• Title, Summary, Keyword: Micro Fabrication

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Development of 3D Micro-Nano Hybrid Patterns Using Anodized Aluminum and Micro-Indentation (양극산화된 알루미늄과 마이크로 인덴데이션을 이용한 3차원 마이크로-나노 하이브리드 패턴 제작)

  • Kwon, Jong-Tae;Shin, Hong-Gue;Kim, Byeong-Hee;Seo, Young-Ho
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.31 no.12
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    • pp.1139-1143
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    • 2007
  • A simple method for the fabrication of 3D micro-nano hybrid patterns was presented. In conventional fabrication methods of the micro-nano hybrid patterns, micro-patterns were firstly fabricated and then nano-patterns were formatted on the micro-patterns. Moreover, these micro-nano hybrid patterns could be fabricated on the flat substrate. In this paper, we suggested the fabrication method of 3D micro-nano hybrid patterns using micro-indentation on the anodized aluminum substrate. Since diameter of the hemispherical nano-pattern can be controlled by electrolyte and applied voltage in the anodizing process, we can easily fabricated nano-patterns of diameter of loom to 300nm. Nano-patterns were firstly formatted on the aluminum substrate, and then micro-patterns were fabricated by deforming the nano-patterned aluminum substrate. Hemispherical nano-patterns of diameter of 150nm were fabricated by anodizing process, and then micro-pyramid patterns of the side-length of $50{\mu}m$ were formatted on the nano-patterns using micro-indentation. Finally we successfully replicated 3D micro-nano hybrid patterns by hot-embossing process. 3D micro-nano hybrid patterns can be applied to nano-photonic device and nano-biochip application.

Fabrication and feasibility estimation of Micro Engine Component (미세 엔진 운용성 검증 및 요소 기술 개발)

  • Lee, Dae-Hoon;Park, Dae-Eun;Choi, Kwon-Hyoung;Yoon, Joon-Bo;Kwon, Se-Jin;Yoon, Eui-Sik
    • Proceedings of the KSME Conference
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    • pp.31-36
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    • 2001
  • As a part of micro engine development feasibility estimation was done through fabrication and test of down scaled combustor and MEMS fabricated spark electrode. In an experimental observation of the down scaled combustion phenomena where flame propagation was observed by optical method and pressure change in combustor which gives the information about the reaction generated thermal energy was recorded and analyzed. Optimal combustor scale was derived to be about 2mm considering increased heat loss effect and thermal energy generation capability. Through the fabrication and discharge test of MEMS electrode effects of electrode width and gap was investigated. Electrode was fabricated by thick PR mold and electroplating. From the result discharge voltage characteristic in sub millimeter scale electrode having thickness of $40{\mu}m$ was obtained. From the result base technology for design and fabrication of micro engine was obtained.

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Development of Machining Technology for Micro Dies and Molds (미세금형제작을 위한 가공기술개발)

  • 이응숙;신영재;강재훈;제태진;이재경;이현용;이상조;최헌종;주종남
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • pp.1047-1050
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    • 2000
  • As the progress of new industrial products or parts technology, the precise and fine machining technologies are needed more and more. Micro fabrication technology of these products are usally consisted of mechanical machining or MEMS technology. Direct machining by mechanical method is not applicable to mass production. MEMS technology also has several problems such as low mechanical strength, bad surface roughness and difficulty of 3 dimensional machining. In this study, we introduce several micro fabrication technology to make micro molds and dies and our project to develop these machining technology.

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Ion Beam Induced Micro/Nano Fabrication: Shape Fabrication (이온빔을 이용한 마이크로/나노 가공: 형상가공)

  • Kim, Heung-Bae;Hobler, Gerhard
    • Journal of the Korean Society for Precision Engineering
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    • v.24 no.10
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    • pp.109-116
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    • 2007
  • Focused ion beams are a potential tool for micro/nano structure fabrication while several problems still have to be overcome. Redeposition of sputtered atoms limits the accurate fabrication of micro/nano structures. The challenge lies in accurately controlling the focused ion beam to fabricate various arbitrary curved shapes. In this paper a basic approach for the focused ion beam induced direct fabricate of fundamental features is presented. This approach is based on the topography simulation which naturally considers the redeposition of sputtered atoms and sputtered yield changes. Fundamental features such as trapezoidal, circular and triangular were fabricated with this approach using single or multiple pass box milling. The beam diameter(FWHM) and maximum current density are 68 nm and $0.8 A/cm^2$, respectively. The experimental investigations show that the fabricated shape is well suited for the pre-designed fundamental features. The characteristics of ion beam induced direct fabrication and shape formation will be discussed.

Design, Fabrication, and Performance Evaluation of a Sensorized Superelastic Alloy Microrobot Gripper (센서화된 초탄성 마이크로그리퍼의 설계, 제작 및 성능평가)

  • Kim, Deok-Ho;Kim, Byung-Kyu;Kang, Hyun-Jae;Kim, Sang-Min
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.27 no.10
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    • pp.1772-1777
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    • 2003
  • This paper presents the design, fabrication, and calibration of a piezoelectric polymer-based sensorized microgripper. Electro discharge machining technology is employed to fabricate super-elastic alloy based micro gripper. It is tested to present improvement of mechanical performance. For integration of force sensor on the micro gripper, the sensor design based on the piezoelectric polymer PVDF film and fabrication process are presented. The calibration and performance test of force sensor integrated micro gripper are experimentally carried out. The force sensor integrated micro gripper is applied to perform fme alignment tasks of micro opto-electrical components. It successfully supplies force feedback to the operator through the haptic device and plays a main role in preventing damage of assembly parts by adjusting the teaching command.

Fabrication of micro lens array using micro-compression molding (미세압축성형을 통한 플라스틱 미세렌즈의 성형)

  • Moon, Su-Dong;Kang, Shin-Il;Yee, Young-Joo;Bu, Jong-Uk
    • Proceedings of the KSME Conference
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    • pp.743-746
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    • 2000
  • Plastic microlenses play an important role in reducing the size, weight, and the cost of the systems in the fields of optical data storage and optical communication. In the present study, plastic microlens arrays were fabricated using micro-compression molding process. The design and fabrication procedures for mold insert were simplified by using silicon instead of metal. A simple but effective micro compression molding process, which uses polymer powder, were developed for microlens fabrication. The governing process parameters were temperature and pressure histories and the micromolding process was controlled such that the various defects developing during molding process were minimized. The radius and magnification ratio of the fabricated microlens were $125{\mu}m$ and over 3.0, respectively.

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Fabrication of Micro Lens Array Using Micro-Compression Molding (미세압축성형을 통한 플라스틱 미세렌즈의 성형)

  • Gang, Sin-Il;Mun, Su-Dong;Lee, Yeong-Ju;Bu, Jong-Uk
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.25 no.8
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    • pp.1242-1245
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    • 2001
  • Plastic microlenses play an important role in reducing the size, weight, and the cost of the systems in the fields of optical data storage and optical communication. In the present study, plastic microlens arrays were fabricated using micro-compression molding process. The design and fabrication procedures for mold insert were simplified by using silicon instead of metal. A simple but effective micro compression molding process, which uses polymer powder, were developed for microlens fabrication. The governing process parameters were temperature and pressure histories and the micromolding process was controlled such that the various defects developing during molding process were minimized. The radius and magnification ratio of the fabricated microlens were 125$\mu\textrm{m}$ and over 3.0, respectively.

Rapid Fabrication of Micro Lens Array by 355nm UV Laser Irradiation (355nm UV 레이저를 이용한 마이크로 렌즈 어레이 쾌속 제작)

  • Je, Soon-Kyu;Park, Kang-Su;Oh, Jae-Yong;Kim, Kwang-Ryul;Park, Sang-Hoo;Go, Cheong-Sang;Shin, Bo-Sung
    • Journal of Korean Society of Laser Processing
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    • v.11 no.2
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    • pp.26-32
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    • 2008
  • Micro lens array (MLA) is widely used in information technology (IT) industry fields, for examples such as a projection display, an optical power regulator, a micro mass spectrometer and for medical appliances. Recently, MLA have been fabricated and developed by using a reflow method, micro etching, electroplating, micromachining and laser local heating. Laser local thermal-expansion (LLTE) technology demonstrates the formation of microdots on the surface of polymer substrate, in this paper. We have also investigated the new direct fabrication method of placing the MLA on the surface of a SU-8 photoresist layer. We have obtained the 3D shape of the micro lens processed by UV laser irradiation and have experimentally verified the optimal process conditions.

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Novel Fabrication Process of Vertical Spring for Micro Mirror

  • Lim, Tae-Sun;Shin, jong-Woo;Kim, Yong-Kweon;Park, Bumkyoo
    • Journal of Electrical Engineering and information Science
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    • v.3 no.2
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    • pp.245-250
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    • 1998
  • Novel fabrication process of vertical spring for micro mirror array is proposed. The proposed fabrication process adopts a shadow evaporation process using shielding screen structure on top of the sacrificial layer. The 50${\times}$50 micro mirror arrays are fabricated using the proposed process and ceramic packaged. The static and dynamic characteristics of mirror are measured. The mirror plate touches substrate at 16V and the response time of about 16.8 ${\mu}\textrm{s}$. The resonant frequency of mirror is 16kHz. The spring thickness is calculated from static characteristic to be 1075${\AA}$.

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A Study on the Micro Tool Fabrication Technology employing ELID(Electrolytic In-process Dressing) Technique (전해 연속 드레싱을 이용한 마이크로 공구 제작 기술)

  • 최재영;이현우;최헌종;이석우;정해도
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • pp.508-511
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    • 2002
  • With increasing the needs for micro and precision parts, micro machining technology using micro tools has been studied to fabricate a small part with high density such as electronics, optics, communications, and medicine industry more than before. Though these micro tools have developed rapidly, it is difficult to apply them to micro fabrication technologies, because of the inherent manufacturing. In this study, micro tools(wc) to produce micro structures and parts were manufactured by cylindrical grinding machine employing ELID(Electrolytic In-process Dressing) technique and good dimensional accuracy was achieved. Furthermore we researched the characteristics of machining on the micro drilling using micro drills and manufactured micro tools. Finally it is confirmed that manufactured micro tools can be used for micro machining.

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