• Title, Summary, Keyword: Micro Fabrication

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Fabrication of Micro/Nano-patterns using MC-SPL(Mechano-Chemical Scanning Probe Lithography) Process

  • Sung, In-Ha;Kim, Dae-Eun
    • International Journal of Precision Engineering and Manufacturing
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    • v.4 no.5
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    • pp.22-26
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    • 2003
  • In this work, a new non-photolithographic micro-fabrication technique is presented. The motivation of this work is to overcome the demerits of the most commonly used photolithographic techniques. The micro-fabrication technique presented in this work is a two-step process which consists of mechanical scribing followed by chemical etching. This method has many advantages over other micro-fabrication techniques since it is simple, cost-effective, rapid, and flexible. Also, the technique can be used to obtain a metal structure which has sub-micrometer width patterns. In this paper, the concept of this method and its application to microsystem technology are described.

Non-lithographic Micro-structure Fabrication Technology and Its Application (Non-lithography 방법에 의한 마이크로 구조물 제작 및 응용)

  • 성인하;김진산;김대은
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • pp.956-959
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    • 2002
  • In this work, a new non-lithographic micro-fabrication technique is presented. The motivation of this work is to overcome the demerits of the most commonly used photo-lithographic techniques. The micro-fabrication technique presented in this work is a two-step process which consists of mechanical scribing followed by chemical etching. This method has many advantages over other micro-fabrication techniques since it is simple, cost-effective, rapid, and flexible. Also, the technique can be used to obtain a metal structure which has sub-micrometer width patterns. In this paper, the concept of this method and its application to microsystem technology are described.

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Fabrication ofMicro/Nano-patterns using MC-SPL (Mechano-Chemical Scanning Probe Lithography) Process (미세탐침기반 기계-화학적 리소그래피공정에 의한 마이크로/나노패턴 제작)

  • 성인하;김대은
    • Journal of the Korean Society for Precision Engineering
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    • v.19 no.11
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    • pp.228-233
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    • 2002
  • In this work, a new non-photolithographic micro-fabrication technique is presented. The motivation of this work is to overcome the demerits of the most commonly used photolithographic techniques. The micro-fabrication technique presented in this work is a two-step process which consists of mechanical scribing followed by chemical etching. This method has many advantages over other micro-fabrication techniques since it is simple, cost-effective, rapid, and flexible. Also, the technique can be used to obtain a metal structure which has sub-micrometer width patterns. In this paper, the concept of this method and its application to microsystem technology are described.

Fabrication of Three-Dimensional Micro Optical and Fluidic System Using Dual Stage Nanostereolithography Process (이중 스테이지를 이용한 대면적 3차원 광/유체 마이크로 디바이스 제작에 관한 연구)

  • Lim, Tae Woo;Yang, Dong-Yol
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.27 no.10
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    • pp.552-557
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    • 2015
  • The nanostereolithography process using a femtosecond laser has been shown to have strong merits for the direct fabrication of 2D/3D micro structures. In addition, a femtosecond laser provides efficient tools for precise micromachining owing to the advantages of a small and feeble heat effect zone. In this paper, we report an effective fabrication process of 3D micro optical and fluidic devices using nanostereolithography process composed of a dual stage system. Process conditions for additive and subtractive fabrication are examined. The Piezo stage scanning system is used for 3D micro-fabrication in unit area of sub-mm scale, and the motor stage is employed in fabrication on the scale of several mm. The misalignment between the pizeo- and motor- stages is revised through rotational transformation of CAD data in the unit domain. Here, the effectiveness of the proposed process is demonstrated through examples using 3D optical and microfluidic structures.

A Study on the micro-electrochemical phenomenon using point electrode method (점 전극을 이용한 마이크로 전해현상의 고찰)

  • 김봉규;박규열
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • pp.1093-1096
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    • 2001
  • Eletrochemical phenomenon are employed in the manufacturing of micro-electrochemical machining(micro-ECM). The application of controlled electrochemical metal removal in the fabrication of microstructures and microcomponents is refer to as micro-electrochemical machining. In this paper, we introduce a new method named $\ulcorner$point-electrode electro chemical machining method$\lrcorner$ was proposed to establish micro fabrication technology by use of electrochemical machining. And we find effect of the electrochemical phenomenon in several conditions.

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Design and Fabrication of a Micro-Heat Pipe with High-Aspect-Ratio Microchannels (고세장비 미세채널 기반의 마이크로 히트파이프 설계 및 제조)

  • Oh, Kwang-Hwan;Lee, Min-Kyu;Jeong, Sung-Ho
    • Journal of the Korean Society for Precision Engineering
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    • v.23 no.9
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    • pp.164-173
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    • 2006
  • The cooling capacity of a micro-heat pipe is mainly governed by the magnitude of capillary pressure induced in the wick structure. For microchannel wicks, a higher capillary pressure is achievable for narrower and deeper channels. In this study, a metallic micro-heat pipe adopting high-aspect-ratio microchannel wicks is fabricated. Micromachining of high-aspect-ratio microchannels is done using the laser-induced wet etching technique in which a focused laser beam irradiates the workpiece placed in a liquid etchant along a desired channel pattern. Because of the direct writing characteristic of the laser-induced wet etching method, no mask is necessary and the fabrication procedure is relatively simple. Deep microchannels of an aspect ratio close to 10 can be readily fabricated with little heat damage of the workpiece. The laser-induced wet etching process for the fabrication of high-aspect-ratio microchannels in 0.5mm thick stainless steel foil is presented in detail. The shape and size variations of microchannels with respect to the process variables, such as laser power, scanning speed, number of scans, and etchant concentration are closely examined. Also, the fabrication of a flat micro-heat pipe based on the high-aspect-ratio microchannels is demonstrated.

Study on Micro Machining for Micro Shafts using micro endmill (미세 엔드밀에 의한 마이크로 샤프트 가공기술 연구)

  • Je, T.J.;Lee, E.S.;Lee, J.C.;Choi, H.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • pp.181-184
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    • 2002
  • In these day, fabrication technologies for micro parts become more important with the increase of interest on microsystem and developed through the various approaches in the whole world. Among these technologies; micro mechanical machining is one of the most effective methods for the fabrication of micro parts. In this study, we fabricated micro shafts using micro endmill and micromachining system and measured the cutting force at the process. Also, Based on the data, we simulated the deformation of micro shafts due to the cutting force. Through the simulation results, it was verified that the cutting force at the process is enough to cause dimensional error at the micro shafts.

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Development of Virtual Assembly Process for the Fabrication of Micro-fluidic Systems Using Micro-stereolithography Technology (마이크로 광 조형 기술을 이용하여 미세 유체 시스템을 개발하기 위한 가상 조립 공정의 개발)

  • 강현욱;이인환;조동우
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • pp.304-309
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    • 2004
  • As it is difficult to construct a micro-fluidic system composed of micro-mixers, micro-channels and/or micro-chambers in a single process, an assembly process is typically used. The assembling and bonding of micro-parts, however, introduces other problems. In this work, a virtual assembly process was developed that can be used to design various micro-fluidic systems before actual fabrication commences. In the process, the information required for the micro-stereolithography process is generated automatically. Consequently, complex micro-fluidic systems can be fabricated in a single process, thereby avoiding the need for additional assembly or bonding processes. Using the developed process, several examples were fabricated.

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Robust Design in Terms of Minimization of Sensitivity to Uncertainty and Its Application to Design of Micro Gyroscopes (불확실 변수에 대한 구배 최소화를 이용한 강건 최적 설계와 마이크로 자이로스코프에의 응용)

  • Han, Jeong-Sam;Gwak, Byeong-Man
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.26 no.9
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    • pp.1931-1942
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    • 2002
  • In this paper a formulation of robust optimization is presented and illustrated by a design example of vibratory micro gyroscopes in order to reduce the effect of variations due to uncertainties in MEMS fabrication processes. For the vibratory micro gyroscope considered it is important to match the resonance frequencies of the vertical (sensing) and lateral (driving) modes as close as possible to attain a high sensing sensitivity. A deterministic optimization in which the difference of both the sensing and driving natural frequencies is minimized as an objective function results in highly enhanced performance but apt to be very sensitive to fabrication errors. The formulation proposed is to attain robustness of the performance by including the sensitivity of the response with respect to uncertain variables as a term of objective function to be minimized. This formulation is simple and practically applicable since no detail statistical information on fabrication errors is required. The geometric variables, beam width, length and thickness of vibratory micro gyroscopes are adopted as design variables and at the same time considered as uncertain variables because here occur the fabrication errors. A robustness test in terms of a percentage yield by using the Monte Carlo simulation has shown that the robust optimum produces twice more acceptable designs than the deterministic optimum. Improvement of robustness becomes bigger as the amount of fabrication errors is assumed larger. Considering that the magnitude of fabrication errors and uncertainties in a MEMS structure are comparatively large, the present method is illustrated to be a viable approach for a robust MEMS design.

Fabrication and Sensorization of a Superelastic Alloy Microrobot Gripper using Piezoelectric Polymer Sensors (초탄성 마이크로 그리퍼의 제작 및 압전폴리머 센서를 이용한 센서화)

  • 김덕호;김병규;강현재;김상민
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • pp.251-255
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    • 2003
  • This paper presents the design, fabrication, and calibration of a piezoelectric polymer-based sensorized microgripper. Electro discharge machining technology is employed to fabricate super-elastic alloy based micro gripper. It is tested to present improvement of mechanical performance. For integration of force sensor on the micro gripper, the sensor design based on the piezoelectric polymer PVDF film and fabrication process are presented. The calibration and performance test of force sensor integrated micro gripper are experimentally carried out. The force sensor integrated micro gripper is applied to perform fine alignment tasks of micro opto-electrical components. It successfully supplies force feedback to the operator through the haptic device and plays a main role in preventing damage of assembly parts by adjusting the teaching command.

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