• Title, Summary, Keyword: Micro Fabrication

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Micro Power System Development (마이크로 파워 시스템의 개발)

  • Park, Kun-Joons;Jeon, Byung-Sun;Min, Hong-Seok;Song, Seung-Jin;Min, Kyoung-Doug;Joo, Young-Chang
    • 유체기계공업학회:학술대회논문집
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    • pp.381-386
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    • 2001
  • This paper reports on the development of micro power system under way at Seoul National University. The interdisciplinary tin consists of members with various backgrounds of mechanics and materials. The need for micro power systems is explained, and a turbine under development is described. Design, and fabrication are introduced, and technical challenges in each phase are described. Furthermore, the interaction between the available fabrication methods and design is explained. Design involves use of commercially available codes to analyze flow fields, and fabrication takes advantage of the silicon wafer etching processes used to manufacture semiconductor devices.

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Fabrication of Micro-fluidic Channels using a Flexible and Rapid Surface Micro-machining Technique (유연하고 신속한 표면미세가공기술을 이용한 Micro-fluidic Channel 제작)

  • 김진산;성인하;김대은
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.11 no.4
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    • pp.97-101
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    • 2002
  • Recently, the need for transporting and manipulating minute amount of fluids in microscale channels (so-called micro-fluidics) has been increasing, especially in biotechnology and biochemical processing. This work demonstrates that the so-called mechano-chemical process which consists of mechanical abrasive action combined with chemical process can be used to f뮤ricate micro-fluidic channels more rapidly and cost effectively than other methods. In this work, capillary filling of fluids in micro-channels was investigated by theoretical approaches and experiments. From the experimental results, it is expected that a complex micro-fluidic system can be fabricated using the micro-fabrication technique and microsystem packaging method described in this work.

Fabrication of Micro Structure Using Electro Discharge Deposition (Electro Discharge Deposition (EDD)을 이용한 미세 구조물 제작)

  • 오석훈;민병권;박성준;이상조
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • pp.1865-1868
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    • 2003
  • This paper provides a new method for hybrid machining, particularly suited to micro fabrication applications such as micro point, micro line, micro structure, micro partition and so on. Developed micro fabrication process by electrical discharge machining (EDM) and electrical discharge deposition (EDD) with metal powder (Ti, Fe) has been studied to build TiC or FeC structure. Titanium powder or iron powder is supplied from working fluid (kerosene or de-ionized water with powder) and adheres on a workpiece by the heat and electric power caused by the electrical discharge. The use of a tool electrode is expected to keep powder concentration high in the gap between a workpiece and a tool electrode and to accrete powder material on the workpiece. The deposition is tried under various electrical conditions (workpiece. tool electrode, working fluid, discharge current, voltage and powder etc.). On the other hand. using electrical discharge machining (EDM) with the same tool electrode, it can be used as a removal process (cutting) by electro erosion at the same time. Therefore. this new method can do a hybrid machining to build up and down a structure with the workpiece.

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Investigation into direct fabrication of nano-patterns using nano-stereolithography (NSL) process (나노 스테레오리소그래피 공정을 이용한 무(無)마스크 나노 패턴제작에 관한 연구)

  • Park Sang Hu;Lim Tae-Woo;Yang Dong-Yol
    • Journal of the Korean Society for Precision Engineering
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    • v.23 no.3
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    • pp.156-162
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    • 2006
  • Direct fabrication of nano patterns has been studied employing a nano-stereolithography (NSL) process. The needs of nano patterning techniques have been intensively increased for diverse applications for nano/micro-devices; micro-fluidic channels, micro-molds. and other novel micro-objects. For fabrication of high-aspect-ratio (HAR) patterns, a thick spin coating of SU-8 process is generally used in the conventional photolithography, however, additional processes such as pre- and post-baking processes and expansive precise photomasks are inevitably required. In this work, direct fabrication of HAR patterns with a high spatial resolution is tried employing two-photon polymerization in the NSL process. The precision and aspect ratio of patterns can be controlled using process parameters of laser power, exposure time, and numerical aperture of objective lens. It is also feasible to control the aspect ratio of patterns by truncation amounts of patterns, and a layer-by-layer piling up technique is attempted to achieve HAR patterns. Through the fabrication of several patterns using the NSL process, the possibility of effective patterning technique fer various N/MEMS applications has been demonstrated.

Structural Design of the Bed Which Supports Micro Aspherical Lens Fabrication System Using the Design Optimization Technique (최적설계 기법을 이용한 초정밀 비구면 렌즈 가공기 베드의 구조설계)

  • Yi I.L.;Park S.J.;Lee G.B.;Lee S.W.;Yu Y.G.;Kwak B.M.;Baek S.Y.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • pp.851-856
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    • 2005
  • The precision fabrication of aspherical lenses is increasingly required for the latest applications of compact and high resolution video-recording or camera systems. Micro-optical components, including micro-spherical or aspherical lenses and reflecting mirrors, are generally required to be manufactured with high shape accuracy, extremely low surface roughness and no surface damage. To meet the needs of the precision fabrication system, a bed which supports the micro aspherical lens fabrication machines stably and safely is required. In this study, the thickness of the ribs of the bed is optimized using the CAD integrated optimal design system, a virtual DS program.

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The Fabrication of Micro-Heaters with Low-Power Consumption Using SOI and Trench Structures

  • Chung, Gwiy-Sang;Hong, Seok-Woo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • pp.197-201
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    • 2002
  • This paper presents optimized design, fabrication and thermal characteristics of micro-heaters for thermal MEMS (micro electro mechanical system) applications using SOI and trench structures. The micro-heaters are based on a thermal measurement principle and contains thermal isolation regions of 10 ${\mu}m$-thick Si membranes consisting of oxide-filled trenches in the SOI membrane rim. The micro-heaters were fabricated with Pt-RTD on the same substrate via MgO buff layer between Pt thin-film and $SiO_2$ layer. The thermal characteristics of micro-heater with trench-free SOI membrane structure was $280^{\circ}C$ at input power 0.9 W; in the presence of 10 trenches, it was $580^{\circ}C$ due to reduction of the external thermal loss. Therefore, a micro-heater with trenches in SOI membrane rim structure provides a powerful and versatile alternative technology for enhancing the performance of micro-thermal sensors and actuators.

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A Study on the Fabrication Method of Micro-Mold using 2.2inch LGP by the SCS Micro-Lens Pattern (SCS Micro-lens 패턴 적용 휴대폰 도광판 제작용 미세금형 제작에 대한 연구)

  • Oh, J.G.;Kim, J.S.;Yoon, K.H.;Hwang, C.J.
    • Transactions of Materials Processing
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    • v.20 no.1
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    • pp.60-63
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    • 2011
  • BLU(back light unit) is one of kernel parts of LCD(liquid crystal display) unit. New 3-D micro-lens pattern for LGP(light guide plate), one of the most important parts of LCD-BLU, had been researched. Instead of dot pattern made by chemical etching or laser ablation, SCS(slanted curved surface) micro-lens pattern was designed with optical CAE simulation. This study introduce the method of design using optical CAE simulation for SCS micro-lens, the new fabrication method of micro-mold with SCS micro-lens pattern.

Properties of PZT Ultrasonic Transducer Array Fabricated by Micro-Pressing and Dicing method (Micro-Pressing 방법과 Dicing 방법에 의해 제조된 PZT Ultrasonic Transducer Array의 특성)

  • Park, Joon-Shik;Hong, Sung-Jei;Cho, Jin-Woo;Park, Soon-Sup;Han, Jin-Ho
    • Proceedings of the KIEE Conference
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    • pp.2248-2250
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    • 2000
  • We investigated properties of PZT composite for medical ultrasonic transducer array (briefly UTA) for medicine applications fabricated by micro pressing and dicing method. Dicing method was the fabrication process of conventional ultrasonic transducer array by dicing sintered PZT sheet. Micro pressing method was the proposed process using pressing PZT green sheet by PMMA micro mold from LIGA process. Microstructures, electrical and electro -mechanical properties of fabricated UTAs of two cases were analyzed. Thickness mode electro-mechanical coupling coefficient of two cases have same values of 51%. Sintered PZT Microstructures of them showed dense and uniform. Micro pressing method was very mass productive process because of using batch type LIGA process. From results, we found micro pressing method was more competitive than dicing method for UTA fabrication. For further study, uniformity of microstructures and electro-mechanical properties of large scale, and fabrication processes of Ni plating and PMMA molding should be improved and investigated.

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Design and Fabrication of Micro Combustor (III) - Fabrication of Micro Engine by Photosensitive Class - (미세 연소기 개발 (III) - 감광 유리를 이용한 마이크로 엔진의 제작 -)

  • Lee, Dae-Hoon;Park, Dae-Eun;Yoon, Joon-Bo;Yoon, Eui-Sik;Kwon, Se-Jin
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.26 no.12
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    • pp.1639-1645
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    • 2002
  • Micro engine that includes Micro scale combustor is fabricated. Design target was focused on the observation of combustion driven actuation in MEMS scale. Combustor design parameters are somewhat less than the size recommended by feasibility test. The engine structure is fabricated by isotropic etching of the photosensitive glass wafers. Electrode formed by electroplating of the Nickel. Photosensitive glass can be etched isotropically with almost vertical angle. Bonding and assembly of structured photosensitive glass wafer form the engine. Combustor size was determined to be 1 mm scale. Movable piston is engraved inside the wafer. Ignition was done by nickel spark plug which was electroplated with thickness of 40 ${\mu}{\textrm}{m}$. The wafers were bonded by epoxy that resists high temperature. In firing test due to the bonding method and design tolerance pressure buildup by reaction was not confirmed. But ignition, flame propagation and actuation of micro structure from the reaction was observed. From the result basement of design and fabrication technology was obtained.

Fabrication of Piezoelectric Micro Bending Actuators Using Sol-Gel Thick PZT films

  • Park, Joon-Shik;Yang, Seong-Jun;Park, Kwang-Bum;Yoon, Dae-Won;Park, Hyo-Derk;Kang, Sung-Goon;Lee, Nak-Kyu;Na, Kyoung-Hoan
    • Journal of the Semiconductor & Display Technology
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    • v.3 no.3
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    • pp.1-4
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    • 2004
  • Fabrication and electrical and mechanical properties of piezoelectric micro bending actuators (PMBA) using sol-gel-multi-coated thick PZT films and MEMS processes were investigated. PMBA could be used for design and fabrication of micro fluidic devices, for example, micro-pumps, micro dispensers, and so on. PMBA were fabricated using 2 um thick PZT films on Pt (350 nm)/$SiO_2$ (500 nm)/Si ($300\mu\textrm{m}$) substrates and MEMS processes. 7 types of PMBA were fabricated with areas of silicon diaphragms, PZT films and top electrodes. When the sizes of silicon diaphragms, PZT films and Pt top electrodes were reduced from 3000$\times$$1389\mu\textrm{m}$, 4000$\times$$1000\mu\textrm{m}$ and 4000$\times$$900\mu\textrm{m}$ down to 14%, 14% and 11 % of them, respectively, the center displacements of PMBA were decreased from 0.68 um to 0.10 um at 5 Hz and 12 Vpp. So, PMBA with large areas showed larger displacements than PMBA with small areas and experimental results were also good agreement with the plate and shell theory.

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