In this research a rapid mask fabrication technology has been developed for the ${\mu}-AJM$. By scanning the focused UV laser beam, a micro-mask pattern was fabricated directly without photolithography process and photomask. Two kinds of mask patterns were fabricated using SU-8 and photopolymer (Watershed 11110). Using fabricated mask patterns, abrasive-jet machining of Si wafer were conducted successfully.

Micro-electrode machining characteristics using the Micro-EDM (마이크로 방전가공기를 이용한 미세전극 가공특성)

  • 안현민;김영태;박성준;이상조
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • pp.1003-1007
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    • 2002
  • Micro-EDM is generally used far machining micro 3-D structure. For micro-EDM, first of all, micro-electrode fabrication is needed and WEDG system is proposed for tool electrode fabrication method. When tool electrode is fabricated using WEDG system, its characteristics are under the control of many EDM parameters. Also relations between the parameters affect electrode fabrication. In this study, experiments are carried out to analyze effects of EDM parameters on micro-electrode fabrication. Experimental method and analysis are used to experimental design method. Factors used in experiments are composed of applied voltage, capacitance, wire feed rate, spindle rotating speed, machining time. As a result of experiments, wire feed rate, machining time and capacitance is proportional to gap distance(material removal), the other parameters(applied voltage, spindle rotating speed) and relations between the parameters have little influence on machining.

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Development of Micro Injection Molding Machine for Micro Parts (미소부품용 미세사출성형기 시작품 개발)

  • 제태진;신보성;최두선;이응숙;김영민;강신일
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • pp.337-341
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    • 2002
  • In these day, micro systems have gained attention with development of advance technologies. Researches about the fabrication of micro parts are actively made in the whole world. Among the researches, technology for micro injection molding machine is one of the key issues for fabrication of micro parts. In this study, we developed a micro injection molding machine for micro parts. To achieve this, injection unit was constructed using a screw with diameter of 12 mm. Clamping unit with clamping force of 1.75 kgf/$\textrm{cm}^2$ was constructed. Also verification test fur fabrication of micro parts was performed. It was performed that the micro injection molding machine can fabricate micro parts based on the result.

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A Study on the Mechanical Micro Machining System set-up and Applications (기계적 미세 가공 시스템 구성 및 응용 연구)

  • 제태진;이응숙;최두선;이선우
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • pp.934-937
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    • 2001
  • It is well-known that the micro fabrication technology of micro parts are the high energy beam or silicon-based micro machining method such as LIGA Process, Laser machining, photolithography and etching technology. But, for fabricating complex 3-D structure it is better to use mechanical machining. This machining method by the mechanical machine tool with nanometer accuracy is getting attention in some field-especially micro optics machining such as grating, holographic lens, micro lens array, fresnel lens, encoder disk etc.. In this study, we survey the micro fabrication by mechanical cutting method and set up the mechanical micro machining system. And we carried out micro cutting experiments for micro parts with v-shape groove.

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Experimental study on the surface integrity of electrode for WEDG process (WEDG 전극가공에서의 전극표면형상의 실험적 고찰)

  • 안현민;김영태;박성준;이송규;이상조
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • pp.218-222
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    • 2002
  • Micro-EDM is generally used far machining micro holes, pockets, and 3-D structures. For micro-EDM, first of all, micro-electrode fabrication is needed and WEDC system is proposed for tool electrode fabrication method. When tool electrode is fabricated using WEDG system, its characteristics are under the control of many EDM parameters. Also relations between the parameters affect electrode fabrication. In this study, experiments are carried out to analyze effects of EDM parameters about electrode surface integrity on micro-electrode fabrication. Experimental method and analysis are used to experimental design method. Factors used in experiments are composed of capacitance, resistance, pause time, wire feed rate, spindle rotating speed. As a result of experiments, capacitance and resistance affect electrode surface.

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New Fabrication method of Planar Micro Gas Sesnor Array (집적도를 높인 평면형 가스감지소자 어레이 제작기술)

  • 정완영
    • Proceedings of the IEEK Conference
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    • pp.727-730
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    • 2003
  • Thin tin oxide film with nano-size particle was prepared on silicon substrate by hydrothermal synthetic method and successive sol-gel spin coating method. The fabrication method of tin oxide film with ultrafine nano-size crystalline structure was tried to be applied to fabrication of micro gas sensor array on silicon substrate. The tin oxide film on silicon substrate was well patterned by chemical etching upto 5${\mu}{\textrm}{m}$width and showed very uniform flatness. The tin oxide film preparation method and patterning method were successfully applied to newly proposed 2-dimensional micro sensor fabrication.

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The fabrication of micro mass flow sensor by Micro-machining Technology (Micromachining 기술을 이용한 micro mass flow sensor의 제작)

  • Eoh, Soo-Hae;Choi, Se-Gon
    • Proceedings of the KIEE Conference
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    • pp.481-485
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    • 1987
  • The fabrication of a micro mass flow sensor on a silicon chip by means of micro-machining technology is described on this paper. The operation of micro mass flow sensor is based on the heat transfer from a heated chip to a fluid. The temperature differences on the chip is a measure for the flow velocity in a plane parallel with the chip surface. An anisotropic etching technigue was used for the formation of the V-type groove in this fabrication. The micro mass flow sensor is made up of two main parts ; A thin glass plate embodying the connecting parts and mass flow sensor parts in silicon chip. This sensor have a very small size and a neglible dead space. Micro mass flow sensor can fabricate on silicon chip by micro machining technology too.

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